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利用调Q的Nd: YAG激光器输出的纳秒激光脉冲诱导等离子体加工石英微通道, 显微镜下观察微通道深度可达4 mm, 通道周围没有发现热裂纹, 围绕通道内壁产生了固化层. 研究了纳秒脉冲下固体材料损伤的电离机理. 波长为1064 nm, 光强不很强的纳秒脉冲作用时, 光学击穿中等离子体的形成主要是雪崩电离的结果, 利用雪崩击穿的阈值理论得到了等离子体形成模型, 求出了等离子体形成范围, 理论模型结果与实验结果基本相符.最后基于激光支持的爆轰波模型, 利用流体力学理论求出了等离子体的温度、速度、压强等特征参数, 并分析了微通道的特点.高温高压的等离子体烧蚀出石英微通道, 等离子通过后, 在冲击波压力作用下微通道内壁熔化的石英凝固形成固化层.A Q-switched Nd: YAG laser was used to fabricate micro channels in the fused silica substrate by laser-induced plasma. The micro channels were observed with fluorescence microscope, no thermal cracks around the channels and the depth of the channels is up to 4 mm. There are coagulation layers around the inner surface. We studied the ionization mechanism of optical breakdown in solids by nanosecond laser pulses. For the 1064 nm laser, as the intensity of nanosecond pulse is not enough large, plasma formation in optical breakdown is the result of an electron avalanche process. We got the plasma formation model using the breakdown threshold of avalanche ionization and calculated the range of laser plasma based on the model. The theoretical analysis based on the model is shown to be mainly agreement with the experimental observations. The laser-supported detonation wave (LSDW) based on the principle of hydrodynamics was analyzed as well and calculated the characteristic parameters of plasma including the plasma temperature, pressure and velocity. The characteristics of micro channels were analyzed through the parameters. When the plasma passed, the melting quartz solidified with the effect of LSDW and produced the coagulation layers. The ablation of the high temperature and pressure plasma lead to a micro channel of high quality with a relatively smooth internal surface and no thermal cracks.
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Keywords:
- plasma /
- micro channels /
- avalanche ionization /
- laser supported detonation wave
[1] Qin S J, Li W J 2002 Appl. Phys. A 74 773
[2] Qin S J, Li W J 2004 Acta Mech. Sin. 20 125
[3] Fan Y F, Qin S J 2006 Laser and Optoelectronics Progress 43 64 (in Chinese) [樊永发, 秦水介 2006 激光与光电子学进展 43 64]
[4] Feng C L, Wang H X, Qin S J 2010 Laser Technol. 34 433 (in Chinese) [冯彩玲, 王海旭, 秦水介 2010 激光技术 34 433]
[5] Raizer Y P 1966 Sov. Phys. Usp. 8 650
[6] Docchio F, Regondi P, Capon M R C, Mellerio J 1988 Appl. Opt. 27 3661
[7] Fan C H, Longtin J P 2001 Appl. Opt. 40 3124
[8] Lu J, Ni X W, He A Z 1996 Physics of the Interaction for Laser and Materials ( Beijing: China Machine Press) pp98--166 (in Chinese) [陆建, 倪晓武, 贺安之 1996 激光与材料相互作用物理学 (北京: 机械工业出版社) 第98---166页]
[9] Shen Y R 1984 The Principles of Nonlinear Optics (New York: Wiley) pp528--539
[10] Kennedy P K 1995 IEEE J. Quantum Electron 31 2241
[11] Bloembergen N 1974 IEEE J. Quantum Electron QE-10 375
[12] Noack J, Vogel A 1999 IEEE J. Quantum Electron 35 1156
[13] Deng Y P, Jia T Q, Leng Y X, Lu H O, Li R X, Xu Z Z 2004 Acta Phys. Sin. 53 2216 (in Chinese) [邓蕴沛, 贾天卿, 冷雨欣, 陆海鸥, 李儒新, 徐至展 2004 53 2216]
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[15] Li X X, Jia T Q, Feng D H, Xu Z Z 2004 Acta Phys. Sin. 53 2154 (in Chinese) [李晓溪, 贾天卿, 冯东海, 徐至展 2004 53 2154]
[16] Yu B H, Dai N L, Wang Y, Li Y H, Li L L, Zheng Q G, Lu P X 2007 Acta Phys. Sin. 56 5821 (in Chinese) [余本海, 戴能力, 王英, 李玉华, 李玲玲, 郑启光, 陆培祥 2007 56 5821]
[17] Hua J R, Zu X T, Li L, Yuan X D, Zheng W G, Jiang X D 2009 High Power Laser and Particle Beams 21 919 (in Chinese) [花金荣, 祖小涛, 李莉, 袁晓东, 郑万国, 蒋晓东 2009 强激光与粒子束 21 919]
[18] Gan R B, Lin L B, Lu Y, Liu Q, Zhuo Z Y, Jiang X D, Huang Z X, Ye L 2001 High Power Laser and Particle Beams 13 603 (in Chinese) [甘荣兵, 林理彬, 卢勇, 刘强, 卓志云, 蒋晓东, 黄祖鑫, 叶琳 2001 强激光与粒子束 13 603]
[19] Siegman A E 1986 Lasers (Sausalito: University Science Books) pp663--674
[20] Keldysh L V 1965 Sov. Phys. JETP 20 1307
[21] Allmen M V (translated by Qi H B, Hu H B, Xie B L, Peng J) 1994 Laser Beam Interactions with Matedals: Physical Prineipie and Application (Beijing: Science Press) pp171--187 (in Chinese) [奥尔曼 M V著 (漆海滨, 胡洪波, 谢柏林, 彭健译) 1994 激光束与材料相互作用的原理及应用(北京: 科学出版社) 第171---187页]
[22] Sun C W 2002 Laser Irradiation Effects (Beijing: National Defence Industry Press) pp112--114 (in Chinese) [孙承纬 2002 激光辐照效应 (北京: 国防工业出版社) 第112---114页]
[23] Anthony N P 1973 Phys. Fluids 16 1435
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[1] Qin S J, Li W J 2002 Appl. Phys. A 74 773
[2] Qin S J, Li W J 2004 Acta Mech. Sin. 20 125
[3] Fan Y F, Qin S J 2006 Laser and Optoelectronics Progress 43 64 (in Chinese) [樊永发, 秦水介 2006 激光与光电子学进展 43 64]
[4] Feng C L, Wang H X, Qin S J 2010 Laser Technol. 34 433 (in Chinese) [冯彩玲, 王海旭, 秦水介 2010 激光技术 34 433]
[5] Raizer Y P 1966 Sov. Phys. Usp. 8 650
[6] Docchio F, Regondi P, Capon M R C, Mellerio J 1988 Appl. Opt. 27 3661
[7] Fan C H, Longtin J P 2001 Appl. Opt. 40 3124
[8] Lu J, Ni X W, He A Z 1996 Physics of the Interaction for Laser and Materials ( Beijing: China Machine Press) pp98--166 (in Chinese) [陆建, 倪晓武, 贺安之 1996 激光与材料相互作用物理学 (北京: 机械工业出版社) 第98---166页]
[9] Shen Y R 1984 The Principles of Nonlinear Optics (New York: Wiley) pp528--539
[10] Kennedy P K 1995 IEEE J. Quantum Electron 31 2241
[11] Bloembergen N 1974 IEEE J. Quantum Electron QE-10 375
[12] Noack J, Vogel A 1999 IEEE J. Quantum Electron 35 1156
[13] Deng Y P, Jia T Q, Leng Y X, Lu H O, Li R X, Xu Z Z 2004 Acta Phys. Sin. 53 2216 (in Chinese) [邓蕴沛, 贾天卿, 冷雨欣, 陆海鸥, 李儒新, 徐至展 2004 53 2216]
[14] Han J H, Feng G Y, Yang L M, Zhang Q H, Xie X D, Zhu Q H, Zhou S H 2008 Acta Phys. Sin. 57 5558 (in Chinese) [韩敬华, 冯国英, 杨李茗, 张秋慧, 谢旭东, 朱启华, 周寿桓 2008 57 5558]
[15] Li X X, Jia T Q, Feng D H, Xu Z Z 2004 Acta Phys. Sin. 53 2154 (in Chinese) [李晓溪, 贾天卿, 冯东海, 徐至展 2004 53 2154]
[16] Yu B H, Dai N L, Wang Y, Li Y H, Li L L, Zheng Q G, Lu P X 2007 Acta Phys. Sin. 56 5821 (in Chinese) [余本海, 戴能力, 王英, 李玉华, 李玲玲, 郑启光, 陆培祥 2007 56 5821]
[17] Hua J R, Zu X T, Li L, Yuan X D, Zheng W G, Jiang X D 2009 High Power Laser and Particle Beams 21 919 (in Chinese) [花金荣, 祖小涛, 李莉, 袁晓东, 郑万国, 蒋晓东 2009 强激光与粒子束 21 919]
[18] Gan R B, Lin L B, Lu Y, Liu Q, Zhuo Z Y, Jiang X D, Huang Z X, Ye L 2001 High Power Laser and Particle Beams 13 603 (in Chinese) [甘荣兵, 林理彬, 卢勇, 刘强, 卓志云, 蒋晓东, 黄祖鑫, 叶琳 2001 强激光与粒子束 13 603]
[19] Siegman A E 1986 Lasers (Sausalito: University Science Books) pp663--674
[20] Keldysh L V 1965 Sov. Phys. JETP 20 1307
[21] Allmen M V (translated by Qi H B, Hu H B, Xie B L, Peng J) 1994 Laser Beam Interactions with Matedals: Physical Prineipie and Application (Beijing: Science Press) pp171--187 (in Chinese) [奥尔曼 M V著 (漆海滨, 胡洪波, 谢柏林, 彭健译) 1994 激光束与材料相互作用的原理及应用(北京: 科学出版社) 第171---187页]
[22] Sun C W 2002 Laser Irradiation Effects (Beijing: National Defence Industry Press) pp112--114 (in Chinese) [孙承纬 2002 激光辐照效应 (北京: 国防工业出版社) 第112---114页]
[23] Anthony N P 1973 Phys. Fluids 16 1435
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