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ZnS is one of the excellent materials that are used as long wave window in infrared, but the reflection of the surface is high. In order to reduce the reflection of the ZnS surface, we designed the sub-wavelength antireflective structure on ZnS by coupled-wave theory. The parameters of the sub-wavelength antireflective structure were optimiged and the two-dimensional sub-wavelength antireflective structure on ZnS was fabricated by reactive ion etching technique. The results show that the transmittance of etched ZnS is significantly better than that of bare ZnS at wavelengths of 8—12 μm. This is a new antireflection method using ZnS.
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Keywords:
- coupled-wave theory /
- antireflection of sub-wavelength structure /
- reactive ion etching /
- ZnS
[1] Yu H Z, Zheng Y H, Liu J P 1997 Laser & Infrared 27 366 (in Chinese) [余怀之、 郑岳华、 刘建平 1997 激光与红外 27 366]
[2] J. Infrared Millim. Waves 23 6 (in Chinese) [曹召良、 卢振武、 张 平、 王淑荣、 赵晶丽、 李凤有 2004 红外与毫米学报 23 6]
[3] Joseph S, Marcovitch O, Yadin Y, Klaiman D, Koren N, Zipin H 2007 Proc. SPIE 6545 6545KT1
[4] Wilson M, Thomas M, Perez I M, Price D 1994 Proc. SPIE 2286 108
[5] Hobbs D S, MacLeod B D 2005 Proc. SPIE 5786 349
[6] Grann E B, Moharam M G, Pommet D A 1995 J. Opt. Soc. Am. A 12 333
[7] Grann E B, Moharam M G, Pommet D A 1994 J. Opt. Soc. Am. A 11 2695
[8] Cao Z L, Lu Z W, Zhang P, Wang S R, Zhao J L, Li F Y 2004
[9] Sun C H, Jiang B, Jiang P 2008 Appl. Phys. Lett. 92 061112
[10] DeNatale J F, Hood P J, Flintoff J F, Hurber A B 1992 J. Appl. Phys. 71 1388
[11] Kim D P, Kim C I, Kwon K H 2004 Thin Solid Films 459 131
[12] Su S H, Yokoyama M, Su Y K 1997 Materials Chemistry & Physics 50 205
[13] Raguin D H, Morris G M 1993 Appl. Opt. 32 1154
[14] Raguin D H 1993 Ph. D. Dissertation (New York: The University of Rochester)
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[1] Yu H Z, Zheng Y H, Liu J P 1997 Laser & Infrared 27 366 (in Chinese) [余怀之、 郑岳华、 刘建平 1997 激光与红外 27 366]
[2] J. Infrared Millim. Waves 23 6 (in Chinese) [曹召良、 卢振武、 张 平、 王淑荣、 赵晶丽、 李凤有 2004 红外与毫米学报 23 6]
[3] Joseph S, Marcovitch O, Yadin Y, Klaiman D, Koren N, Zipin H 2007 Proc. SPIE 6545 6545KT1
[4] Wilson M, Thomas M, Perez I M, Price D 1994 Proc. SPIE 2286 108
[5] Hobbs D S, MacLeod B D 2005 Proc. SPIE 5786 349
[6] Grann E B, Moharam M G, Pommet D A 1995 J. Opt. Soc. Am. A 12 333
[7] Grann E B, Moharam M G, Pommet D A 1994 J. Opt. Soc. Am. A 11 2695
[8] Cao Z L, Lu Z W, Zhang P, Wang S R, Zhao J L, Li F Y 2004
[9] Sun C H, Jiang B, Jiang P 2008 Appl. Phys. Lett. 92 061112
[10] DeNatale J F, Hood P J, Flintoff J F, Hurber A B 1992 J. Appl. Phys. 71 1388
[11] Kim D P, Kim C I, Kwon K H 2004 Thin Solid Films 459 131
[12] Su S H, Yokoyama M, Su Y K 1997 Materials Chemistry & Physics 50 205
[13] Raguin D H, Morris G M 1993 Appl. Opt. 32 1154
[14] Raguin D H 1993 Ph. D. Dissertation (New York: The University of Rochester)
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