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以帧转移型面阵CCD图像传感器为例,采用有限元法研究了波长1.06 m,脉宽ms量级长脉冲Nd:YAG激光与组成CCD传感器的MOS光敏单元的作用过程及硬破坏机理.建立了长脉冲激光辐照MOS光敏单元的热力耦合模型,模拟了MOS光敏单元的温度分布和应力分布.研究结果表明:在长脉冲激光作用下,由于S层表面径向压应力超过其抗压强度引起MOS光敏单元出现了OS层间分裂,进而受径向、环向和轴向压应力的共同作用下,在光敏单元还未熔融时,层间分裂就扩大至光敏单元的整个OS层间.OS层间完全分裂会使光敏单元发生硬破坏,并造成CCD传感器中激光照射区的单个或一列光敏单元的功能完全失效.文章的研究结果可为CCD图像传感器的激光损伤及防护提供必要的理论依据.The interaction process between 1.06 m wavelength Nd:YAG long pulse laser with a millisecond pulse width and the MOS pixel of frame transfer area CCD image sensor and its hard damage mechanism are studied by the finite element method. The thermal-mechanical coupled modeling for long pulse laser irradiation of a MOS pixel is established, and the distributions of temperature and stress are obtained. The results show that the spallations between O layer and S layer appear due to the S layer radial stress on the surface exceeding the compressive strength under the action of the long pulse laser, then it will extend to the entire layer before melting by radial stress,axial stress and hoop stress. Hard damage of pixel occurs as spallation, and one pixel or an array of pixels in the laser irradiation area of CCD sensor is completely in failure. This paper could provide foundation for both laser-induced damage and protection of CCD image sensor.
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Keywords:
- long pulse laser /
- CCD image sensor /
- hard damage mechanism /
- spallation
[1] Zhang C Z, Blarre L, Walser R M, Becker M F 1993 Appl. Opt. 32 5201
[2] Zhang D Y, Zhao J H, Wang W P, Liu C L, Tang X S 2003 High Power Laser and Particle Beams 15 1050 (in Chinese) [张大勇、赵剑衡、王伟平、刘仓理、唐小松 2003 强激光与粒子束 15 1050]
[3] Guo S F, Cheng X A, Fu X Q, Sun Y Q, Wang F, Li W Y, Zhou Y P, Lu Q S, Wen S C 2007 High Power Laser and Particle Beams 19 1783 (in Chinese) [郭少锋、程湘爱、傅喜泉、孙运强、王 飞、李文煜、周玉平、陆启生、文双春 2007 强激光与粒子束 19 1783]
[4] Ni X W, Lu J, He A Z 1994 Acta Phys. Sin. 43 1795 (in Chinese) [倪晓武、陆 建、贺安之 1994 43 1795]
[5] Qiu D D, Zhang Z, Wang R, Jiang T, Cheng X A 2011 Acta Opt. Sin. 31 0214006-1 (in Chinese)[邱冬冬、张 震、王 睿、江 天、程湘爱 2011 光学学报 31 0214006-1]
[6] Qin Y, Chen Y B, Ni X W, Shen Z H, Bi J, Zhang X H 2010 Opt. and Laser. in Engin. 48 361
[7] Wang B, Qin Y, Ni X W, Shen Z H, Lu J 2010 Appl. Opt. 49 5537
[8] Bi J, Zhang X H, Ni X W, Jin G Y, Li C L, Xu L J, Chen Y B 2011 Lasers in Engineering. (in Press)
[9] Pronko P P, VanRompay P A, Horvath C, Loesel F, Juhasz T, Liu X, Mourou G 1998 Phys. Rev. B 58 2387
[10] Kong X Q 1998 The Application of the Finite Element Method in Heat Transfer (Beijing: Science Press) p134 (in Chinese) [孔祥谦 1998 有限单元法在传热学中的应用(北京:科学出版社)第134页]
[11] Chen Y B, Lu J, Ni X W, Bi J, Zhang X H 2008 J. Mater. Proc. Technol. 205 9
[12] Sun C W 2002 The Effect of Laser Irradiation (Beijing: National Defence Industry Press) p10-29 (in Chinese) [孙承纬 2002 激光辐照效应(北京:国防工业出版社)第10-29页]
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[1] Zhang C Z, Blarre L, Walser R M, Becker M F 1993 Appl. Opt. 32 5201
[2] Zhang D Y, Zhao J H, Wang W P, Liu C L, Tang X S 2003 High Power Laser and Particle Beams 15 1050 (in Chinese) [张大勇、赵剑衡、王伟平、刘仓理、唐小松 2003 强激光与粒子束 15 1050]
[3] Guo S F, Cheng X A, Fu X Q, Sun Y Q, Wang F, Li W Y, Zhou Y P, Lu Q S, Wen S C 2007 High Power Laser and Particle Beams 19 1783 (in Chinese) [郭少锋、程湘爱、傅喜泉、孙运强、王 飞、李文煜、周玉平、陆启生、文双春 2007 强激光与粒子束 19 1783]
[4] Ni X W, Lu J, He A Z 1994 Acta Phys. Sin. 43 1795 (in Chinese) [倪晓武、陆 建、贺安之 1994 43 1795]
[5] Qiu D D, Zhang Z, Wang R, Jiang T, Cheng X A 2011 Acta Opt. Sin. 31 0214006-1 (in Chinese)[邱冬冬、张 震、王 睿、江 天、程湘爱 2011 光学学报 31 0214006-1]
[6] Qin Y, Chen Y B, Ni X W, Shen Z H, Bi J, Zhang X H 2010 Opt. and Laser. in Engin. 48 361
[7] Wang B, Qin Y, Ni X W, Shen Z H, Lu J 2010 Appl. Opt. 49 5537
[8] Bi J, Zhang X H, Ni X W, Jin G Y, Li C L, Xu L J, Chen Y B 2011 Lasers in Engineering. (in Press)
[9] Pronko P P, VanRompay P A, Horvath C, Loesel F, Juhasz T, Liu X, Mourou G 1998 Phys. Rev. B 58 2387
[10] Kong X Q 1998 The Application of the Finite Element Method in Heat Transfer (Beijing: Science Press) p134 (in Chinese) [孔祥谦 1998 有限单元法在传热学中的应用(北京:科学出版社)第134页]
[11] Chen Y B, Lu J, Ni X W, Bi J, Zhang X H 2008 J. Mater. Proc. Technol. 205 9
[12] Sun C W 2002 The Effect of Laser Irradiation (Beijing: National Defence Industry Press) p10-29 (in Chinese) [孙承纬 2002 激光辐照效应(北京:国防工业出版社)第10-29页]
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