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Based on the fact that fused silica material can strongly absorb 10.6 μm CO2 laser, a method of using CO2 laser multi-time raster scanning to repair the densely distributed scratches and polishing pits is investigated. The experimental results indicate that the scratches and polishing pits can be fully eliminated under the appropriate parameters. The damage threshold testing results also indicate that the damage threshold for fully eliminating scratches and polishing pits can reach or exceed the damage threshold of substrate. Meanwhile, Combining the simulation results obtained by finite element software-Ansys, the processes of the scratches and polishing pits eliminated by CO2 laser are analyzed. The present work is of significance for the study on how to eliminate the scratches and polishing pits on the surface of component.
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Keywords:
- fused silica /
- CO2 laser /
- raster scanning /
- numerical simulation
[1] Bercegol H, Grua P 2008 Proc. of SPIE 7132 71321B
[2] Liu H J, Zhou X D, Huang J, Wang F R, Jiang X D, Huang J, Wu W D, Zheng W G 2011 Acta Phys. Sin. 60 065202 (in Chinese) [刘红婕, 周信达, 黄进, 王凤蕊, 蒋晓东, 黄竞, 吴卫东, 郑万国 2011 60 065202]
[3] Bouchut P, Garrec P, Pelle C 2003 Proc. of SPIE 4932 103
[4] Wang F R, Huang J, Liu H J, Zhou X D, Jiang X D, Wu W D, Zheng W G 2010 Acta Phys. Sin 59 5122 (in Chinese) [王凤蕊, 黄进, 刘红婕, 周信达, 蒋晓东, 吴卫东, 郑万国 2010 59 5122]
[5] Hrubesh L W, Norton M A, Molander W A, Donohue E E, Maricle S M, Penetrante B M, Brusasco R M, Grundler W, Butler J A, Carr J W, Hill R M, Summers L J, Feit M D, Rubenchik A, Key M H, Wegner P J, Burnham A K, Hackel L A, Kozlowski M R 2002 Proc. of SPIE 4679 23
[6] Brusasco R M, Penetrante B M, Butler J A, Hrubesh L W 2001 Proc. of SPIE 4679 40
[7] Guss G, Bass I, Draggoo V, Hackel R, Payne S, Lancaster M, Mak P 2007 Proc. of SPIE 6403 64030M
[8] Jiang Y, Xiang X, Liu C M, Luo C S, Wang H J, Yuan X D, He S B, Ren W, L H Bi, Zheng W G, Zu X T 2012 Chin. Phys. B 21 064219
[9] Mendez E, Nowak K M, Baker H J, Villarreal F J, Hall D R 2006 Appl. Opt. 45 5358
[10] Bouchut P, Delrive L, Decruppe Dl, Garrec P 2004 Proc. of SPIE 5252 122
[11] Brusasco R M, Penetrante B M, Butler J A, Maricle S M, Peterson J E 2002 Proc. of SPIE 4697 34
[12] Nowak K M, Baker H J, Hall D R 2006 Appl. Opt. 45 162
[13] Temple P A, Lowdermilk W H, Milam D 1982 Appl. Opt. 21 3249
[14] Mendez E, Baker H J, Nowak K M, Villarreal F, Hall D R 2005 Proc. of SPIE 5647 165
[15] Xiao Y M, Bass M 1983 Appl. Opt. 22 2933
[16] Wong L, Suratwala T, Feit M D, Miller P E, Steele R 2009 J. Non-Cryst. Sol. 355 797
[17] Genin F Y, Salleo A, Pistor T V, Chase L L 2001 J. Opt. Soc. Am. A 18 2607
[18] Zhao J, Sullivan J, Zayac J, Bennett T D 2004 J. Appl. Phys. 95 5475
[19] Yang S T, Matthews M J, Elhadj S, Cooke D, Guss G M, Draggoo V G, Wegner P L J 2010 Appl. Opt. 49 2606
[20] Bouchut P, Decruppe D, Delrive L 2004 J. Appl. Phys. 96 3221
-
[1] Bercegol H, Grua P 2008 Proc. of SPIE 7132 71321B
[2] Liu H J, Zhou X D, Huang J, Wang F R, Jiang X D, Huang J, Wu W D, Zheng W G 2011 Acta Phys. Sin. 60 065202 (in Chinese) [刘红婕, 周信达, 黄进, 王凤蕊, 蒋晓东, 黄竞, 吴卫东, 郑万国 2011 60 065202]
[3] Bouchut P, Garrec P, Pelle C 2003 Proc. of SPIE 4932 103
[4] Wang F R, Huang J, Liu H J, Zhou X D, Jiang X D, Wu W D, Zheng W G 2010 Acta Phys. Sin 59 5122 (in Chinese) [王凤蕊, 黄进, 刘红婕, 周信达, 蒋晓东, 吴卫东, 郑万国 2010 59 5122]
[5] Hrubesh L W, Norton M A, Molander W A, Donohue E E, Maricle S M, Penetrante B M, Brusasco R M, Grundler W, Butler J A, Carr J W, Hill R M, Summers L J, Feit M D, Rubenchik A, Key M H, Wegner P J, Burnham A K, Hackel L A, Kozlowski M R 2002 Proc. of SPIE 4679 23
[6] Brusasco R M, Penetrante B M, Butler J A, Hrubesh L W 2001 Proc. of SPIE 4679 40
[7] Guss G, Bass I, Draggoo V, Hackel R, Payne S, Lancaster M, Mak P 2007 Proc. of SPIE 6403 64030M
[8] Jiang Y, Xiang X, Liu C M, Luo C S, Wang H J, Yuan X D, He S B, Ren W, L H Bi, Zheng W G, Zu X T 2012 Chin. Phys. B 21 064219
[9] Mendez E, Nowak K M, Baker H J, Villarreal F J, Hall D R 2006 Appl. Opt. 45 5358
[10] Bouchut P, Delrive L, Decruppe Dl, Garrec P 2004 Proc. of SPIE 5252 122
[11] Brusasco R M, Penetrante B M, Butler J A, Maricle S M, Peterson J E 2002 Proc. of SPIE 4697 34
[12] Nowak K M, Baker H J, Hall D R 2006 Appl. Opt. 45 162
[13] Temple P A, Lowdermilk W H, Milam D 1982 Appl. Opt. 21 3249
[14] Mendez E, Baker H J, Nowak K M, Villarreal F, Hall D R 2005 Proc. of SPIE 5647 165
[15] Xiao Y M, Bass M 1983 Appl. Opt. 22 2933
[16] Wong L, Suratwala T, Feit M D, Miller P E, Steele R 2009 J. Non-Cryst. Sol. 355 797
[17] Genin F Y, Salleo A, Pistor T V, Chase L L 2001 J. Opt. Soc. Am. A 18 2607
[18] Zhao J, Sullivan J, Zayac J, Bennett T D 2004 J. Appl. Phys. 95 5475
[19] Yang S T, Matthews M J, Elhadj S, Cooke D, Guss G M, Draggoo V G, Wegner P L J 2010 Appl. Opt. 49 2606
[20] Bouchut P, Decruppe D, Delrive L 2004 J. Appl. Phys. 96 3221
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