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An improved method of step height measurement by optical frequency comb and tunable diode laser is presented. The tunable diode laser is phase locked to the optical frequency comb, so that the output wavelength of the laser can be locked and measured in a high accuracy. Based on the principle of variable synthetic wavelength chain, the step height can be measured by tuning the wavelength of the locked tunable diode laser. This method can be used to eliminate the effect of the synthetic wavelength error on the measurement uncertainty of the step height. The stability of the phase locked laser is tested by locking a tunable diode laser to an optical frequency comb for about 5000 s. It is shown that the frequency stability of the phase locked laser is 1.810-12. The uncertainty of the step height measurement by this method is estimated to be 7.9 nm accordingly. Moreover, the measurement result of the step height can be traced to the time and frequency standard.
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Keywords:
- step height /
- optical frequency comb /
- tunable diode laser /
- synthetic wavelength
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[7] Liang J, Long X W, Zhang B, Jin S L 2010 Acta Opt. Sin. 10 2947 (in Chinese) [粱晶, 龙兴武, 张斌, 金世龙 2010 光学学报 10 2947]
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[15] Cao S Y, Fang Z J, Meng F, Wang Q, Li T C 2011 Acta Phys. Sin. 60 080601 (in Chinese) [曹士英, 方占军, 孟飞, 王强, 李天初 2007 60 080601]
[16] Zhou T, Qi X H, Wang Q, Xiong W, Duan J, Zhou X J, Chen X Z 2010 Chin. Opt. Lett. 8 496
[17] Zhao Y N, Zhang J, Stuhler J, Schuricht G, Lison F, Lu Z H, Wang L J 2010 Opt. Commun. 283 4696
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[1] Gale D M, Pether M I, Dainty J C 1996 Appl. Opt. 35 131
[2] Lin D, Liu Z, Yan J, Yin C, Xu Y 2001 Appl. Opt. 43 1472
[3] Liang R, Li D C, Cao M, Zhao H Z, Wu Y J 1999 Acta Opt. Sin. 19 958 (in Chinese) [梁嵘, 李达成, 曹芒, 赵洪志, 武勇军 1999 光学学报 19 958]
[4] Bosch T, Lescure M 1995 Selected Papers on Laser Distance Measurement, SPIE Milestone Series (Bellingham: SPIE Optical Engineering Press) p533
[5] Tiliford C R 1977 Appl. Opt. 16 1857
[6] Upputuri P K, Mohan N K, Kothiyal M P 2009 Opt. Eng. 48 4073603
[7] Liang J, Long X W, Zhang B, Jin S L 2010 Acta Opt. Sin. 10 2947 (in Chinese) [粱晶, 龙兴武, 张斌, 金世龙 2010 光学学报 10 2947]
[8] Kikuta H, Iwata K, Nagata R 1986 Appl. Opt. 25 2976
[9] Yin C, Chao Z, Lin D, Xu Y, Xu J 2002 Opt. Eng. 41 746
[10] Jiang T G, Li Y, Wang X, Zhang S L 200 5 Laser & Infrared 35 518 (in Chinese) [蒋天罡, 李岩, 王昕, 张书练 2005 激光与红外 35 518]
[11] Wang X, Li Y, Zhang S L 2007 Appl. Opt. 46 5631
[12] Cundiff S T, Ye J 2003 Rev. Mod. Phys. 75 325
[13] Li T C, Fang Z J 2011 Chin. Sci. Bull. 56 709 (in Chinese) [李天初, 方占军 2011 科学通报 56 709]
[14] Han H N, Zhang W, Wang P, Li D H, Wei Z Y, Shen N C, Nie Y X, Gao Y P, Zhang S G, Li S Q 2007 Acta Phys. Sin. 56 2760 (in Chinese) [韩海年, 张炜, 王鹏, 李德华, 魏志义, 沈乃澂, 聂玉昕, 高玉平, 张首刚, 李师群 2007 56 2760]
[15] Cao S Y, Fang Z J, Meng F, Wang Q, Li T C 2011 Acta Phys. Sin. 60 080601 (in Chinese) [曹士英, 方占军, 孟飞, 王强, 李天初 2007 60 080601]
[16] Zhou T, Qi X H, Wang Q, Xiong W, Duan J, Zhou X J, Chen X Z 2010 Chin. Opt. Lett. 8 496
[17] Zhao Y N, Zhang J, Stuhler J, Schuricht G, Lison F, Lu Z H, Wang L J 2010 Opt. Commun. 283 4696
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