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Preparation of cubic boron nitride films by radio frequency sputtering

Tian Ling Ding Yi Chen Hao Liu Jun-Kai Deng Jin-Xiang He De-Yan Chen Guang-Hua

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Preparation of cubic boron nitride films by radio frequency sputtering

Tian Ling, Ding Yi, Chen Hao, Liu Jun-Kai, Deng Jin-Xiang, He De-Yan, Chen Guang-Hua
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  • Abstract views:  8375
  • PDF Downloads:  1448
  • Cited By: 0
Publishing process
  • Received Date:  24 November 2005
  • Accepted Date:  15 March 2006
  • Published Online:  05 May 2006

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