硅基光子集成研究进展

周培基; 李智勇; 俞育德; 余金中

doi:10.7498/aps.63.104218

摘要

报道了国际上关于硅基光子集成的最新研究进展和本课题组在该领域的研究成果，包括对一些光收发模块、Ⅲ-V族/硅基激光器等集成器件的结构改进和工艺的探索，展示了兼容互补金属氧化物半导体工艺的硅基光子集成在信息技术领域中的巨大前景. 可以预见，硅基光子集成已成为硅光子学的主要研究内容，硅光子学及硅基光子集成的发展目标是趋向更高速率、更低功耗及更大集成密度.

关键词:

The research progress of the silicon-based photonic integration in the world and the results of our group in recent years are reported in this paper, including exploration of design and improvement on process of the optical transceiver modules, Ⅲ-V/silicon lasers and other integrated photonics. The silicon photonics is predicted to have a great prospect in many fields due to its good compatibility with complementary metal oxide semiconductor technology. It is concluded that the trend of photonic integration on silicon substrate is toward high data rate, low power consumption and large integration density, and the silicon based photonic integration will become a main research subject of silicon photonics in the future.

Keywords:

作者及机构信息

1.
中国科学院半导体研究所集成光电子学国家重点实验室, 北京 100083

基金项目: 国家重点基础研究发展计划（批准号：2011CB301701）、国家高技术研究发展计划（批准号：2012AA012202）和国家自然科学基金（批准号：61275065）资助的课题.

Authors and contacts

1.
State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China

Funds: Project supported by the State Key Development Program for Basic Research of China (Grant No. 2011CB301701), the National High Technology Research and Development Program of China (Grant No. 2012AA012202), and the National Natural Science Foundation of China (Grant No. 61275065).

参考文献

[1]	Zhu Y, Xu X J, Li Z Y, Zhou L, Han W H, Fan Z C, Yu Y D, Yu J Z 2010 Chin. Phys. B 19 014229
[2]	Zhou L, Li Z Y, Zhu Y, Li Y T, Fan Z C, Han W H, Yu Y D, Yu J Z 2010 Chin. Phys. B 19 124214
[3]	Zhou L, Li Z Y, Hu Y T, Xiong K, Fan Z C, Han W H, Yu Y D, Yu J Z 2011 Chin. Phys. B 20 074212
[4]	Xu H H, Huang Q Z, Li Y T, Yu Y D, Yu J Z 2010 Chin. Phys. B 19 084210
[5]	Hu Y T, Xiao X, Li Z Y, Li Y T, Fan Z C, Han W H, Yu Y D, Yu J Z 2011 Chin. Phys. B 20 074208
[6]	Xiong K, Xiao X, Hu Y T, Li Z Y, Chu T, Yu Y D, Yu J Z 2012 Chin. Phys. B 21 074203
[7]	Xu H, Li X Y, Xiao X, Li Z Y, Yu Y D, Yu J Z 2013 Chin. Phys. B 22 114212
[8]	Yu J Z 2011 Silicon Photonics (Beijing: Science Press) p404 (in Chinese) [余金中 2011 硅光子学 (北京: 科学出版社) 第404页]
[9]	Pinguet T, Analui B, Balmater E, Guckenberger D, Harrison M, Koumans R, Kucharski D, Liang Y, Masini G, Mekis A, Mirsaidi S, Narasimha A, Peterson M, Rines D, Sadagopan V, Sahni S, Sleboda T J, Song D, Wang Y, Welch B, Witzens J, Yao J, Abdalla S, Gloeckner S, Dobbelaere P D 2008 Group IV Photonics Conference Cardiff, UK, September 17-19, 2008 p362
[10]	Jater S, Malinge Y, Zhou Z, Liang H, Liao S, Li Z, Bushyakanist C, Lee D C, Shafiiha R, Luff J, Feng D Z, Asghari M 2012 Group IV Photonics Conference San Diego, USA, August 29-31, 2012 p159
[11]	Assefa S, Shank S, Green W, Khater M, Kiewra E, Reinholm C, Kamlapurkar S, Rylyakov A, Schow C, Horst F, Pan H P, Topuria T, Rice P, Gill D M, Rosenberg J, Barwicz T, Yang M, Proesel J, Hofrichter J, Offrein B, Gu X X, Haensch W, Monaghan J E, Vlasov Y 2012 International Electron Devices Meeting San Francisco, USA, December 10-13, 2012 p33.8.1
[12]	Assefa S, Pan H, Shank S, Green W M J, Rylyakov A, Schow C, Khater M, Kamlapurkar S, Kiewra E, Reinholm C, Topuria T, Rice P, Baks C, Vlasov Y 2013 Optical Fiber Communications Conference Anaheim, USA, March 17-21, 2013 OM2H.4
[13]	Nishi H, Kou R, Hiraki T, Tsuchizawa T, Fukuda H, Ishikawa Y, Wada K, Yamada K 2013 Optical Fiber Communications Conference Anaheim, USA, March 17-21, 2013 OM2J.4
[14]	Dong P, Liu X, Chandrasekhar S, Buhl L L, Aroca R, Baeyens Y, Chen Y K 2013 Optical Fiber Communications Conference Anaheim, USA, March 17-21, 2013 PDP5C.6
[15]	Novack A, Liu Y, Ding R, Gould M, Jones T B, Li Q, Yang Y, Ma Y J, Zhang Y, Padmaraju K, Bergmen K, Lim A E J, Lo G Q, Hochberg M 2013 Group IV Photonics Conference Seoul, Korean, August 28-30, 2013 p7
[16]	Intermite G, Warburton R E, Myronov M, Allred P, Leadley D R, Gallacher K, Paul D J, Pilgrim N J, Lever L J M, Ikonic Z, Kelsall R W, Buller G S 2013 Group IV Photonics Conference Seoul, Korean, August 28-30, 2013 p132
[17]	Takeda K, Hiraki T, Tsuchizawa T, Nishi H, Kou R, Fukuda H, Ishikawa Y, Wada K, Yamada K 2013 Group IV Photonics Conference Seoul, Korean, August 28-30, 2013 p138
[18]	Kang J, Zhang R, Takenaka M, Takagi S 2013 Group IV Photonics Conference Seoul, Korean, August 28-30, 2013 p140
[19]	Cho N, Kim M, Ma Z Q 2013 Group IV Photonics Conference Seoul, Korean, August 28-30, 2013 p77
[20]	Kim I G, Jang K S, Kim S, Joo J, Kim G 2013 Group IV Photonics Conference Seoul, Korean, August 28-30, 2013 p79
[21]	Suwa Y, 2013 Group IV Photonics Conference Seoul, Korean, August 28-30, 2013 p37
[22]	Sukhdeo D S, Nam D, Kang J H, Petykiewicz J, Lee J H, Jung W S, Vuckovic J, Brongersma M L, Saraswat K C 2013 Group IV Photonics Conference Seoul, Korean, August 28-30, 2013 p73
[23]	Geiger R, Sess M J, Minamisawa R A, Bonzone C, Schiefler G, Frigeriod J, Chrastina D, Isella G, Spolenakb R, Faist J, Sigg H 2013 Group IV Photonics Conference Seoul, Korean, August 28-30, 2013 p93
[24]	Colece L 1997 Solid State Phenom. 54 55
[25]	Campenhout J V, Romeo P R, Regreny P, Seassal C, Thourhout D V, Cioccio L D, Fedeli J M, Baets R 2013 National Fiber Optic Engineers Conference Anaheim, USA, March 25, 2007 PDP35
[26]	Spuesens T, Régreny P, Thourhout D V 2013 Group IV Photonics Conference Seoul, Korean, August 28-30, 2013 p154
[27]	Wang Z Q, Sheng Zhen, Qiu C, Li H, Wu A M, Wang X, Zou S C, Gan F W 2013 Group IV Photonics Conference Seoul, Korean, August 28-30, 2013 p49
[28]	Kurczveil G 2011 IEEE J. Sel. Top. Quant. Electron. 17 1521
[29]	Liepvre A L, Jany C, Accard A, Lamponi M, Make D, Lelarge F, Fedeli J M, Messaoudene S, Bordel D, Duan G H 2013 Group IV Photonics Conference Seoul, Korean, August 28-30, 2013 p150
[30]	Painchaud Y, Pelletier M, Poulin M, Pelletier F, Latrasse C, Robidoux G, Savard S, Gagné J F, Trudel V, Picard M J, Poulin P, Sirois P, D'Amours F, Asselin D, Paquet S, Paquet C, Cyr M, Guy M, Osman M M, Zhuge Q, Xu X, Chagnon M, Plant D V 2013 Optical Fiber Communications Conference Anaheim, USA, March 17-21, 2013 OM2J.2
[31]	Sahni S, Ayazi A, Chi Y M, Dahl A, Dobbelaere P D, Gloeckner S, Hon K Y, Hovey S, Liang Y, Mack M, Masini G, Mekis A, Peterson M, Pinguet T, Schramm J, Sharp M, Sun P, Timpe R, Verslegers L 2013 Group IV Photonics Conference Seoul, Korean, August 28-30, 2013 p81
[32]	Urino Y, Horikawa T, Nakamura T, Arakawa Y 2013 Optical Fiber Communications Conference Anaheim, USA, March 17-21, 2013 OM2J.6
[33]	Rakowski M, Pantouvaki M, Yu H, Bogaerts W, Meyer K D, Steyaert M, Snyder B, O'Brien P, Ryckaert J, Absil P, Campenhout J V 2013 Optical Fiber Communications Conference Anaheim, USA, March 17-21, 2013 OM2H.5
[34]	Xiao X, Xu H, Li X Y, Li Z Y, Chu T, Yu J Z, Yu Y D 2013 Optical Fiber Communications Conference Anaheim, USA, March 17-21, 2013 OW4J.3
[35]	Li Z Y, Xu D X, McKinnon W R, Janz S, Schmid J H, Cheben P, Yu J Z 2009 Opt. Express 17 15947
[36]	Xiao X, Xu H, Li X Y, Hu Y T, Xiong K, Li Z Y, Chu T, Yu Y D, Yu J Z 2012 Opt. Express 20 02507
[37]	Xu H, Xiao X, Li X Y, Hu Y T, Li Z Y, Chu T, Yu Y D, Yu J Z 2012 Opt. Express 20 15093
[38]	Hu Y T, Xiao X, Xu H, Li X Y, Xiong K, Li Z Y, Chu T, Yu Y D, Yu J Z 2012 Opt. Express 20 15079
[39]	Xu H H, Hu Y T, Zhu Y, Li Y T, Li Z Y, Fan Z C, Yu Y D, Yu J Z 2010 Group IV Photonics Conference Beijing, China, September 1-3, 2010 p1.21

施引文献

[1]	Zhu Y, Xu X J, Li Z Y, Zhou L, Han W H, Fan Z C, Yu Y D, Yu J Z 2010 Chin. Phys. B 19 014229
[2]	Zhou L, Li Z Y, Zhu Y, Li Y T, Fan Z C, Han W H, Yu Y D, Yu J Z 2010 Chin. Phys. B 19 124214
[3]	Zhou L, Li Z Y, Hu Y T, Xiong K, Fan Z C, Han W H, Yu Y D, Yu J Z 2011 Chin. Phys. B 20 074212
[4]	Xu H H, Huang Q Z, Li Y T, Yu Y D, Yu J Z 2010 Chin. Phys. B 19 084210
[5]	Hu Y T, Xiao X, Li Z Y, Li Y T, Fan Z C, Han W H, Yu Y D, Yu J Z 2011 Chin. Phys. B 20 074208
[6]	Xiong K, Xiao X, Hu Y T, Li Z Y, Chu T, Yu Y D, Yu J Z 2012 Chin. Phys. B 21 074203
[7]	Xu H, Li X Y, Xiao X, Li Z Y, Yu Y D, Yu J Z 2013 Chin. Phys. B 22 114212
[8]	Yu J Z 2011 Silicon Photonics (Beijing: Science Press) p404 (in Chinese) [余金中 2011 硅光子学 (北京: 科学出版社) 第404页]
[9]	Pinguet T, Analui B, Balmater E, Guckenberger D, Harrison M, Koumans R, Kucharski D, Liang Y, Masini G, Mekis A, Mirsaidi S, Narasimha A, Peterson M, Rines D, Sadagopan V, Sahni S, Sleboda T J, Song D, Wang Y, Welch B, Witzens J, Yao J, Abdalla S, Gloeckner S, Dobbelaere P D 2008 Group IV Photonics Conference Cardiff, UK, September 17-19, 2008 p362
[10]	Jater S, Malinge Y, Zhou Z, Liang H, Liao S, Li Z, Bushyakanist C, Lee D C, Shafiiha R, Luff J, Feng D Z, Asghari M 2012 Group IV Photonics Conference San Diego, USA, August 29-31, 2012 p159
[11]	Assefa S, Shank S, Green W, Khater M, Kiewra E, Reinholm C, Kamlapurkar S, Rylyakov A, Schow C, Horst F, Pan H P, Topuria T, Rice P, Gill D M, Rosenberg J, Barwicz T, Yang M, Proesel J, Hofrichter J, Offrein B, Gu X X, Haensch W, Monaghan J E, Vlasov Y 2012 International Electron Devices Meeting San Francisco, USA, December 10-13, 2012 p33.8.1
[12]	Assefa S, Pan H, Shank S, Green W M J, Rylyakov A, Schow C, Khater M, Kamlapurkar S, Kiewra E, Reinholm C, Topuria T, Rice P, Baks C, Vlasov Y 2013 Optical Fiber Communications Conference Anaheim, USA, March 17-21, 2013 OM2H.4
[13]	Nishi H, Kou R, Hiraki T, Tsuchizawa T, Fukuda H, Ishikawa Y, Wada K, Yamada K 2013 Optical Fiber Communications Conference Anaheim, USA, March 17-21, 2013 OM2J.4
[14]	Dong P, Liu X, Chandrasekhar S, Buhl L L, Aroca R, Baeyens Y, Chen Y K 2013 Optical Fiber Communications Conference Anaheim, USA, March 17-21, 2013 PDP5C.6
[15]	Novack A, Liu Y, Ding R, Gould M, Jones T B, Li Q, Yang Y, Ma Y J, Zhang Y, Padmaraju K, Bergmen K, Lim A E J, Lo G Q, Hochberg M 2013 Group IV Photonics Conference Seoul, Korean, August 28-30, 2013 p7
[16]	Intermite G, Warburton R E, Myronov M, Allred P, Leadley D R, Gallacher K, Paul D J, Pilgrim N J, Lever L J M, Ikonic Z, Kelsall R W, Buller G S 2013 Group IV Photonics Conference Seoul, Korean, August 28-30, 2013 p132
[17]	Takeda K, Hiraki T, Tsuchizawa T, Nishi H, Kou R, Fukuda H, Ishikawa Y, Wada K, Yamada K 2013 Group IV Photonics Conference Seoul, Korean, August 28-30, 2013 p138
[18]	Kang J, Zhang R, Takenaka M, Takagi S 2013 Group IV Photonics Conference Seoul, Korean, August 28-30, 2013 p140
[19]	Cho N, Kim M, Ma Z Q 2013 Group IV Photonics Conference Seoul, Korean, August 28-30, 2013 p77
[20]	Kim I G, Jang K S, Kim S, Joo J, Kim G 2013 Group IV Photonics Conference Seoul, Korean, August 28-30, 2013 p79
[21]	Suwa Y, 2013 Group IV Photonics Conference Seoul, Korean, August 28-30, 2013 p37
[22]	Sukhdeo D S, Nam D, Kang J H, Petykiewicz J, Lee J H, Jung W S, Vuckovic J, Brongersma M L, Saraswat K C 2013 Group IV Photonics Conference Seoul, Korean, August 28-30, 2013 p73
[23]	Geiger R, Sess M J, Minamisawa R A, Bonzone C, Schiefler G, Frigeriod J, Chrastina D, Isella G, Spolenakb R, Faist J, Sigg H 2013 Group IV Photonics Conference Seoul, Korean, August 28-30, 2013 p93
[24]	Colece L 1997 Solid State Phenom. 54 55
[25]	Campenhout J V, Romeo P R, Regreny P, Seassal C, Thourhout D V, Cioccio L D, Fedeli J M, Baets R 2013 National Fiber Optic Engineers Conference Anaheim, USA, March 25, 2007 PDP35
[26]	Spuesens T, Régreny P, Thourhout D V 2013 Group IV Photonics Conference Seoul, Korean, August 28-30, 2013 p154
[27]	Wang Z Q, Sheng Zhen, Qiu C, Li H, Wu A M, Wang X, Zou S C, Gan F W 2013 Group IV Photonics Conference Seoul, Korean, August 28-30, 2013 p49
[28]	Kurczveil G 2011 IEEE J. Sel. Top. Quant. Electron. 17 1521
[29]	Liepvre A L, Jany C, Accard A, Lamponi M, Make D, Lelarge F, Fedeli J M, Messaoudene S, Bordel D, Duan G H 2013 Group IV Photonics Conference Seoul, Korean, August 28-30, 2013 p150
[30]	Painchaud Y, Pelletier M, Poulin M, Pelletier F, Latrasse C, Robidoux G, Savard S, Gagné J F, Trudel V, Picard M J, Poulin P, Sirois P, D'Amours F, Asselin D, Paquet S, Paquet C, Cyr M, Guy M, Osman M M, Zhuge Q, Xu X, Chagnon M, Plant D V 2013 Optical Fiber Communications Conference Anaheim, USA, March 17-21, 2013 OM2J.2
[31]	Sahni S, Ayazi A, Chi Y M, Dahl A, Dobbelaere P D, Gloeckner S, Hon K Y, Hovey S, Liang Y, Mack M, Masini G, Mekis A, Peterson M, Pinguet T, Schramm J, Sharp M, Sun P, Timpe R, Verslegers L 2013 Group IV Photonics Conference Seoul, Korean, August 28-30, 2013 p81
[32]	Urino Y, Horikawa T, Nakamura T, Arakawa Y 2013 Optical Fiber Communications Conference Anaheim, USA, March 17-21, 2013 OM2J.6
[33]	Rakowski M, Pantouvaki M, Yu H, Bogaerts W, Meyer K D, Steyaert M, Snyder B, O'Brien P, Ryckaert J, Absil P, Campenhout J V 2013 Optical Fiber Communications Conference Anaheim, USA, March 17-21, 2013 OM2H.5
[34]	Xiao X, Xu H, Li X Y, Li Z Y, Chu T, Yu J Z, Yu Y D 2013 Optical Fiber Communications Conference Anaheim, USA, March 17-21, 2013 OW4J.3
[35]	Li Z Y, Xu D X, McKinnon W R, Janz S, Schmid J H, Cheben P, Yu J Z 2009 Opt. Express 17 15947
[36]	Xiao X, Xu H, Li X Y, Hu Y T, Xiong K, Li Z Y, Chu T, Yu Y D, Yu J Z 2012 Opt. Express 20 02507
[37]	Xu H, Xiao X, Li X Y, Hu Y T, Li Z Y, Chu T, Yu Y D, Yu J Z 2012 Opt. Express 20 15093
[38]	Hu Y T, Xiao X, Xu H, Li X Y, Xiong K, Li Z Y, Chu T, Yu Y D, Yu J Z 2012 Opt. Express 20 15079
[39]	Xu H H, Hu Y T, Zhu Y, Li Y T, Li Z Y, Fan Z C, Yu Y D, Yu J Z 2010 Group IV Photonics Conference Beijing, China, September 1-3, 2010 p1.21

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