硅基光栅耦合器的研究进展

杨彪; 李智勇; 肖希; Nemkova Anastasia; 余金中; 俞育德

doi:10.7498/aps.62.184214

摘要

硅基光子集成芯片的研究近年来发展迅速, 已成为信息技术领域中最热门的研究方向之一, 光通信、光互连、光传感等相关研发应用机构高度关注其发展, 并积极介入. 硅基光子集成芯片中, 光栅耦合器作为光信号的输入和输出装置受到极大重视, 尤其在封装和测试等环节体现出极具价值的技术优势. 本文主要分析了光栅耦合器的工作原理、基本特性及国内外的发展现状和趋势, 同时也概括了本课题组近期在该方向上的研究成果.

关键词:

Silicon-based photonic integrated chips recently have attracted great attention and actively intervened in many applications such as optical communications, optical interconnects, and optical sensing for relevant research institutions. Photonic integrated circuits are the key block to build information infrastructures. Among of them, grating couplers play an important role in silicon photonics, due to high efficient optical coupling on/off photonic chips. Also, they have many advantages in high density photonic packaging and on-wafer testing, such as large alignment tolerances and no requirements for wafer scribing or chip polishing. This review focuses on the principles and performances of grating couplers on silicon-on-insulator substrates. In this article, we also discuss the state-of-art and the trends in the near future, with a summary of our achievements over the last few years.

Keywords:

作者及机构信息

1.
中国科学院半导体研究所, 集成光电子学国家重点实验室, 北京 100083

基金项目: 国家重点基础研究发展计划(批准号:2011CB301701);中国科学院知识创新工程重要方向项目(批准号:KGCX2-EW-102)和国家自然科学基金(批准号:61107048,61275065)资助的课题.

Authors and contacts

1.
National Key Laboratory for Optoelectronic Integration, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China

Funds: Project supported by the National Basic Research Program of China (Grant No. 2011CB301701), the Main Direction Program of Knowledge Innovation of Chinese Academy of Sciences (Grant No. KGCX2-EW-102), and the National Natural Science Foundation of China (Grant Nos. 61107048, 61275065).

参考文献

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施引文献

[1]	Kobrinsky M J, Block B A, Zheng J F, Barnett B C, Mohanmed E, Reshotko M, Robertson F, List S, Young I, Cadien K 2004 Intel Technol. J. 8 129
[2]	O’Connor I, Gaffiot F 2004 Ultra Low-Power Electronics and Design (New York: Springer) pp21-29
[3]	Jalali B, Fathpour S 2006 J. Lightwave Technol. 24 4600
[4]	Soref R 2006 IEEE J. Sel. Top. Quant. 12 1678
[5]	Miller D A 1997 Int. J. Optoelectron. 11 155
[6]	Bolten J, Hofrichter J, Moll N, Schöenberger S, Horst F, Offrein B J, Wahlbrink T, Mollenhauer T, Kurz H 2009 Microelectron. Eng. 86 1114
[7]	Chen X, Li C, Tsang H K 2008 IEEE Photon. Technol. Lett. 20 1914
[8]	van Laere F, Roelkens G, Ayre M, Schrauwen J, Taillaert D, van Thourhout D, Krauss T F, Baets R 2007 J. Lightwave Technol. 25 151
[9]	Selvaraja S K, Vermeulen D, Schaekers M, Sleeckx E, Bogaerts W, Roelkens G, Dumon P, van Thourhout D, Baets R 2009 Lasers and Electro-Optics/International Quantum Electronics Conference Munich, June 2-4. 2009 p1
[10]	Roelkens G, Vermeulen D, van Laere F, Selvaraja S, Scheerlinck S, Taillaert D, Bogaerts W, Dumon P, van Thourhout D, Baets R 2010 J. Nanosci. Nanotechnol. 10 1551
[11]	Anastasia N, Xiao X, Yang B, Chu T, Yu J Z, Yu Y D 2012 Chin. Phys. Lett. 19 114213
[12]	Zhou L, Li Z Y, Zhu Y, Li Y T, Fan Z C, Han W H, Yu Y D, Yu J 2010 Chin. Phys. B 19 124214
[13]	Taillaert D, Bienstman P, Baets R 2004 Opt. Lett. 29 2749
[14]	Tang Y, Wang Z, Wosinski L, Westergren U, He S 2010 Opt. Lett. 35 1290
[15]	Zhang C, Sun J H, Xiao X, Sun W M, Zhang X J, Chu T, Yu J Z, Yu Y D 2013 Chin. Phys. Lett. 30 014207
[16]	Li C, Zhang H J, Yu M B, Lo G 2013 Optical Fiber Communication Conference Anaheim, March 17, 2013
[17]	Ura S, Murata S, Awatsuji Y, Kintaka K 2008 Opt. Express 16 12207
[18]	Van Laere F, Kotlyar M V, Taillaert D, van Thourhout D, Krauss T F, Baets R 2007 IEEE Photon. Technol. Lett. 19 396
[19]	Zhou L, Li Z Y, Hu Y T, Xiong K, Fan Z C, Han W H, Yu Y D, Yu J Z 2011 Chin. Phys. B 20 074212
[20]	Yang J B, Zhou Z P, Jia H H, Zhang X A, Qin S Q 2011 Opt. Lett. 36 2614
[21]	Mekis A, Gloeckner S, Masini G, Narasimha A, Pinguet T, Sahni S, De Dobbelaere P 2011 IEEE J. Sel. Top. Quant. 17 597
[22]	Cheng Z, Chen X, Wong C, Xu K, Fung C K, Chen Y, Tsang H K 2012 Opt. Lett. 37 1217
[23]	Cheng Z, Chen X, Wong C Y, Xu K, Ki T H 2012 Opt. Lett. 37 5181
[24]	Zhu Y, Xu X J, Li Z Y, Zhou L, Han W H, Fan Z C, Yu Y D, Yu J Z 2010 Chin. Phys. B 19 5

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