金电极的激光组装制备研究

张然; 吕超; 肖鑫泽; 骆杨; 何艳; 徐颖

doi:10.7498/aps.63.074205

摘要

本研究提出了利用激光组装金纳米粒子制备金微电极以及光栅电极，实现了单根碳纳米管的自由电互联，制备条件温和，降低了对碳纳米管的损伤. 对纳米粒子直接加工制备微纳元器件结构可以很好的解决离子加工存在的质量输运不充分等问题，且金微纳结构置于空气中不易变质，具有很好的连续性、完整性和电学特性，具有广泛的应用前景.

关键词:

激光加工 /
金电极 /
碳纳米管

We proposed the fabrication of gold micro-electrode and grating electrode through laser assembling of gold nanoparticles and realized the electrical interconnection of the single carbon nanotube and gold nanolines, which can decrease the damage of the functional unit to a great extent. This method can also solve the problem of inadequate mass transport in the fabrication of ions. The microstructure could keep unoxidized in the atomasphere with excellent continuity, integrity, and electrical properties, which made this technique have wide application prospects.

Keywords:

作者及机构信息

1.
吉林大学电子科学与工程学院, 集成光电子学国家重点联合实验室, 长春 130012;

2.
中国科学院长春光学精密机械与物理研究所, 长春 130033

基金项目: 国家自然科学基金（批准号：60978048，61378053）资助的课题.

Authors and contacts

1.
State Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China;

2.
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China

Funds: Project supported by the National Natural Science Foundation of China (Grant Nos. 60978048, 61378053).

参考文献

[1]	Su Y H, Ke Y F, Cai S L, Yao Q Y 2012 Light Sci. Appl. 1 e14
[2]	Gao B R, Wang H Y, Hao Y W, Fu L M, Fang H H, Jiang Y, Wang L, Chen Q D, Xia H, Pan L Y, Ma Y G, Sun H B 2009 J. Phys. Chem. B 114 128
[3]	Zhang R, Xu B B, Liu X Q, Zhang Y L, Xu Y, Chen Q D, Sun H B 2012 Chem. Commun. 48 5913
[4]	Liu X L, Xu H, Ma S S, Deng C S, Guo A M 2006 Acta Phys. Sin. 55 5562 (in Chinese)[刘小良, 徐慧, 马松山, 邓超生, 郭爱敏2006 55 5562]
[5]	LiuX H, Zhao H L, Li T Y, Zhang R, Li S J, Ge C H 2013 Acta Phys. Sin. 62 147308 (in Chinese)[刘兴辉, 赵宏亮, 李天宇, 张仁, 李松杰, 葛春华2013 62 147308]
[6]	Li L X, Su J B, Wu Y, Zhu X F, Wang Z G 2012 Acta Phys. Sin. 61 36401 (in Chinese)[李论雄, 苏江滨, 吴燕, 朱贤方, 王占国2012 61 36401]
[7]	Chen L, Zhu Y, Zang X, Cai B, Li Z, Xie L, Zhuang S 2013 Light Sci. Appl. 2 e60
[8]	Ding K, Ning C Z 2012 Light Sci. Appl. 1 e20
[9]	Sabry Y M, Saadany B, Khalil D, Bourouina T 2013 Light Sci. Appl. 2 e94
[10]	Urness A C, Moore E D, Kamysiak K K, Cole M C, McLeod R R 2013 Light Sci. Appl. 2 e56
[11]	Wang P P, Yang C J, Li J, Tang P, Lin F, Zhu X 2013 Acta Phys. Sin. 62 167302 (in Chinese)[王培培, 杨超杰, 李洁, 唐鹏, 林峰, 朱星2013 62 167302]
[12]	Ishikawa A, Tanaka T, Kawata S 2006 Appl. Phys. Lett. 89 113102
[13]	Xu B B, Xia H, Niu L G, Zhang Y L, Sun K, Chen Q D, Xu Y, L Z Q, Li Z H, Misawa H, Sun H B 2010 Small 6 1762
[14]	Rycenga M, Cobley C M, Zeng J, Li W, Moran C H, Zhang Q, Qin D, Xia Y 2011 Chem. Rev. 111 3669
[15]	Masui K, Shoji S, Asaba K, Rodgers T C, Jin F, Duan X M, Kawata S 2011 Opt. Express 19 22786
[16]	Xu B B, Ma Z C, Wang L, Zhang R, Niu L G, Yang Z, Zhang Y L, Zheng W H, Zhao B, Xu Y, Chen Q D, Xia H, Sun H B 2011 Lab. Chip. 11 3347
[17]	Xu B B, Zhang R, Liu X Q, Wang H, Zhang Y L, Jiang H B, Wang L, Ma Z C, Ku J F, Xiao F S, Sun H B 2012 Chem. Commun. 48 1680
[18]	Xu B B, Zhang Y L, Zhang R, Wang L, Xiao X Z, Xia H, Chen Q D, Sun H B 2013 J. Mater. Chem. C 1 4699
[19]	Wu D, Chen Q D, Xia H, Jiao J, Xu B B, Lin X F, Xu Y, Sun H B 2010 Soft Matter 6 263
[20]	Wu D, Wu S Z, Chen Q D, Zhang Y L, Yao J, Yao X, Niu L G, Wang J N, Jiang L, Sun H B 2011 Adv. Mater. 23 545
[21]	Wu D, Wang J N, Wu S Z, Chen Q D, Zhao S, Zhang H, Sun H B, Jiang L 2011 Adv. Funct. Mater. 21 2927
[22]	Guo L, Shao R Q, Zhang Y L, Jiang H B, Li X B, Xie S Y, Xu B B, Chen Q D, Song J F, Sun H B 2012 J. Phys. Chem. C 116 3594
[23]	Zhang X, Sun B, Friend R H, Guo H, Nau D, Giessen H 2006 Nano Lett. 6 651
[24]	Xia H, Wang J, Tian Y, Chen Q D, Du X B, Zhang Y L, He Y, Sun H B 2010 Adv. Mater. 22 3204
[25]	Kawata S, Sun H B 2003 Appl. Surf. Sci. 208-209 153
[26]	Wu D, Chen Q D, Niu L G, Wang J N, Wang J, Wang R, Xia H, Sun H B 2009, Lab. Chip. 9 2391
[27]	Xiong W, Zhou Y S, He X N, Gao Y, Mahjouri Samani M, Jiang L, Baldacchini T, Lu Y F 2012 Light Sci. Appl. 1 e6
[28]	Guo L, Xia H, Fan H T, Zhang Y L, Chen Q D, Zhang T, Sun H B 2010 Opt. Lett. 35 1695
[29]	Chen Q D, Wu D, Niu L G, Juan W, Xiao Feng L, Xia H, Sun H B 2007 Appl. Phys. Lett. 91 171105
[30]	Zhang Y L, Chen Q D, Xia H, Sun H B 2010 Nano Today 5 435
[31]	Sun Y L, Dong W F, Yang R Z, Meng X, Zhang L, Chen Q D, Sun H B 2012 Angew. Chem. 124 1590
[32]	Zhang Y, Guo L, Wei S, He Y, Xia H, Chen Q, Sun H B, Xiao F S 2010 Nano Today 5 15
[33]	Wang J, Xia H, Xu B B, Niu L G, Wu D, Chen Q D, Sun H B 2009 Opt. Lett. 34 581
[34]	Guo L, Jiang H B, Shao R Q, Zhang Y L, Xie S Y, Wang J N, Li X B, Jiang F, Chen Q D, Zhang T, Sun H B 2012 Carbon 50 1667
[35]	Wang J N, Shao R Q, Zhang Y L, Guo L, Jiang H B, Lu D X, Sun H B 2012 Chem. Asian J. 7 301
[36]	Wang L, L Z H, Lin X F, Chen Q D, Xu B B, Sun H B 2013, J. Lightwave Technol. 31 276
[37]	Wei Q Q, Wei Z J, Ren L M, Zhao H B, Ye T Y, Shi Z J, Fu Y Y, Zhang X, Huang R 2012 Chin. Phys. B 21 088103
[38]	Zheng L W, Hu L Q, Xiao X J, Yang F, Lin H, Guo T L 2011 Chin. Phys. B 20 128502

施引文献

[1]	Su Y H, Ke Y F, Cai S L, Yao Q Y 2012 Light Sci. Appl. 1 e14
[2]	Gao B R, Wang H Y, Hao Y W, Fu L M, Fang H H, Jiang Y, Wang L, Chen Q D, Xia H, Pan L Y, Ma Y G, Sun H B 2009 J. Phys. Chem. B 114 128
[3]	Zhang R, Xu B B, Liu X Q, Zhang Y L, Xu Y, Chen Q D, Sun H B 2012 Chem. Commun. 48 5913
[4]	Liu X L, Xu H, Ma S S, Deng C S, Guo A M 2006 Acta Phys. Sin. 55 5562 (in Chinese)[刘小良, 徐慧, 马松山, 邓超生, 郭爱敏2006 55 5562]
[5]	LiuX H, Zhao H L, Li T Y, Zhang R, Li S J, Ge C H 2013 Acta Phys. Sin. 62 147308 (in Chinese)[刘兴辉, 赵宏亮, 李天宇, 张仁, 李松杰, 葛春华2013 62 147308]
[6]	Li L X, Su J B, Wu Y, Zhu X F, Wang Z G 2012 Acta Phys. Sin. 61 36401 (in Chinese)[李论雄, 苏江滨, 吴燕, 朱贤方, 王占国2012 61 36401]
[7]	Chen L, Zhu Y, Zang X, Cai B, Li Z, Xie L, Zhuang S 2013 Light Sci. Appl. 2 e60
[8]	Ding K, Ning C Z 2012 Light Sci. Appl. 1 e20
[9]	Sabry Y M, Saadany B, Khalil D, Bourouina T 2013 Light Sci. Appl. 2 e94
[10]	Urness A C, Moore E D, Kamysiak K K, Cole M C, McLeod R R 2013 Light Sci. Appl. 2 e56
[11]	Wang P P, Yang C J, Li J, Tang P, Lin F, Zhu X 2013 Acta Phys. Sin. 62 167302 (in Chinese)[王培培, 杨超杰, 李洁, 唐鹏, 林峰, 朱星2013 62 167302]
[12]	Ishikawa A, Tanaka T, Kawata S 2006 Appl. Phys. Lett. 89 113102
[13]	Xu B B, Xia H, Niu L G, Zhang Y L, Sun K, Chen Q D, Xu Y, L Z Q, Li Z H, Misawa H, Sun H B 2010 Small 6 1762
[14]	Rycenga M, Cobley C M, Zeng J, Li W, Moran C H, Zhang Q, Qin D, Xia Y 2011 Chem. Rev. 111 3669
[15]	Masui K, Shoji S, Asaba K, Rodgers T C, Jin F, Duan X M, Kawata S 2011 Opt. Express 19 22786
[16]	Xu B B, Ma Z C, Wang L, Zhang R, Niu L G, Yang Z, Zhang Y L, Zheng W H, Zhao B, Xu Y, Chen Q D, Xia H, Sun H B 2011 Lab. Chip. 11 3347
[17]	Xu B B, Zhang R, Liu X Q, Wang H, Zhang Y L, Jiang H B, Wang L, Ma Z C, Ku J F, Xiao F S, Sun H B 2012 Chem. Commun. 48 1680
[18]	Xu B B, Zhang Y L, Zhang R, Wang L, Xiao X Z, Xia H, Chen Q D, Sun H B 2013 J. Mater. Chem. C 1 4699
[19]	Wu D, Chen Q D, Xia H, Jiao J, Xu B B, Lin X F, Xu Y, Sun H B 2010 Soft Matter 6 263
[20]	Wu D, Wu S Z, Chen Q D, Zhang Y L, Yao J, Yao X, Niu L G, Wang J N, Jiang L, Sun H B 2011 Adv. Mater. 23 545
[21]	Wu D, Wang J N, Wu S Z, Chen Q D, Zhao S, Zhang H, Sun H B, Jiang L 2011 Adv. Funct. Mater. 21 2927
[22]	Guo L, Shao R Q, Zhang Y L, Jiang H B, Li X B, Xie S Y, Xu B B, Chen Q D, Song J F, Sun H B 2012 J. Phys. Chem. C 116 3594
[23]	Zhang X, Sun B, Friend R H, Guo H, Nau D, Giessen H 2006 Nano Lett. 6 651
[24]	Xia H, Wang J, Tian Y, Chen Q D, Du X B, Zhang Y L, He Y, Sun H B 2010 Adv. Mater. 22 3204
[25]	Kawata S, Sun H B 2003 Appl. Surf. Sci. 208-209 153
[26]	Wu D, Chen Q D, Niu L G, Wang J N, Wang J, Wang R, Xia H, Sun H B 2009, Lab. Chip. 9 2391
[27]	Xiong W, Zhou Y S, He X N, Gao Y, Mahjouri Samani M, Jiang L, Baldacchini T, Lu Y F 2012 Light Sci. Appl. 1 e6
[28]	Guo L, Xia H, Fan H T, Zhang Y L, Chen Q D, Zhang T, Sun H B 2010 Opt. Lett. 35 1695
[29]	Chen Q D, Wu D, Niu L G, Juan W, Xiao Feng L, Xia H, Sun H B 2007 Appl. Phys. Lett. 91 171105
[30]	Zhang Y L, Chen Q D, Xia H, Sun H B 2010 Nano Today 5 435
[31]	Sun Y L, Dong W F, Yang R Z, Meng X, Zhang L, Chen Q D, Sun H B 2012 Angew. Chem. 124 1590
[32]	Zhang Y, Guo L, Wei S, He Y, Xia H, Chen Q, Sun H B, Xiao F S 2010 Nano Today 5 15
[33]	Wang J, Xia H, Xu B B, Niu L G, Wu D, Chen Q D, Sun H B 2009 Opt. Lett. 34 581
[34]	Guo L, Jiang H B, Shao R Q, Zhang Y L, Xie S Y, Wang J N, Li X B, Jiang F, Chen Q D, Zhang T, Sun H B 2012 Carbon 50 1667
[35]	Wang J N, Shao R Q, Zhang Y L, Guo L, Jiang H B, Lu D X, Sun H B 2012 Chem. Asian J. 7 301
[36]	Wang L, L Z H, Lin X F, Chen Q D, Xu B B, Sun H B 2013, J. Lightwave Technol. 31 276
[37]	Wei Q Q, Wei Z J, Ren L M, Zhao H B, Ye T Y, Shi Z J, Fu Y Y, Zhang X, Huang R 2012 Chin. Phys. B 21 088103
[38]	Zheng L W, Hu L Q, Xiao X J, Yang F, Lin H, Guo T L 2011 Chin. Phys. B 20 128502

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