基于铟锡氧化物/Ti复合电极的高亮度碳纳米管场致发射冷阴极

潘金艳; 张文彦; 高云龙

doi:10.7498/aps.59.8762

摘要

通过制作亲碳性铟锡氧化物(ITO)/Ti复合电极,改善移植型碳纳米管(CNT)冷阴极的导电电极与CNT膜层之间附着性能,从而消除CNT与电极间的界面势垒和非欧姆接触对CNT阴极场发射均匀性和稳定性的影响.采用磁控溅射技术和丝网印刷工艺制作了ITO/Ti基CNT阴极.用X射线衍射仪和场致发射扫描电子显微镜表征CNT阴极结构,结果显示热处理后的ITO/Ti基CNT阴极中可能有TiC相生成,从而使得导电电极与CNT形成有中间物的强作用体系.该体系降低甚至消除电极与CNT之间的界面势垒,增加了CNT与电极间形成欧姆接触的概率.用四探针技术分析电阻率,结果表明ITO/Ti复合电极具有电阻并联效果,CNT阴极导电性能提高.场致发射特性测试表明ITO/Ti基CNT阴极的场致发射电流达到384 μA/cm2,较普通ITO基CNT阴极的场致发射电流有显著提高,能够激发测试阳极发出均匀、稳定的高亮度荧光.制作ITO/Ti复合电极是实现场致发射稳定、均匀的低功耗CNT阴极的有效途径.

关键词:

Abstract

Carbon nanotube (CNT) cathode with an indium tin oxide (ITO)/Ti composite electrode is successfully fabricated using both magnetron sputtering technology and screen-printed technology which can improve adhesive performance between electrode and CNT cathode of transplanted-type CNT cold cathode, thus eliminating the effects of interface barrier and non-ohmic contact on field emission uniformity and stability of CNT cathode. Microstrcture of ITO/Ti-based CNT cathode is studied by X-ray diffraction and field emission scanning electron microscopy. The results show that TiC phase forms in ITO/Ti-based CNT cathode, thereby a strong interaction system is created between CNT and Ti substrate which reduces, or even eliminates the interface barrier between electrode and CNT, and increases the probability of forming ohmic contact. The resistivity measurement by four probe technology shows that the ITO/Ti-based CNT cathode has performance of resistances in parallel and electric conductivity of CNT cathode increases. Characteristic test of ITO/Ti-based CNT cathode shows that field emission current reaches 384 μA/cm2 which significantly increases compared with that of ITO-based CNT cathode, and that the tested anode can be induced to emit stable, uniform and high luminance. So the ITO/Ti composite electrode is an effective way to make a CNT cathode with stable and uniform field emission and low power.

Keywords:

作者及机构信息

(1)集美大学信息工程学院,厦门 361021; (2)西安交通大学机械制造系统工程国家重点实验室,西安 710049; (3)西北有色金属研究院,西安 710016

基金项目: 国家自然科学基金(批准号:60036010, 60476037)和集美大学科研基金(批准号:C609006)资助的课题.

Authors and contacts

(1)College of Information Engineering, Jimei University, Xiamen 361021, China; (2)Northwest Institute for Nono-ferrous Metal Research, Xi'an 710016, China; (3)State Key Laboratory for Manufacturing System Engineering, Xi'an Jiaotong University, Xi'an 710049, China

参考文献

[1]	Guo P S,Chen T,Cao Z Y,Zhang Z J,Chen Y W,Sun Z 2007 Acta Phys. Sin. 56 6705 (in Chinese) [郭平生、陈婷、曹章轶、张哲娟、陈奕卫、孙卓 2007 56 6705]
[2]	Gu G R,Ito T 2009 Chin. Phys. B 18 4547
[3]	Song J H,Zhang G M,Zhang Z X,Sun M Y,Xue Z Q 2004 Acta Phys. Sin. 53 4392 (in Chinese) [宋教花、张耿民、张兆祥、孙明岩、薛增泉 2004 53 4392]
[4]	Ma Y P,Shang X F,Gu Z Q,Li Z H,Wang M,Xu Y B 2007 Acta Phys. Sin. 56 6701 (in Chinese) [马燕萍、尚学府、顾智企、李振华、王淼、徐亚伯 2007 56 6701]
[5]	Park J H,Son G H,Moon J S,Han J H,Berdinsky A S,Kuvshinov D G,Yoo J B,Park C Y 2005 J. Vac. Sci. Technol. B 23 749
[6]	Park G G,Sohn Y J,Yim S D,Yang T H,Yoon Y G,Lee W Y,Eguchi K,Kim C S 2006 J. Power Sour. 163 113
[7]	Bachtold A,Henny M,Terrier C,Strunk C,Schonenberger C 1998 Appl. Phys. Lett. 73 274
[8]	Xue Y Q,Datta S 1999 Phys. Rev. Lett. 83 4844
[9]	Tombler T W,Zhou C W,Alexseyev L,Kong J,Dai H J,Liu L,Jayanthi C S,Tang M J,Wu S Y 2000 Nature 405 769
[10]	Kong K,Han S,Ihm J 1999 Phys. Rev. B 60 6074
[11]	Menon M,Andriotis A N,Froudakis G E 2000 Chem. Phys. Lett. 320 425
[12]	Andriotis A N,Menon M,Froudakis G E 2000 Appl. Phys. Lett. 76 3890
[13]	Andriotis A N,Menon M 1999 Phys. Rev. B 60 4521
[14]	Andriotis A N,Menon M,Froudakis G E,Lowther J E 1999 Chem. Phys. Lett. 301 503
[15]	Tachibana T,Williams B E,Glass J T 1992 Phys. Rev. B 45 11975
[16]	Qin Y X,Hu M 2008 Appl. Surf. Sci. 254 3313
[17]	Qin Y X,Hu M 2008 Acta Phys. Sin. 57 3698 (in Chinese) [秦玉香、胡明 2008 57 3698]

施引文献

[1]	Guo P S,Chen T,Cao Z Y,Zhang Z J,Chen Y W,Sun Z 2007 Acta Phys. Sin. 56 6705 (in Chinese) [郭平生、陈婷、曹章轶、张哲娟、陈奕卫、孙卓 2007 56 6705]
[2]	Gu G R,Ito T 2009 Chin. Phys. B 18 4547
[3]	Song J H,Zhang G M,Zhang Z X,Sun M Y,Xue Z Q 2004 Acta Phys. Sin. 53 4392 (in Chinese) [宋教花、张耿民、张兆祥、孙明岩、薛增泉 2004 53 4392]
[4]	Ma Y P,Shang X F,Gu Z Q,Li Z H,Wang M,Xu Y B 2007 Acta Phys. Sin. 56 6701 (in Chinese) [马燕萍、尚学府、顾智企、李振华、王淼、徐亚伯 2007 56 6701]
[5]	Park J H,Son G H,Moon J S,Han J H,Berdinsky A S,Kuvshinov D G,Yoo J B,Park C Y 2005 J. Vac. Sci. Technol. B 23 749
[6]	Park G G,Sohn Y J,Yim S D,Yang T H,Yoon Y G,Lee W Y,Eguchi K,Kim C S 2006 J. Power Sour. 163 113
[7]	Bachtold A,Henny M,Terrier C,Strunk C,Schonenberger C 1998 Appl. Phys. Lett. 73 274
[8]	Xue Y Q,Datta S 1999 Phys. Rev. Lett. 83 4844
[9]	Tombler T W,Zhou C W,Alexseyev L,Kong J,Dai H J,Liu L,Jayanthi C S,Tang M J,Wu S Y 2000 Nature 405 769
[10]	Kong K,Han S,Ihm J 1999 Phys. Rev. B 60 6074
[11]	Menon M,Andriotis A N,Froudakis G E 2000 Chem. Phys. Lett. 320 425
[12]	Andriotis A N,Menon M,Froudakis G E 2000 Appl. Phys. Lett. 76 3890
[13]	Andriotis A N,Menon M 1999 Phys. Rev. B 60 4521
[14]	Andriotis A N,Menon M,Froudakis G E,Lowther J E 1999 Chem. Phys. Lett. 301 503
[15]	Tachibana T,Williams B E,Glass J T 1992 Phys. Rev. B 45 11975
[16]	Qin Y X,Hu M 2008 Appl. Surf. Sci. 254 3313
[17]	Qin Y X,Hu M 2008 Acta Phys. Sin. 57 3698 (in Chinese) [秦玉香、胡明 2008 57 3698]

[1]	马玉龙, 向伟, 金大志, 陈磊, 姚泽恩, 王琦龙. 碳纳米管薄膜场蒸发效应. , 2016, 65(9): 097901. doi: 10.7498/aps.65.097901
[2]	蔡丹, 刘列, 巨金川, 王海涛, 赵雪龙, 王潇. 碳纳米管和天鹅绒阴极强流发射特性的对比研究. , 2016, 65(4): 045202. doi: 10.7498/aps.65.045202
[3]	马立安, 郑永安, 魏朝晖, 胡利勤, 郭太良. 合成温度和N2/O2流量比对碳纤维衬底上生长的SnO2纳米线形貌及场发射性能影响. , 2015, 64(23): 237901. doi: 10.7498/aps.64.237901
[4]	向飞, 吴平, 曾凡光, 王淦平, 李春霞, 鞠炳全. 强流碳纳米管阴极快脉冲重频发射特性. , 2015, 64(16): 164103. doi: 10.7498/aps.64.164103
[5]	王益军, 严诚. 不同电场下碳纳米管场致发射电流密度研究. , 2015, 64(19): 197304. doi: 10.7498/aps.64.197304
[6]	左应红, 王建国, 朱金辉, 牛胜利, 范如玉. 爆炸电子发射初期阴极表面电场的研究. , 2012, 61(17): 177901. doi: 10.7498/aps.61.177901
[7]	左应红, 王建国, 范如玉. 二极管间隙距离对场致发射过程中空间电荷效应的影响. , 2012, 61(21): 215202. doi: 10.7498/aps.61.215202
[8]	袁学松, 张宇, 孙利民, 黎晓云, 邓少芝, 许宁生, 鄢扬. 碳纳米管冷阴极脉冲发射特性及仿真模型研究. , 2012, 61(21): 216101. doi: 10.7498/aps.61.216101
[9]	潜力, 王昱权, 刘亮, 范守善. 碳纳米管在大气压环境中的场致发射特性. , 2011, 60(2): 028801. doi: 10.7498/aps.60.028801
[10]	何春山, 王伟良, 陈桂华, 李志兵. 镜像势对碳纳米管阵列场发射特性的影响. , 2009, 58(13): 241-S245. doi: 10.7498/aps.58.241
[11]	柏鑫, 王鸣生, 刘洋, 张耿民, 张兆祥, 赵兴钰, 郭等柱, 薛增泉. 碳纳米管端口的场蒸发. , 2008, 57(7): 4596-4601. doi: 10.7498/aps.57.4596
[12]	廖庆亮, 张跃, 夏连胜, 齐俊杰, 黄运华, 邓战强, 高战军, 曹佳伟. 丝网印刷制备碳纳米管阴极的强流脉冲发射特性研究. , 2008, 57(4): 2328-2333. doi: 10.7498/aps.57.2328
[13]	覃华芳, 郭太良. 基于沉淀工艺制作四脚氧化锌纳米材料场致发射阴极的研究. , 2008, 57(2): 1224-1228. doi: 10.7498/aps.57.1224
[14]	廖庆亮, 张跃, 黄运华, 齐俊杰, 高战军, 夏连胜, 张篁. 碳纳米管阴极的短脉冲爆炸场发射与等离子体膨胀. , 2008, 57(3): 1778-1783. doi: 10.7498/aps.57.1778
[15]	廖庆亮, 张跃, 夏连胜, 黄运华, 齐俊杰, 高战军, 张篁. 碳纳米管阴极的强流脉冲发射性能研究. , 2007, 56(9): 5335-5340. doi: 10.7498/aps.56.5335
[16]	雷达, 曾乐勇, 夏玉学, 陈松, 梁静秋, 王维彪. 带栅极纳米线冷阴极的场增强因子研究. , 2007, 56(11): 6616-6622. doi: 10.7498/aps.56.6616
[17]	郭平生, 陈婷, 曹章轶, 张哲娟, 陈奕卫, 孙卓. 场致发射阴极碳纳米管的热化学气相沉积法低温生长. , 2007, 56(11): 6705-6711. doi: 10.7498/aps.56.6705
[18]	林志贤, 郭太良, 胡利勤, 姚亮, 王晶晶, 杨春建, 张永爱, 郑可炉. 四角状氧化锌纳米材料的场致发射平板显示器. , 2006, 55(10): 5531-5534. doi: 10.7498/aps.55.5531
[19]	丁佩, 晁明举, 梁二军, 郭新勇. 不同氮源制备CNx纳米管薄膜及其低场致电子发射性能. , 2005, 54(12): 5926-5930. doi: 10.7498/aps.54.5926
[20]	丁佩, 晁明举, 梁二军, 郭新勇, 杜祖亮. CNx纳米管的制备、结构观察及低场致电子发射性能研究. , 2004, 53(8): 2786-2791. doi: 10.7498/aps.53.2786

计量

文章访问数: 9114
PDF下载量: 663
被引次数: 0

姓名
邮箱
手机号码
标题
留言内容
验证码

搜索

留言板