透射式蓝延伸GaAs光电阴极光学结构对比

赵静; 常本康; 张益军; 张俊举; 石峰; 程宏昌; 崔东旭

doi:10.7498/aps.61.037803

摘要

用金属有机物化学气相沉积法外延制备了一个透射式蓝延伸GaAs光电阴极,积分灵敏度达到1980 A/lm,同时与美国ITT公司的一条蓝延伸阴极光谱响应曲线对比,分别对两者进行了光学结构拟合. 结果表明,国内阴极在Ga1-xAlxAs层厚度、Al组分、电子扩散长度和后界面复合速率上与国外存在差距,这导致国内阴极的蓝延伸性能不及国外.国内蓝延伸阴极的表面电子逸出几率、发射层厚度与国外阴极拟合结果一致,这使得两者长波响应性能差别远小于短波部分的差别.另外响应波段全谱的吸收率小于国外阴极,导致国内透射式蓝延伸GaAs光电阴极光谱响应、积分灵敏度尚不及国外.

关键词:

Abstract

One transmission-mode extended blue GaAs photocathode is prepared by MOCVD , whose integral sensitivity is 1980 A/lm. Its spectral curve is compared with the spectral curve of ITT photocathode for analyzing optical structure. The comparison indicates that the differences lie in the thickness and the Al mole value of the Ga1-xAlxAs window layer, electron diffusion length, and back-interface recombination velocity, which make the photocathode in this experiment inferior to that of ITT in extended blue performance. However our surface electron-escape probability and the thickness of the GaAs active layer are in accordance with those of ITT, which leads their difference in the long waveband part to be less than in the short one. In addition, our absorptivity in the whole response waveband is smaller than that of ITT photocathode, which leads the spectral response and integral sensitivity of the domestic transmission-mode extended blue GaAs photocathode to be inferior to the exotic one.

Keywords:

作者及机构信息

1.
南京理工大学电子工程与光电技术学院, 南京 210094;

2.
微光夜视技术实验室, 西安 710065;

3.
西安应用光学研究所, 西安 710065

基金项目: 国家自然科学基金(批准号: 61171042)、江苏省普通高校研究生科研创新计划资助项目(项目编号:CX09B_096Z)和南京理工大学自主科研专项计划(项目编号:2010ZYTS032)资助的课题.

Authors and contacts

1.
Institute of Electronic Engineering and Optoelectronic Technology, Nanjing University of Science and Technology, Nanjing 210094, China;

2.
Science and Technology on Low-Light-Level Night Vision Laboratory, Xi'an 710065, China;

3.
Xi'an Institute of Applied Optics, Xi'an 710065, China

Funds: Project supported by the National Natural Science Foundation of China (Grant No. 61171042), the Research and Innovation Plan for Graduate Students of Jiangsu Higher Education Institutions, China (Grant No. CX09B 096Z), and the Nanjing University of Science and Technology Researching Funding, China (Grant No. 2010ZYTS032).

参考文献

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[3]	Liu Z, Sun Y, Peterson S, Pianetta P 2008 Appl. Phys. Lett. 92241107
[4]	Zhang Y J, Chang B K, Yang Z, Niu J, Zou J J 2009 Chin. Phys.B 18 4541
[5]	Sinor T W, Estrera J P, Phillips D L, Rector M K 1997 Proc. SPIE2551 130
[6]	Leopold D J, Buckley J H, Rebillot P 2005 J. Appl. Phys. 98043525.
[7]	Kenneth A C, Verle W A, Hugh F M 1990 Proc. SPIE 1243 99
[8]	Guo H, Feng N, Xiang S M 2005 Proc. SPIE 5644 579
[9]	Zhao J, Zhang Y J, Chang B K, Xiong Y J, Zhang J J, Shi F, ChengH C, Cui D X 2011 Acta Phys. Sin. 60 107802 (in Chinese) [赵静,张益军,常本康,熊雅娟,张俊举,石峰,程宏昌,崔东旭 2011 60 107802]
[10]	Aspnes D E, Kelso S M, Logan R A, Bhat R 1986 J. Appl. Phys.60 754
[11]	Smith A, Passmore K, Sillmon R 2002 New Developments in Photodetection 3rd Beaune Conference Beaune, France, 17–21 June,2002
[12]	Liu Y Z, Wang Z C, Dong Y Q 1995 Electron Emission and Photocathode(Beijing: Beijing University of Science and Technology Press) p327 (in Chinese) [刘元震,王仲春,董亚强 1995 电子发射与光电阴极(北京: 北京理工大学出版社)第327页]
[13]	Zhang Y J, Niu J, Zhao J, Zou J J, Chang B K, Shi F, Cheng H C2010 J. Appl. Phys. 108 093108
[14]	Tang J F, Gu P F, Liu X, Li H F 2006 Modern Optical Thin FilmTechnology (Zhejiang: Zhejiang University Press) p20 (in Chinese) [唐晋发,顾培夫,刘旭,李海峰 2006 现代光学薄膜技术(浙江: 浙江大学出版社)第20页]
[15]	Zhao J, Chang B K, Xiong Y J, Zhang Y J 2011 Chin. Phys. B 20047801

施引文献

[1]	Guo L J, Wüstenberg J P, Oleksiy A, Bauer M, Aeschlimann M2005 Acta Phys. Sin. 54 3200 (in Chinese) [郭立俊, Wüstenberg J P, Oleksiy A, Bauer M, Aeschlimann M 2005 54 3200]
[2]	Zhou LW, Li Y, Zhang Z Q, MonastyrskiMA, Schelve M Y 2005Acta Phys. Sin. 54 3591 (in Chinese) [周立伟,李元,张智诠, Monastyrski M A, Schelve M Y 2005 54 3591]
[3]	Liu Z, Sun Y, Peterson S, Pianetta P 2008 Appl. Phys. Lett. 92241107
[4]	Zhang Y J, Chang B K, Yang Z, Niu J, Zou J J 2009 Chin. Phys.B 18 4541
[5]	Sinor T W, Estrera J P, Phillips D L, Rector M K 1997 Proc. SPIE2551 130
[6]	Leopold D J, Buckley J H, Rebillot P 2005 J. Appl. Phys. 98043525.
[7]	Kenneth A C, Verle W A, Hugh F M 1990 Proc. SPIE 1243 99
[8]	Guo H, Feng N, Xiang S M 2005 Proc. SPIE 5644 579
[9]	Zhao J, Zhang Y J, Chang B K, Xiong Y J, Zhang J J, Shi F, ChengH C, Cui D X 2011 Acta Phys. Sin. 60 107802 (in Chinese) [赵静,张益军,常本康,熊雅娟,张俊举,石峰,程宏昌,崔东旭 2011 60 107802]
[10]	Aspnes D E, Kelso S M, Logan R A, Bhat R 1986 J. Appl. Phys.60 754
[11]	Smith A, Passmore K, Sillmon R 2002 New Developments in Photodetection 3rd Beaune Conference Beaune, France, 17–21 June,2002
[12]	Liu Y Z, Wang Z C, Dong Y Q 1995 Electron Emission and Photocathode(Beijing: Beijing University of Science and Technology Press) p327 (in Chinese) [刘元震,王仲春,董亚强 1995 电子发射与光电阴极(北京: 北京理工大学出版社)第327页]
[13]	Zhang Y J, Niu J, Zhao J, Zou J J, Chang B K, Shi F, Cheng H C2010 J. Appl. Phys. 108 093108
[14]	Tang J F, Gu P F, Liu X, Li H F 2006 Modern Optical Thin FilmTechnology (Zhejiang: Zhejiang University Press) p20 (in Chinese) [唐晋发,顾培夫,刘旭,李海峰 2006 现代光学薄膜技术(浙江: 浙江大学出版社)第20页]
[15]	Zhao J, Chang B K, Xiong Y J, Zhang Y J 2011 Chin. Phys. B 20047801

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