微平面接触分离中弯月面力的计算

刘思思; 张朝辉; 刘俊铭

doi:10.7498/aps.59.6902

摘要

微平面间黏着力对微机电系统(MEMS)非常重要,常是决定其能量损耗乃至寿命长短的最主要因素.MEMS中的黏着力主要来源之一就是介于两互相接触平面间的弯月面力.弯月面力主要取决于相互接触的两平面间形成的弯月面形状.本文通过分析两微小平面在分离过程中弯月面形状的变化,得到在不同表面亲水/疏水性能、初始液面高度、分离距离等条件下的弯月面形状,计算得出在不同初始条件下断裂高度和弯月面力的数值以及随之变化的规律,为MEMS的性能分析和寿命计算提供依据.

关键词:

Abstract

The adhesive force between microsurfaces is very important to microelectric mechanical system (MEMS), being always a key factor that detemines the energy dissipation and even the life span. In MEMS, the meniscus force mainly depends on the meniscus shape formed between the contact surfaces. This paper analyzes the meniscus shape changes during the seperation of two microsurfaces. Different meniscus shapes were obtained as a result of different hydrophilic/hydrophobic properties, initial liquid heights and separate distances and so on. The fracture height, the meniscus force value and their change rules in different initial conditions are obtained by numerical simulation, which provides a basis of the MEMS performance analysis and life span calculation.

Keywords:

作者及机构信息

1.
北京交通大学机械与电子控制工程学院,北京 100044

基金项目: 国家自然科学基金(批准号:50705006)和北京市自然科学基金(批准号:3082015)资助的课题.

Authors and contacts

1.
School of Mechanical, Electronic and Control Engineering, Beijing Jiaotong University, Beijing 100044, China

参考文献

[1]	Kim S H, Asy D B, Dugger M T 2007 Nanotoday 2 22
[2]	Braun O M, Naumovets A G 2006 Surf. Sci. Rep. 60 79
[3]	Zhang C H 2005 Tribol. Int. 38 443
[4]	Zhao Y P 2003 Acta Mech. Sin. 19 1
[5]	Bhushan B 2007 Microelectron. Engng. 84 387
[6]	Qian L M, Luo J B, Wen S Z 2000 Acta Phys. Sin. 49 2247 (in Chinese) [钱林茂、雒建斌、温诗铸 2000 49 2247]
[7]	Cao X P, Jiang Y M 2005 Acta Phys. Sin. 54 2202 (in Chinese) [曹晓平、蒋亦民 2005 54 2202]
[8]	Zhang X H, Zhang X J, Liu Y H, Schaefer J A, Wen S Z 2007 Acta Phys. Sin. 56 4722 (in Chinese) [张晓昊、张向军、刘永和、 Schaefer J A、温诗铸 2007 56 4722]
[9]	Hiratsuka K, Bohno A, Kurosawa M 2001 NATO Sci. Series Ⅱ: Math. Phys. Chem. 10 345
[10]	Liu S S, Zhang C H 2009 J. Phys: Conference Series 188 012026
[11]	Zhang X J, Dong Y K, Liu Y H, Schaefer J A 2009 Chin. Phys. B 18 0231
[12]	Wang S T, Song Y L, Jiang L 2007 J.Photochem.Photobiol. C 8 18
[13]	Guo Z G, Fang J, Wang L, Liu W M 2007 Thin Solid Films 515 7190
[14]	Sun M H, Luo C X, Xu L P, Ji H, Ouyang Q, Yu D P, Chen Y 2005 Langmuir 21 8978
[15]	Nosonovsky M, Bhushan B 2005 Microsyst. Technol. 11 535
[16]	Nosonovsky M, Bhushan B 2007 Ultramicroscopy 107 969
[17]	Xue W, Zheng B R, Zhang M, Xie G X, Wang Q 2009 Acta Phys. Sin. 58 2518 (in Chinese) [薛伟、郑蓓蓉、张淼、解国新、王权 2009 58 2518]
[18]	Guo Z G, Liu W M 2007 Plant Sci. 172 1103
[19]	Autumn K, Liang Y A, Hsieh S T, Zesch W, Chan W P, Kenny T W, Fearing R, Full R J 2000 Nature 405 681
[20]	Davies J, Haq S, Hanke T, Sargent J P 2009 Int. J. Adhes. Adhes. 29 380
[21]	Cai S B, Bhushan B 2007 Nanotechnology 18 465704
[22]	Cai S B, Bhushan B 2008 Mater. Sci. Engng. R 61 78
[23]	Orr F M, Scriven L E, Rivas A P 1975 J. Fluid Mech. 67 723
[24]	Fortes M A 1982 J. Colloid Interface Sci. 88 338
[25]	Wei Z, Zhao Y P 2007 J. Phys. D: Appl. Phys. 40 4368

施引文献

[1]	Kim S H, Asy D B, Dugger M T 2007 Nanotoday 2 22
[2]	Braun O M, Naumovets A G 2006 Surf. Sci. Rep. 60 79
[3]	Zhang C H 2005 Tribol. Int. 38 443
[4]	Zhao Y P 2003 Acta Mech. Sin. 19 1
[5]	Bhushan B 2007 Microelectron. Engng. 84 387
[6]	Qian L M, Luo J B, Wen S Z 2000 Acta Phys. Sin. 49 2247 (in Chinese) [钱林茂、雒建斌、温诗铸 2000 49 2247]
[7]	Cao X P, Jiang Y M 2005 Acta Phys. Sin. 54 2202 (in Chinese) [曹晓平、蒋亦民 2005 54 2202]
[8]	Zhang X H, Zhang X J, Liu Y H, Schaefer J A, Wen S Z 2007 Acta Phys. Sin. 56 4722 (in Chinese) [张晓昊、张向军、刘永和、 Schaefer J A、温诗铸 2007 56 4722]
[9]	Hiratsuka K, Bohno A, Kurosawa M 2001 NATO Sci. Series Ⅱ: Math. Phys. Chem. 10 345
[10]	Liu S S, Zhang C H 2009 J. Phys: Conference Series 188 012026
[11]	Zhang X J, Dong Y K, Liu Y H, Schaefer J A 2009 Chin. Phys. B 18 0231
[12]	Wang S T, Song Y L, Jiang L 2007 J.Photochem.Photobiol. C 8 18
[13]	Guo Z G, Fang J, Wang L, Liu W M 2007 Thin Solid Films 515 7190
[14]	Sun M H, Luo C X, Xu L P, Ji H, Ouyang Q, Yu D P, Chen Y 2005 Langmuir 21 8978
[15]	Nosonovsky M, Bhushan B 2005 Microsyst. Technol. 11 535
[16]	Nosonovsky M, Bhushan B 2007 Ultramicroscopy 107 969
[17]	Xue W, Zheng B R, Zhang M, Xie G X, Wang Q 2009 Acta Phys. Sin. 58 2518 (in Chinese) [薛伟、郑蓓蓉、张淼、解国新、王权 2009 58 2518]
[18]	Guo Z G, Liu W M 2007 Plant Sci. 172 1103
[19]	Autumn K, Liang Y A, Hsieh S T, Zesch W, Chan W P, Kenny T W, Fearing R, Full R J 2000 Nature 405 681
[20]	Davies J, Haq S, Hanke T, Sargent J P 2009 Int. J. Adhes. Adhes. 29 380
[21]	Cai S B, Bhushan B 2007 Nanotechnology 18 465704
[22]	Cai S B, Bhushan B 2008 Mater. Sci. Engng. R 61 78
[23]	Orr F M, Scriven L E, Rivas A P 1975 J. Fluid Mech. 67 723
[24]	Fortes M A 1982 J. Colloid Interface Sci. 88 338
[25]	Wei Z, Zhao Y P 2007 J. Phys. D: Appl. Phys. 40 4368

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