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In order to simplify sidewall electrode pattern of quartz gyroscope, a novel micro-structure used to sense Coriolis’ force based on shear stress detection is demonstrated. The approach of shear stress detection is analyzed and the structure of sidewall electrode is a single polarity electrode. A tapered beam with 15° taper designed as the sensing beam can increase its sensitivity. A prototype structure is fabricated by processing z-cut quartz by anisotropic wet etching technique. The prototype has a drive mode frequency of about 5.6 kHz, and the quality factor is over 5000 in atmosphere. The spectrum analysis of the structure’s output signal reveals the Coriolis force, which validates our new design scheme.
[1] Yu Y T, Yuan W Z, Qiao D Y, Liang Q 2007 Acta Phys. Sin. 56 5691 (in Chinese) [虞益挺、 苑伟政、 乔大勇、 梁 庆 2007 56 5691]
[2] Kal S 2007 Def. Sci. J. 57 209
[3] Li H Q 2005 Acta Phys. Sin. 54 1361 (in Chinese) [李洪奇 2005 54 1361]
[4] Meyer Y, Collet M 2008 Smart Mater. Struct. 17 1
[5] Liang J X, Kohsaka F, Li X F, Kunitomo K, Ueda T 2009 Proceedings of Transducers June 21—25, 2009 Denver, USA, p308
[6] Madni A M, Costlow L E, Knowles S J 2003 IEEE Sens. J. 3 569
[7] Megherbi S, Levy R, Parrain F, Mathias H, Traon O L, Janiaud D, Gilles J P 2007 Proceedings of International Conference on Thermal, Mechanical and Multi-Physics Simulation Experiments in Microelectronics and Micro-Systems April 16—18, 2007 London, UK p1
[8] Madni A M, Costlow L E, Smith M W 2006 Proceedings of SAE World Congress April 3—6 2006 Detroit, USA, 2006
[9] Uehara H, Ohtsuka T, Inoue T 2005 Proceedings of IEEE International Frequency Control Symposium and Exposition August 29—31, 2005 Vancouver, Canada p886
[10] Ohtsuka T, Inoue T, Yoshimatsu M, Matsudo H, Okazaki M 2006 Proceedings of IEEE International Frequency Control Symposium and Exposition June 4—7, 2006 Miami, USA, p129
[11] Senturia S D 2000 Microsystem Design (Boston: Kluwer Academic Publishers) p581
[12] Sato K, Ono A, Tomikawa Y 2004 Jpn. J. Appl. Phys. 43 3000
[13] Qin Z K 1980 Piezoelectric Quartz Crystal (Beijing: Defense Industry Press) p68 (in Chinese) [秦自楷 1980 压电石英晶体 (北京:国防工业出版社) 第68页]
[14] Timoshenko S P, Gere J M 1972 Mechanics of Materials (New York: Van Nostrand Reinhold Company) p158
[15] Schofield A R, Trusov A A, Shkel A M 2009 Proceedings of Transducers June 21—25, 2009 Denver, USA p1952
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[1] Yu Y T, Yuan W Z, Qiao D Y, Liang Q 2007 Acta Phys. Sin. 56 5691 (in Chinese) [虞益挺、 苑伟政、 乔大勇、 梁 庆 2007 56 5691]
[2] Kal S 2007 Def. Sci. J. 57 209
[3] Li H Q 2005 Acta Phys. Sin. 54 1361 (in Chinese) [李洪奇 2005 54 1361]
[4] Meyer Y, Collet M 2008 Smart Mater. Struct. 17 1
[5] Liang J X, Kohsaka F, Li X F, Kunitomo K, Ueda T 2009 Proceedings of Transducers June 21—25, 2009 Denver, USA, p308
[6] Madni A M, Costlow L E, Knowles S J 2003 IEEE Sens. J. 3 569
[7] Megherbi S, Levy R, Parrain F, Mathias H, Traon O L, Janiaud D, Gilles J P 2007 Proceedings of International Conference on Thermal, Mechanical and Multi-Physics Simulation Experiments in Microelectronics and Micro-Systems April 16—18, 2007 London, UK p1
[8] Madni A M, Costlow L E, Smith M W 2006 Proceedings of SAE World Congress April 3—6 2006 Detroit, USA, 2006
[9] Uehara H, Ohtsuka T, Inoue T 2005 Proceedings of IEEE International Frequency Control Symposium and Exposition August 29—31, 2005 Vancouver, Canada p886
[10] Ohtsuka T, Inoue T, Yoshimatsu M, Matsudo H, Okazaki M 2006 Proceedings of IEEE International Frequency Control Symposium and Exposition June 4—7, 2006 Miami, USA, p129
[11] Senturia S D 2000 Microsystem Design (Boston: Kluwer Academic Publishers) p581
[12] Sato K, Ono A, Tomikawa Y 2004 Jpn. J. Appl. Phys. 43 3000
[13] Qin Z K 1980 Piezoelectric Quartz Crystal (Beijing: Defense Industry Press) p68 (in Chinese) [秦自楷 1980 压电石英晶体 (北京:国防工业出版社) 第68页]
[14] Timoshenko S P, Gere J M 1972 Mechanics of Materials (New York: Van Nostrand Reinhold Company) p158
[15] Schofield A R, Trusov A A, Shkel A M 2009 Proceedings of Transducers June 21—25, 2009 Denver, USA p1952
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