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Based on the leaky mode resonance theory,the physical mechanism of producing the broad angular spectrum of Multilayer Dielectric Grating (MDG) in the -1 st order reflection diffraction direction is presented in this paper.It is found that the thin match layer would improve the bandwidth of angular spectrum effectively.A good result of ±11 degree near Littrow angle 37.9 over 90% diffraction efficiency centered at 1040nm is obtained,and the parameters of the result have excellent fabrication tolerance.The Fourier modal method is employed for calculating the diffraction efficiency.
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Keywords:
- multilayer dielectric grating /
- leaky mode resonance /
- match layer /
- wide angular spectrum
[1] ［1］Svakhin A A, Sychugov V A 1991 Sov. Phys. Tech. Phys. 36 1038
[2] ［2］Perry M D，Boyd R D，Britten J A 1995 Opt. Lett. 20 940
[3] ［3］Shore B W，Perry M D，Britten J A 1997 J. Opt. Soc. Am. A 14 1124
[4] ［4］Michael C Y, Zhou Y and Connie J 2007 Nat. Photonics 1 119
[5] ［5］Liu S J, Shen J, Shen Z C, Kong W J, Wei C Y, Jin Y X, Shao J D, Fan Z X 2006 Acta. Phys. Sin. 55 4588 (in Chinese) ［刘世杰、沈健、沈自才、孔伟金、魏朝阳、晋云霞、邵建达、范正修 2006 55 4588］
[6] ［6］Carlos F R Mateus, Michael C Y 2004 IEEE. Photonic. Tech. L 16 518
[7] ［7］Wu M L, Lee Y C, Hsu C L, Liu Y C, Chang J Y 2007 Jpn. J. Appl. Phys. 46 5431
[8] ［8］Magnusson R, Mehrdad S S 2008 Opt. Express 16 3456
[9] ［9］Wang S S, Magnusson R 1995 Appl. Opt. 34 2414
[10] ］Ma J Y, Liu S J, Wei C Y, Xu C, Jin Y X, Zhao Y N, Shao J D, Fan Z X 2008 Acta Phys. Sin. 57 827 (in Chinese) ［麻健勇、刘世杰、魏朝阳、许程、晋云霞、赵元安、邵建达、范正修 2008 57 827］
[11] ］Flury M, Tishchenko A V, Parriaux O 2007 J. Lightwave. Technol. 25 1870
[12] ］Tishchenko A V, Sychugov V A 2000 Opt. Quant. Electron 32 1027
[13] ］Destouches N, Tishchenko A V, Pommier J C, Reynaud S, Parriaux O 2005 Opt. Express 13 3230
[14] ］Li L F 1993 J. Opt. Soc. Am. A 10 2581
[15] ］Wei H B, Li L F 2003 Appl. Opt. 42 6255［16］Tang X G，Fu K X，Wang Z H 2002 Acta Opt. Sin. 22 774 (in Chinese)［唐雄贵、傅克祥、王植恒 2002光学学报 22 774］
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[1] ［1］Svakhin A A, Sychugov V A 1991 Sov. Phys. Tech. Phys. 36 1038
[2] ［2］Perry M D，Boyd R D，Britten J A 1995 Opt. Lett. 20 940
[3] ［3］Shore B W，Perry M D，Britten J A 1997 J. Opt. Soc. Am. A 14 1124
[4] ［4］Michael C Y, Zhou Y and Connie J 2007 Nat. Photonics 1 119
[5] ［5］Liu S J, Shen J, Shen Z C, Kong W J, Wei C Y, Jin Y X, Shao J D, Fan Z X 2006 Acta. Phys. Sin. 55 4588 (in Chinese) ［刘世杰、沈健、沈自才、孔伟金、魏朝阳、晋云霞、邵建达、范正修 2006 55 4588］
[6] ［6］Carlos F R Mateus, Michael C Y 2004 IEEE. Photonic. Tech. L 16 518
[7] ［7］Wu M L, Lee Y C, Hsu C L, Liu Y C, Chang J Y 2007 Jpn. J. Appl. Phys. 46 5431
[8] ［8］Magnusson R, Mehrdad S S 2008 Opt. Express 16 3456
[9] ［9］Wang S S, Magnusson R 1995 Appl. Opt. 34 2414
[10] ］Ma J Y, Liu S J, Wei C Y, Xu C, Jin Y X, Zhao Y N, Shao J D, Fan Z X 2008 Acta Phys. Sin. 57 827 (in Chinese) ［麻健勇、刘世杰、魏朝阳、许程、晋云霞、赵元安、邵建达、范正修 2008 57 827］
[11] ］Flury M, Tishchenko A V, Parriaux O 2007 J. Lightwave. Technol. 25 1870
[12] ］Tishchenko A V, Sychugov V A 2000 Opt. Quant. Electron 32 1027
[13] ］Destouches N, Tishchenko A V, Pommier J C, Reynaud S, Parriaux O 2005 Opt. Express 13 3230
[14] ］Li L F 1993 J. Opt. Soc. Am. A 10 2581
[15] ］Wei H B, Li L F 2003 Appl. Opt. 42 6255［16］Tang X G，Fu K X，Wang Z H 2002 Acta Opt. Sin. 22 774 (in Chinese)［唐雄贵、傅克祥、王植恒 2002光学学报 22 774］
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