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Based on the general form of Fresnel diffraction,light intensity distribution in laser interference crystallization with a phase shifting grating mask (PSGM) was calculated.Two-dimensional (2D) periodic nanocrystalline silicon (nc-Si) array was fabricated by laser interference crystallization combined with 2D-PSGM.The light intensity irradiated on the surface of a-Si:H samples can be modulated by the PSGM with the periodicity of 400 nm.Experimental results demonstrate that the periodicity of 2D nc-Si array is the same as that of the PSGM,the crystalline regions of nc-Si array are consistant with the simulated results.
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Keywords:
- nanocrystalline silicon /
- laser interference crystallization /
- phase shifting grating /
- fresnel diffraction
[1] ［1］ Jorge B, Mariano P, Jose Antonio R, Alfredo M, Montse R, Manel L, Bias G, Laura L, Carlos D 2007 Physica E 38 193
[2] ［2］Kobayashi S, Imaeda M, Matsumoto S 2006 Mater. Sci. Eng. C 26 889
[3] ［3］Yanagisawa S, Sato K, Hirakuri K 2007 Thin Solid Films 515 7990
[4] ［4］Chou S Y, Krauss P R, Zhang W, Guo L, Zhuang L 1997 J. Vac. Sci. Technol. B 15 2897
[5] ［5］Dahlheimer B, Karrer U, Nebel C E, Stutzmanm M 1998 J. Non-Cryst. Solids 916 227
[6] ［6］Heitmann J, Müller F, Zacharias M, Gsele U 2005 Adv. Mater. 17 795
[7] ［7］Zou H C, Qiao F, Wu L C, Huang X F, Han P G, Ma Z Y, Li 2W, Chen K J 2005 Acta Phys. Sin. 54 3646（in Chinese）［邹和成、乔峰、吴良才、黄信凡、李鑫、韩培高、马忠元、李伟、陈坤基 2005 54 3646］
[8] ［8］Yao Y, Fang Z H, Zhou J, Li W, Ma Z Y, Xu J, Huang X F, Chen K J, Yasuyuki M, Shunri O 2008 Acta Phys. Sin. 57 4960（in Chinese）［姚尧、方忠慧、周江、李伟、马忠元、徐骏、黄信凡、陈坤基、宫本恭信、小田俊理 2008 57 4960］
[9] ［9］Jiang M, Wang M X, Wang M, Chen K J 1999 Chinese Journal of Lasers B 8 142
[10] ］Joseph W G 1996 Introduction To Fourier Optics (2 edition) (New York: McGraw-Hill) p67
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[1] ［1］ Jorge B, Mariano P, Jose Antonio R, Alfredo M, Montse R, Manel L, Bias G, Laura L, Carlos D 2007 Physica E 38 193
[2] ［2］Kobayashi S, Imaeda M, Matsumoto S 2006 Mater. Sci. Eng. C 26 889
[3] ［3］Yanagisawa S, Sato K, Hirakuri K 2007 Thin Solid Films 515 7990
[4] ［4］Chou S Y, Krauss P R, Zhang W, Guo L, Zhuang L 1997 J. Vac. Sci. Technol. B 15 2897
[5] ［5］Dahlheimer B, Karrer U, Nebel C E, Stutzmanm M 1998 J. Non-Cryst. Solids 916 227
[6] ［6］Heitmann J, Müller F, Zacharias M, Gsele U 2005 Adv. Mater. 17 795
[7] ［7］Zou H C, Qiao F, Wu L C, Huang X F, Han P G, Ma Z Y, Li 2W, Chen K J 2005 Acta Phys. Sin. 54 3646（in Chinese）［邹和成、乔峰、吴良才、黄信凡、李鑫、韩培高、马忠元、李伟、陈坤基 2005 54 3646］
[8] ［8］Yao Y, Fang Z H, Zhou J, Li W, Ma Z Y, Xu J, Huang X F, Chen K J, Yasuyuki M, Shunri O 2008 Acta Phys. Sin. 57 4960（in Chinese）［姚尧、方忠慧、周江、李伟、马忠元、徐骏、黄信凡、陈坤基、宫本恭信、小田俊理 2008 57 4960］
[9] ［9］Jiang M, Wang M X, Wang M, Chen K J 1999 Chinese Journal of Lasers B 8 142
[10] ］Joseph W G 1996 Introduction To Fourier Optics (2 edition) (New York: McGraw-Hill) p67
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