Face-center cubic metal materials including austenite stainless steel, aluminum single crystal and multi-grained pure aluminum were irradiated by a high-current pulsed electron beam (HCPEB) source in different processes. The deformed microstructures were observed by using scanning electron microscopy and transmiss ion electron microscopy. The relationship between stress characteristic and the microstructures has been analyzed. The current numerical simulations of the ther mal-mechanical process of HCPEB treatment were also investigated by comparing w ith the present experimental results. The present experimental results suggest t hat the value of the stress induced by HCPEB lies between 102—103MPa. The behavior of the stress propagation is closely related to the crystal structure of the material. This stress leads to the modification of the properties and the microstructures of the irradiated material in regions of greater depth.