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聚合物衬底克服了刚性平面衬底在空间形变场景下的局限，并能结合光刻技术制备复杂三维异形空间结构.光热冲镊技术实现了固体界面上对微纳物体的捕获和操控，将该技术应用在聚合物衬底上可开发新的应用场景需求.本文以常用的聚甲基丙烯酸甲酯和负性光刻胶作为聚合物衬底，通过溶胶-凝胶法在其上制备SiO2纳米薄膜，能有效减轻光热冲击效应引起的热损伤，从而实现微纳物体的激光捕获及操控.实验表明，在常用激光操控功率条件下，当SiO2纳米薄膜厚度大于110 nm时，能够有效防止聚合物衬底因光热效应引起软化、膨胀和表面破坏.理论计算也表明，纳米薄膜能至少降低聚合物表面温度111ºC，并使其产生最高温度的时间滞后13.2 ns. 本文使用的纳米薄膜制备技术具有常温、大面积、低粗糙度且厚度均一的优点，能普遍适用于柔性聚合物衬底以及异形结构.本论文实验结果拓展了激光捕获物体的环境媒介，为其在微纳操控、微纳米机器人和微纳光机电器件等领域的应用提供新的可能性.Polymer substrates overcome the limitations of rigid planar substrates in spatial deformation scenarios and can be combined with photolithography to fabricate complex, three-dimensional irregular polymer structures. Photothermal-shock tweezer is a laser trapping technique based on the photothermal shock effect. Photothermal-shock tweezer leverages pulsed laser induced transient photothermal shock to generate micro-newton-scale thermomechanical strain gradients force, enabling the capture and manipulation of micro/nano-objects at solid interfaces. Integrating this technique with polymer substrates can address the demands of new application scenarios.In this work, we use commonly employed polymethyl methacrylate (PMMA) and negative photoresist (SU-8) as polymer substrates, on which SiO2 nanofilms are fabricated using the sol-gel method. This approach effectively mitigates thermal damage caused by photothermal shock effects, enabling laser trapping and manipulation of micro/nano-objects.
SiO2 nanofilms, characterized by low thermal conductivity, effectively inhibit heat transfer. The nanofilm fabrication technique utilized in this study enables the synthesis of large-area SiO2 nanofilms with large-area coverage, low surface roughness (Rq ~ 320 pm) and uniform thickness, making it broadly applicable to flexible polymer substrates and irregular structures. Direct contact between the polymer layer and micro/nano-objects during photothermal shock tweezers manipulation can induce irreversible substrate degradation due to transient photothermal shock effects. Experimental results demonstrate that depositing an SiO2 nanofilm thicker than 110 nm on the polymer substrate significantly enhances thermal insulation and protection, effectively mitigating laser-induced damage under typical optical manipulation conditions.
Additionally, by analyzing the temperature field distribution of the gold nanosheet, PMMA substrate, and SiO2 nanofilm during a single photothermal shock trapping of a gold nanosheet, we found that the SiO2 nanofilm can reduce the PMMA surface temperature by at least 111 ºC and delay the time for PMMA to reach its peak temperature by 13.2 ns compared to the peak temperature time of the gold nanosheet. The experimental results expand the environmental media for laser trapping of objects, offering new possibilities for applications in micro/nano-manipulation, micro/nanorobotics, and micro/nano-optoelectronic devices.-
Keywords:
- Laser trapping /
- polymer surface /
- sol-gel method /
- photothermal-shock tweezer
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