硅基全光宽带太赫兹幅度调制器的研究

田伟; 文岐业; 陈智; 杨青慧; 荆玉兰; 张怀武

doi:10.7498/aps.64.028401

摘要

提出了一种基于掺金硅的全光学宽带太赫兹波幅度调制器, 研究了金(Au)点阵掺杂后硅(Si)体内的少数载流子寿命及其太赫兹波调制特性. 实验结果表明, 掺杂的Au原子为Si中的光生电子- 空穴对提供了有效复合中心, 使其少数载流子寿命由原来十几微秒降低至110 ns左右. 利用波长915 nm 调制激光作为抽运光源, 在340 GHz载波的动态调制测试中获得4.3 MHz的调制速率和21%的调制深度, 使Si基调制器的调制速率提高了两个数量级. 该全光太赫兹调制器可工作在整个太赫兹频段内, 具有极化不敏感特性, 因而在太赫兹波高速和宽带调控方面具有重要的应用价值, 也是构建光控型Si 基太赫兹功能器件的重要基础.

关键词:

太赫兹波 /
调制器 /
光控 /
掺金硅

Abstract

In this paper, we present a broadband terahertz wave amplitude modulator based on optically-controlled gold-doped silicon. Gold dots with a diameter of 40 μm are used as a dopant source. Experimental results indicate that interstitial Au atoms provide effective recombination centers for photo-generated electron-hole pairs in Si body, leading to a significant decrease of the minority carrier lifetime from more than 10 μs to about 110 ns. Dynamic modulation measurement at 340 GHz carrier shows a modulation depth of 21% and a maximum modulation speed of 4.3 MHz. This modulator has advantages such as wideband operation, high modulation speed, polarization insensitivity, and easy manufacture by using the large-scale integrated technology, and thus can be widely used in terahertz technology.

Keywords:

作者及机构信息

1.
电子科技大学, 电子薄膜与集成器件国家重点实验室, 成都 610054;

2.
电子科技大学, 通信抗干扰技术国家级重点实验室, 成都 610054

基金项目: 国家自然科学基金重点项目(批准号: 61131005)、教育部科学技术研究重大项目(批准号: 313013)、国家高新技术研究计划(批准号: 2011AA010204)、教育部新世纪优秀人才资助计划(批准号: NCET-11-0068)、四川省杰出青年学术技术带头人计划(批准号: 2011JQ0001)和高校博士点专项科研基金(批准号: 20110185130002)资助的课题.

Authors and contacts

1.
State Key Laboratory of Electronic Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, China;

2.
National Key Laboratory of Science and Technology on Communication, University of Electronic Science and Technology of China, Chengdu 610054, China

Funds: Project supported by the National Natural Science Foundation of China (Grant No. 61131005), the Key Program Project of Chinese Ministry of Education (Grant No. 313013), the National High-tech Research and Development Progran (Grant No. 2011AA010204), the New Century Excellent Talent Foundation of Ministry of Education, China (Grant No. NCET-11-0068), Sichuan Youth S & T Foundation, China (Grant No. 2011JQ0001), and the Specialized Research Fund for the Doctoral Program of Higher Education, China (Grant No. 20110185130002).

参考文献

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[2]	Federici J, Moeller L 2010 J. Appl. Phys. 107 111101
[3]	Mittleman D M, Gupta M, Neelamani R, Baraniuk R G, Rudd J V, Koch M 1999 Appl. Phys. B 68 1085
[4]	Siegel P H Microwave Symposium Digest 2004 IEEE MTT-S International 2004 1575
[5]	Kemp M C, Taday P F, Cole B E, Cluff J A, Fitzgerald A J, Tribe W R 2003 International Society for Optics and Photonics in AeroSense 2003 p44
[6]	Kleine-Ostmann T, Dawson P, Pierz K, Hein G, Koch M 2004 Appl. Phys. Lett. 84 3555
[7]	Kleine-Ostmann T, Pierz K, Hein G, Dawson P, Marso M, Koch M 2009 J. Appl. Phys. 105 093707
[8]	Suzuki D, Oda S, Kawano Y 2013 Appl. Phys. Lett. 102 122102
[9]	Fekete L, Kadlec F, Kuzel P, Nemec H 2007 Opt. Lett. 32 680
[10]	Fekete L, Kadlec F, Nemec H, Kuzel P 2007 Opt. Express 15 8898
[11]	Seo M, Kyoung J, Park H, Koo S, Kim H, Bernien H, Kim B J, Choe J H, Ahn Y H, Kim H T, Park N, Park Q H, Ahn K, Kim D 2010 Nano Lett. 10 2064
[12]	Wen Q Y, Zhang H W, Yang Q H, Xie Y S, Chen K, Liu Y L 2010 Appl. Phys. Lett. 97 021111
[13]	Choi S B, Kyoung J S, Kim H S, Park H R, Park D J, Kim B J, Ahn Y H, Rotermund F, Kim H T, Ahn K J, Kim D S 2011 Appl. Phys. Lett. 98 071105
[14]	Liu M K, Hwang H Y, Tao H, Strikwerda A C, Fan K B, Keiser G R, Sternbach A J, West K G, Kittiwatanakul S, Lu J W, Wolf S A, Omenetto F G, Zhang X, Nelson K A, Averitt R D 2012 Nature 487 345
[15]	Wen Q Y, Zhang H W, Yang Q H, Chen Z, Long Y, Jing Y L, Lin Y, Zhang P X 2012 J. Phys. D: Appl. Phys. 45 235106
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[17]	Zhao Y, Chen C, Pan X, Zhu Y, Holtz M, Bernussi A, Fan Z 2013 J. Appl. Phys. 114 113509
[18]	Liu Z Q, Chang S J, Wang X L, Fan F, Li W 2013 Acta Phys. Sin 62 130702 (in Chinese) [刘志强, 常胜江, 王晓雷, 范飞, 李伟 2013 62 130702]
[19]	Chen H T, Padilla W J, Zide J M O, Gossard A C, Taylor A J, Averitt R D 2006 Nature 444 597
[20]	Chen H T, Palit S, Tyler T, Bingham C M, Zide J M O, O'Hara J F, Smith D R, Gossard A C, Averitt R D, Padilla W J, Jokerst N M, Taylor A J 2008 Appl. Phys. Lett. 93 091117
[21]	Chen H T, Padilla W J, Cich M J, Azad A K, Averitt R D, Taylor A J 2009 Nat. Photon. 3 148
[22]	Shu J, Qiu C, Astley V, Nickel D, Mittleman D M, Xu Q 2011 Opt. Express 19 26666
[23]	Yang Y, Huang R, Cong L, Zhu Z, Gu J, Tian Z, Singh R, Zhang S, Han J, Zhang W 2011 Appl. Phys. Lett. 98 121114
[24]	Yan R S, Sensale-Rodriguez B, Liu L, Jena D, Xing H G 2012 Opt. Express 20 28664
[25]	Gao W, Shu J, Reichel K, Nickel D V, He X, Shi G, Vajtai R, Ajayan P M, Kono J, Mittleman D M 2014 Nano Lett. 14 1242
[26]	Karl N, Reichel K, Chen H T, Taylor A J, Brener I, Benz A, Reno J L, Mendis R, Mittleman D M 2014 Appl. Phys. Lett. 104 091115
[27]	Larsen K, Austin D, Sandall I C, Davies D G, Revin D G, Cockburn J W, Adawi A M, Airey R J, Fry P W, Hopkinson M, Wilson L R 2012 Appl. Phys. Lett. 101 251109
[28]	Zhou Q L, Shi Y L, Wang A H, Li L, Zhang C L 2012 Chin. Phys. B 21 058701
[29]	Chan W L, Chen H T, Taylor A J, Brener I, Cich M J, Mittleman D M 2009 Appl. Phys. Lett. 94 213511
[30]	Shrekenhamer D, Montoya J, Krishna S, Padilla W J 2013 Adv. Opt. Mater. 1 905
[31]	Savo S, Shrekenhamer D, Padilla W J 2014 Adv. Opt. Mater. 2 275
[32]	He X J, Li T Y, Wang L, Wang J M, Jiang J X, Yang G H, Meng F Y, Wu Q 2014 J. Appl. Phys. 115 17B903
[33]	Degl'innocenti R, Jessop D S, Shah Y D, Sibik J, Zeitler J A, Kidambi P R, Hofmann S, Beere H E, Ritchie D A 2014 ACS Nano 8 2548
[34]	Shrekenhamer D, Rout S, Strikwerda A C, Bingham C, Averitt R D, Sonkusale S, Padilla W J 2011 Opt. Express 19 9968
[35]	Weis P, Garcia-Pomar J L, Hoh M, Reinhard B, Brodyanski A, Rahm M 2012 ACS Nano 6 9118
[36]	Xie Z, Wang X, Ye J, Feng S, Sun W, Akalin T, Zhang Y 2013 Scientific Reports 3 3347
[37]	Wen Q Y, Tian W, Mao Q, Chen Z, Liu W W, Yang Q H, Sanderson M, Zhang H W 2014 Scientific Reports 4 7409
[38]	Collins C B, Carlson R O, Gallagher C J 1957 Phys. Rev. 105 1168

施引文献

[1]	Tonouchi M 2007 Nat. Photon. 1 97
[2]	Federici J, Moeller L 2010 J. Appl. Phys. 107 111101
[3]	Mittleman D M, Gupta M, Neelamani R, Baraniuk R G, Rudd J V, Koch M 1999 Appl. Phys. B 68 1085
[4]	Siegel P H Microwave Symposium Digest 2004 IEEE MTT-S International 2004 1575
[5]	Kemp M C, Taday P F, Cole B E, Cluff J A, Fitzgerald A J, Tribe W R 2003 International Society for Optics and Photonics in AeroSense 2003 p44
[6]	Kleine-Ostmann T, Dawson P, Pierz K, Hein G, Koch M 2004 Appl. Phys. Lett. 84 3555
[7]	Kleine-Ostmann T, Pierz K, Hein G, Dawson P, Marso M, Koch M 2009 J. Appl. Phys. 105 093707
[8]	Suzuki D, Oda S, Kawano Y 2013 Appl. Phys. Lett. 102 122102
[9]	Fekete L, Kadlec F, Kuzel P, Nemec H 2007 Opt. Lett. 32 680
[10]	Fekete L, Kadlec F, Nemec H, Kuzel P 2007 Opt. Express 15 8898
[11]	Seo M, Kyoung J, Park H, Koo S, Kim H, Bernien H, Kim B J, Choe J H, Ahn Y H, Kim H T, Park N, Park Q H, Ahn K, Kim D 2010 Nano Lett. 10 2064
[12]	Wen Q Y, Zhang H W, Yang Q H, Xie Y S, Chen K, Liu Y L 2010 Appl. Phys. Lett. 97 021111
[13]	Choi S B, Kyoung J S, Kim H S, Park H R, Park D J, Kim B J, Ahn Y H, Rotermund F, Kim H T, Ahn K J, Kim D S 2011 Appl. Phys. Lett. 98 071105
[14]	Liu M K, Hwang H Y, Tao H, Strikwerda A C, Fan K B, Keiser G R, Sternbach A J, West K G, Kittiwatanakul S, Lu J W, Wolf S A, Omenetto F G, Zhang X, Nelson K A, Averitt R D 2012 Nature 487 345
[15]	Wen Q Y, Zhang H W, Yang Q H, Chen Z, Long Y, Jing Y L, Lin Y, Zhang P X 2012 J. Phys. D: Appl. Phys. 45 235106
[16]	Sun D D, Chen Z, Wen Q Y, Qiu D H, Lai W E, Dong K, Zhao B H, Zhang H W 2013 Acta Phys. Sin. 62 017202 (in Chinese) [孙丹丹, 陈智, 文岐业, 邱东鸿, 赖伟恩, 董凯, 赵碧辉, 张怀武 2013 62 017202]
[17]	Zhao Y, Chen C, Pan X, Zhu Y, Holtz M, Bernussi A, Fan Z 2013 J. Appl. Phys. 114 113509
[18]	Liu Z Q, Chang S J, Wang X L, Fan F, Li W 2013 Acta Phys. Sin 62 130702 (in Chinese) [刘志强, 常胜江, 王晓雷, 范飞, 李伟 2013 62 130702]
[19]	Chen H T, Padilla W J, Zide J M O, Gossard A C, Taylor A J, Averitt R D 2006 Nature 444 597
[20]	Chen H T, Palit S, Tyler T, Bingham C M, Zide J M O, O'Hara J F, Smith D R, Gossard A C, Averitt R D, Padilla W J, Jokerst N M, Taylor A J 2008 Appl. Phys. Lett. 93 091117
[21]	Chen H T, Padilla W J, Cich M J, Azad A K, Averitt R D, Taylor A J 2009 Nat. Photon. 3 148
[22]	Shu J, Qiu C, Astley V, Nickel D, Mittleman D M, Xu Q 2011 Opt. Express 19 26666
[23]	Yang Y, Huang R, Cong L, Zhu Z, Gu J, Tian Z, Singh R, Zhang S, Han J, Zhang W 2011 Appl. Phys. Lett. 98 121114
[24]	Yan R S, Sensale-Rodriguez B, Liu L, Jena D, Xing H G 2012 Opt. Express 20 28664
[25]	Gao W, Shu J, Reichel K, Nickel D V, He X, Shi G, Vajtai R, Ajayan P M, Kono J, Mittleman D M 2014 Nano Lett. 14 1242
[26]	Karl N, Reichel K, Chen H T, Taylor A J, Brener I, Benz A, Reno J L, Mendis R, Mittleman D M 2014 Appl. Phys. Lett. 104 091115
[27]	Larsen K, Austin D, Sandall I C, Davies D G, Revin D G, Cockburn J W, Adawi A M, Airey R J, Fry P W, Hopkinson M, Wilson L R 2012 Appl. Phys. Lett. 101 251109
[28]	Zhou Q L, Shi Y L, Wang A H, Li L, Zhang C L 2012 Chin. Phys. B 21 058701
[29]	Chan W L, Chen H T, Taylor A J, Brener I, Cich M J, Mittleman D M 2009 Appl. Phys. Lett. 94 213511
[30]	Shrekenhamer D, Montoya J, Krishna S, Padilla W J 2013 Adv. Opt. Mater. 1 905
[31]	Savo S, Shrekenhamer D, Padilla W J 2014 Adv. Opt. Mater. 2 275
[32]	He X J, Li T Y, Wang L, Wang J M, Jiang J X, Yang G H, Meng F Y, Wu Q 2014 J. Appl. Phys. 115 17B903
[33]	Degl'innocenti R, Jessop D S, Shah Y D, Sibik J, Zeitler J A, Kidambi P R, Hofmann S, Beere H E, Ritchie D A 2014 ACS Nano 8 2548
[34]	Shrekenhamer D, Rout S, Strikwerda A C, Bingham C, Averitt R D, Sonkusale S, Padilla W J 2011 Opt. Express 19 9968
[35]	Weis P, Garcia-Pomar J L, Hoh M, Reinhard B, Brodyanski A, Rahm M 2012 ACS Nano 6 9118
[36]	Xie Z, Wang X, Ye J, Feng S, Sun W, Akalin T, Zhang Y 2013 Scientific Reports 3 3347
[37]	Wen Q Y, Tian W, Mao Q, Chen Z, Liu W W, Yang Q H, Sanderson M, Zhang H W 2014 Scientific Reports 4 7409
[38]	Collins C B, Carlson R O, Gallagher C J 1957 Phys. Rev. 105 1168

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