二氧化钒薄膜低温制备及其太赫兹调制特性研究

孙丹丹; 陈智; 文岐业; 邱东鸿; 赖伟恩; 董凯; 赵碧辉; 张怀武

doi:10.7498/aps.62.017202

摘要

针对二氧化钒 (VO2) 薄膜在可调谐太赫兹功能器件中的应用, 利用低温磁控溅射技术, 在太赫兹和光学频段透明的BK7玻璃上制备出高质量的VO2 薄膜. 晶体结构和微观形貌分析显示薄膜为单相VO2单斜金红石结构, 具有明显的 (011) 晶面择优取向, 结构致密, 表面平整. 利用四探针技术和太赫兹时域光谱系统分析了薄膜的绝缘体-金属相变特性, 发现相变过程中薄膜电阻率变化达到4个数量级, 同时对太赫兹透射强度具有强烈的调制作用, 调制深度高达89%. 通过电学相变和太赫兹光学相变特性的对比研究, 证实薄膜的电阻率突变主要与逾渗通路的形成有关, 而太赫兹幅度的调制则来源于薄膜中载流子浓度的变化.该薄膜制备简单, 成膜质量高, 太赫兹调制性能优异, 可应用于太赫兹开关和调制器等集成式太赫兹功能器件.

关键词:

Abstract

Recently, the applications of vanadium dioxide film (VO2) in terahertz functional devices have attracted much attention because VO2 has a remarkable response to THz wave, In this work BK7 glass a material highly transparent to both THz and optical band is adopted as a substrate. High-quality VO2 film is deposited on a BK7 substrate using low temperature magnetron sputtering technology. The crystallinity and microstructure of the thin film are investigated by X-ray diffraction and atomic force microscopy. The results indicate that the as-deposited film crystallizes directly into single-phase VO2 with (011) preferred orientation and compact nanostructure. Under a heating-cooling cycle, the film undergos a metal-insulator transition with an abrupt resistivity change reaching more than 4 orders of magnitude. Terahertz transmission modulation is characterized by terahertz time domain spectrum, and a giant modulation depth of 89% is obtained. Due to the high transparence and the huge modulation effect, the VO2/BK7 can be widely used for THz devices such as modulators and switches.

Keywords:

作者及机构信息

1.
电子科技大学, 电子薄膜与集成器件国家重点实验室, 成都 610054;

2.
电子科技大学, 通信抗干扰技术国家重点实验室, 成都 610054

基金项目: 国家自然科学基金重点项目(批准号: 61131005, 61021061)、教育部科学技术研究重大项目(批准号: 313013)、教育部新世纪优秀人才资助计划(批准号: NCET-11-0068)、四川省杰出青年学术技术带头人计划(批准号: 2011JQ0001)、四川省国际科技合作项目(批准号: 2010HH0026)和中央高校基本科研业务费(批准号: ZYGX2010J034)资助的课题.

Authors and contacts

1.
State Key Laboratory of Electronic Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, China;

2.
National Key Laboratory of Science and Technology on Communication, University of Electronic Science and Technology of China,Chengdu 610054, China

Funds: Project supported by the National Natural Science Foundation of China (Grant Nos. 61131005, 61021061), the Key Grant Project of Chinese Ministry of Education (Grant No. 313013), the "New Century Excellent Talent Foundation", China (Grant No. NCET-11-0068), Sichuan Youth S & T Foundation, China (Grant No. 2011JQ0001), Sichuan International S & T Cooperation Program, China (Grant No. 2010HH0026), and the Fundamental Research Funds for the Central Universities, China (Grant No. ZYGX2010J034).

参考文献

[1]	Agrawal A, Nahata A 2007 Opt. Express 15 9022
[2]	Kleine-Ostmann T, Pierz K, Hein G, Dawson P, Koch M 2007 IEEE Antennas Propag. 49 24
[3]	O'Hara J F, Taylor A J, Averitt R D, Zide J M, Gossard A C 2006 Appl. Phys. Lett. 88 251119
[4]	Morin F J 1959 Phys. Rev. Lett. 3 34
[5]	Zylbersztejn A, Mott N F 1975 Phys. Rev. B 11 4383
[6]	Chain E E 1991 Appl. Opt. 30 2782
[7]	Lopez R, Boatner L A, Haynes T E, Haglund Jr R F, Feldman L C 2004 Appl. Phys. Lett. 85 1410
[8]	Kim H T, Lee Y W, Kim B J, Chae B G, Yun S J, Kang K Y, Han K J, Yee K J, Lim Y S 2006 Phys. Rev. Lett. 97 266401
[9]	Cui J Z, Da D A, Jiang W S 1998 Acta Phys. Sin. 47 454 (in Chinese) [崔敬忠, 达道安, 姜万顺 1998 47 454]
[10]	Ben-Messaoud T, Landry G, Gariépy J P, Ramamoorthy B, Ashrit P V, Haché A 2008 Opt. Commun. 281 6024
[11]	Seo M, Kyoung J, Park H, Koo S, Kim H S, Bernien H, Kim B J, Choe J H, Ahn Y H, Kim H T, Park N, Park Q H, Ahn K, Kim D S 2010 Nano Lett. 10 2064
[12]	Kyoung J, Seo M, Park H, Koo S, Kim H S, Park Y, Kim B J, Ahn K, Park N, Kim H T, Kim D S 2010 Opt. Express 18 16452
[13]	Wen Q Y, Zhang H W, Yang Q H, Xie Y S, Chen K, Liu Y L 2010 Appl. Phys. Lett. 97 021111
[14]	Choi S B, Kyoung J S, Kim H S, Park H R, Park D J, Kim B J, Ahn Y H, Rotermund F, Kim H T, Ahn K J, Kim D S 2011 Appl. Phys. Lett. 98 071105
[15]	Wen Q Y, Zhang H W, Yang Q H, Chen Z, Long Y, Jing Y L, Lin Y, Zhang P X 2012 J. Phys. D: Appl. Phys. 45 235106
[16]	Driscoll T, Kim H T, Chae B G, Kim B J, Lee Y W, Jokerst N M, Palit S, Smith D R, Ventra M D, Basov D N 2009 Science 325 1518
[17]	Goldflam M D, Driscoll T, Chapler B, Khatib O, Marie Jokerst N, Palit S, Smith D R, Kim B J, Seo G, Kim H T, Ventra M D, Basov D N 2011 Appl. Phys. Lett. 99 044103
[18]	Luo Z F, Wu Z M, Xu X D, Wang T, Jiang Y D 2010 Chin. Phys. B 19 106103
[19]	Nakajima M, Takubo N, Hiroi Z, Ueda Y, Suemoto T 2008 Appl. Phys. Lett. 92 011907
[20]	Shi Q W, Huang W X, Zhang Y X, Yan J Z, Zhang Y B, Mao M, Zhang Y, Tu M J 2011 Acs. Appl. Mater. 3 3523
[21]	Zhao Y, Lee J H, Zhu Y H, Nazari M, Chen C H, Wang H Y, Bernussi A, Holtz M, Fan Z Y 2012 J. Appl. Phys. 111 053533
[22]	Wang C L, Tian Z, Xing Q R, Gu J Q, Liu F, Hu M L, Chai L, Wang Q Y 2010 Acta Phys. Sin. 59 7857 (in Chinese) [王昌雷, 田震, 邢岐荣, 谷建强, 刘丰, 胡明列, 柴路, 王清月 2010 59 7857]
[23]	Li J, Dho J 2011 Appl. Phys. Lett. 99 231909
[24]	Gupta A, Aggarwal R, Gupta P, Dutta T, Narayan R J, Narayan J 2009 Appl. Phys. Lett. 95 111915
[25]	Brassard D, Fourmaux S, Jean-Jacques M, Kieffer J C, El Khakani M A 2005 Appl. Phys. Lett. 87 051910
[26]	Jiang L J, Carr W N 2004 J. Micromech. Microeng. 14 833
[27]	Rozen J, Lopez R, Haglund R F, Feldman L C 2006 Appl. Phys. Lett. 88 081902
[28]	Qazilbash M M, Brehm M, Chae B G, Ho P C, Andreev G O, Kim B J, Yun S J, Balatsky A V, Maple M B, Keilmann F, Kim H T, Basov D N 2007 Science 318 1750
[29]	Jepsen P U, Fischer Bernd M, Thoman A, Helm H, Suh J Y, Lopez R, Haglund R F 2006 Phys. Rev. B 74 205103

施引文献

[1]	Agrawal A, Nahata A 2007 Opt. Express 15 9022
[2]	Kleine-Ostmann T, Pierz K, Hein G, Dawson P, Koch M 2007 IEEE Antennas Propag. 49 24
[3]	O'Hara J F, Taylor A J, Averitt R D, Zide J M, Gossard A C 2006 Appl. Phys. Lett. 88 251119
[4]	Morin F J 1959 Phys. Rev. Lett. 3 34
[5]	Zylbersztejn A, Mott N F 1975 Phys. Rev. B 11 4383
[6]	Chain E E 1991 Appl. Opt. 30 2782
[7]	Lopez R, Boatner L A, Haynes T E, Haglund Jr R F, Feldman L C 2004 Appl. Phys. Lett. 85 1410
[8]	Kim H T, Lee Y W, Kim B J, Chae B G, Yun S J, Kang K Y, Han K J, Yee K J, Lim Y S 2006 Phys. Rev. Lett. 97 266401
[9]	Cui J Z, Da D A, Jiang W S 1998 Acta Phys. Sin. 47 454 (in Chinese) [崔敬忠, 达道安, 姜万顺 1998 47 454]
[10]	Ben-Messaoud T, Landry G, Gariépy J P, Ramamoorthy B, Ashrit P V, Haché A 2008 Opt. Commun. 281 6024
[11]	Seo M, Kyoung J, Park H, Koo S, Kim H S, Bernien H, Kim B J, Choe J H, Ahn Y H, Kim H T, Park N, Park Q H, Ahn K, Kim D S 2010 Nano Lett. 10 2064
[12]	Kyoung J, Seo M, Park H, Koo S, Kim H S, Park Y, Kim B J, Ahn K, Park N, Kim H T, Kim D S 2010 Opt. Express 18 16452
[13]	Wen Q Y, Zhang H W, Yang Q H, Xie Y S, Chen K, Liu Y L 2010 Appl. Phys. Lett. 97 021111
[14]	Choi S B, Kyoung J S, Kim H S, Park H R, Park D J, Kim B J, Ahn Y H, Rotermund F, Kim H T, Ahn K J, Kim D S 2011 Appl. Phys. Lett. 98 071105
[15]	Wen Q Y, Zhang H W, Yang Q H, Chen Z, Long Y, Jing Y L, Lin Y, Zhang P X 2012 J. Phys. D: Appl. Phys. 45 235106
[16]	Driscoll T, Kim H T, Chae B G, Kim B J, Lee Y W, Jokerst N M, Palit S, Smith D R, Ventra M D, Basov D N 2009 Science 325 1518
[17]	Goldflam M D, Driscoll T, Chapler B, Khatib O, Marie Jokerst N, Palit S, Smith D R, Kim B J, Seo G, Kim H T, Ventra M D, Basov D N 2011 Appl. Phys. Lett. 99 044103
[18]	Luo Z F, Wu Z M, Xu X D, Wang T, Jiang Y D 2010 Chin. Phys. B 19 106103
[19]	Nakajima M, Takubo N, Hiroi Z, Ueda Y, Suemoto T 2008 Appl. Phys. Lett. 92 011907
[20]	Shi Q W, Huang W X, Zhang Y X, Yan J Z, Zhang Y B, Mao M, Zhang Y, Tu M J 2011 Acs. Appl. Mater. 3 3523
[21]	Zhao Y, Lee J H, Zhu Y H, Nazari M, Chen C H, Wang H Y, Bernussi A, Holtz M, Fan Z Y 2012 J. Appl. Phys. 111 053533
[22]	Wang C L, Tian Z, Xing Q R, Gu J Q, Liu F, Hu M L, Chai L, Wang Q Y 2010 Acta Phys. Sin. 59 7857 (in Chinese) [王昌雷, 田震, 邢岐荣, 谷建强, 刘丰, 胡明列, 柴路, 王清月 2010 59 7857]
[23]	Li J, Dho J 2011 Appl. Phys. Lett. 99 231909
[24]	Gupta A, Aggarwal R, Gupta P, Dutta T, Narayan R J, Narayan J 2009 Appl. Phys. Lett. 95 111915
[25]	Brassard D, Fourmaux S, Jean-Jacques M, Kieffer J C, El Khakani M A 2005 Appl. Phys. Lett. 87 051910
[26]	Jiang L J, Carr W N 2004 J. Micromech. Microeng. 14 833
[27]	Rozen J, Lopez R, Haglund R F, Feldman L C 2006 Appl. Phys. Lett. 88 081902
[28]	Qazilbash M M, Brehm M, Chae B G, Ho P C, Andreev G O, Kim B J, Yun S J, Balatsky A V, Maple M B, Keilmann F, Kim H T, Basov D N 2007 Science 318 1750
[29]	Jepsen P U, Fischer Bernd M, Thoman A, Helm H, Suh J Y, Lopez R, Haglund R F 2006 Phys. Rev. B 74 205103

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