含氢电极真空弧放电等离子体时空分布特性研究

冯璟华; 蒙世坚; 甫跃成; 周林; 徐荣昆; 张建华; 李林波; 章法强

doi:10.7498/aps.63.145205

摘要

真空弧离子源在真空镀膜、材料表面改性、真空大电流开关、加速器离子注入等领域有广泛应用，目前国内外对真空弧放电等离子体的研究主要针对纯金属或合金电极，对含氢电极的研究和公开报道较少. 本文利用高时空分辨的四分幅图像诊断系统，结合氢和钛原子特征线单色器件，研究了含氢钛电极的真空弧微秒级脉冲放电等离子体的轴向和径向时空分布特性. 研究表明：在真空击穿阶段，阳极区域发光更为明显，阳极电极解吸附释放的氢原子是引发击穿的主要放电介质；在真空弧阶段，阴极-绝缘-真空三结合点处产生圆锥状阴极斑，喷射出大量的等离子体以维持弧放电，同时电极内壁非阴极斑区域也有少量等离子体产生，等离子体中H原子的轴向和径向空间分布均比Ti原子均匀.

关键词:

Abstract

Vacuum arc ion sources have been used in a wide range including vacuum coating, materials surface modification, switching devices and other fields. At present, researches on the vacuum arc ion source are mainly targeting the pure metal or alloy electrodes, but the researches on the hydrogenous electrode are rarely reported. The axial and radial distributions of the hydrogenous electrode vacuum arc discharge plasma are studied by using high speed four-frame camera equipped with the narrow-band filters of strong lines of H I and Ti I. It is found that the anode is intensively luminous in the vacuum breakdown. The observation from the camera with the filter reveals that the vacuum breakdown is ignited mainly by the anode hydrogen desorption. The vacuum arc is sustained by plasmas emitted from either the cathode spots or the electrode inner wall. The cone-shaped cathode spot located at the cathode-insulator-vacuum junction is the main plasma source. It is found that the distribution of hydrogen atoms is much more homogeneous than that of titanium atoms, which may be due to the earlier beginning of hydrogen desorption, the bigger emitting area and faster diffusion speed of hydrogen atom.

Keywords:

作者及机构信息

1.
中国工程物理研究院核物理与化学研究所, 绵阳 621900

Authors and contacts

1.
Institute of Nuclear Physics and Chemistry, China Academy of Engineering Physics, Mianyang 621900, China

参考文献

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施引文献

[1]	Georgy Y, Yushkov, Andr A 2008 Appl. Phys. Lett. 92 041502
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[28]	Sun J Z, Li X T, Bai J, Wang D Z 2012 Chin. Phys. B 21 055205
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[30]	Li X C, Niu D Y, Xu L F, Jia P Y, Chang Y Y 2012 Chin. Phys. B 21 075204
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