栅控横向PNP双极晶体管辐照感生电荷的定量分离

席善斌; 陆妩; 任迪远; 周东; 文林; 孙静; 吴雪

doi:10.7498/aps.61.236103

摘要

设计并制作了一种栅控横向PNP双极晶体管测试结构,在常规横向PNP双极晶体管基区表面氧化层上制作了一栅电极,利用栅扫描法,通过扫描栅极所加电压,获得了基极电流随栅极电压的变化特性. 理论推导和数学计算获得了氧化物陷阱电荷和界面陷阱电荷的定量变化,分离出栅控横向PNP双极晶体管在辐照及其室温退火过程中感生的缺陷.对设计的晶体管测试结构和采用的测试方法做了具体介绍.

关键词:

A new test structure of gate controlled lateral PNP bipolar transistors designed and fabricated. An independent gate terminal is patterned on the oxide layer above the active base region of normal lateral PNP bipolar transistors. According to the gate sweep technique, by sweeping the voltage applied to the gate terminal, one can obtain the characteristic of base current versus gate voltage. The quantitative variations of oxide trapped charges and interface traps are analytically estimated and numerically calculated, and the radiation induced defects in the gate controlled lateral PNP bipolar transistors during 60Co-γ irradiation and annealing at room temperature are separated independently. The test structures and measurements of the bipolar transistors used in the experiment are introduced in detail in this paper.

Keywords:

作者及机构信息

1.
中国科学院新疆理化技术研究所, 乌鲁木齐 830011;

2.
新疆电子信息材料与器件重点实验室, 乌鲁木齐 830011;

3.
中国科学院研究生院, 北京 100049

基金项目: 国家自然科学基金(批准号: 10975182)资助的课题.

Authors and contacts

1.
Xinjiang Technical Institute of Physics & Chemistry CAS, Urumqi 830011, China;

2.
Xinjiang Key Laboratory of Electronic Information Materials and Devices, Urumqi 830011, China;

3.
Graduate University of Chinese Academy of Sciences, Beijing 100049, China

Funds: Project supported by the National Natural Science Foundation of China (Grant No. 10975182).

参考文献

[1]	Enlow E W, Pease R L, Combs W, Schrimpf R D, Nowlin R N 1991 IEEE Trans. Nucl. Sci. 38 1342
[2]	Fleetwood D M, Kosier S L, Nowlin R N, Schrimpf R D, Reber R A, DeLaus M, Winokur P S, Wei A, Combs W E, Pease R L 1994 IEEE Trans. Nucl. Sci. 41 1871
[3]	Barnaby H J, Cirba C, Schrimpf R D, Kosier S, Fouillat P, Montagner X 1999 IEEE Trans. Nucl. Sci. 46 1652
[4]	Zheng Y Z, Lu W, Ren D Y, Wang Y Y, Guo Q, Yu X F, He C F 2009 Acta Phys. Sin. 58 5572 (in Chinese) [郑玉展, 陆妩, 任迪远, 王义元, 郭旗, 余学锋, 何承发 2009 58 5572]
[5]	Wang Y Y, Lu W, Ren D Y, Guo Q, Yu X F, He C F, Gao B 2011 Acta Phys. Sin. 60 096104 (in Chinese) [王义元, 陆妩, 任迪远, 郭旗, 余学锋, 何承发, 高博 2011 60 096104]
[6]	Rashkeev S N, Cirba C R, Fleetwood D M, Schrimpf R D, Witczak S C, Michez A, Pantelides S T 2002 IEEE Trans. Nucl. Sci. 49 2650
[7]	Kosier S L, Schrimpf R D, Nowlin R N, Fleetwood D M, DeLaus M, Pease R L, Combs W E, Wei A, Chai F 1993 IEEE Trans. Nucl. Sci. 40 1276
[8]	Niu G F, Banerjee G, Cressler J D, Roldan J M, Clark S D, Ahlgren D C 1998 IEEE Trans. Nucl. Sci. 45 2361
[9]	Cazenave P, Fouillat P, Montagner X, Barnaby H, Schrimpf R D, Bonora L, David J P, Touboul A, Calvet M C, Calvel P 1998 IEEE Trans. Nucl. Sci. 45 2577
[10]	Chen X J, Barnaby H J, Pease R L, Schrimpf R D, Platteter D G, Dunham G 2004 IEEE Trans. Nucl. Sci. 51 3178
[11]	Pease R L, Platteter D G, Dunham G W, Seiler J M, Barnaby H J, Schrimpf R D, Shaneyfelt M R, Maher M C, Nowlin R N 2004 IEEE Trans. Nucl. Sci. 51 3773
[12]	Nowlin R N, Pease R L, Platteter D G, Dunham G W, Seiler J E 2005 IEEE Trans. Nucl. Sci. 52 2609
[13]	Chen X J, Barnaby H J, Schrimpf R D, Fleetwood D M, Pease R L, Platteter D G, Dunham G W 2006 IEEE Trans. Nucl. Sci. 53 3649
[14]	Hughart D R, Schrimpf R D, Fleetwood D M, Chen X J, Barnaby H J, Holbert K E, Pease R L, Platteter D G, Tuttle B R, Pantelides S T 2009 IEEE Trans. Nucl. Sci. 56 3361
[15]	Ball D R, Schrimpf R D, Barnaby H J 2002 IEEE Trans. Nucl. Sci. 49 3185
[16]	Minson E, Sanchez I, Barnaby H J, Pease R L, Platteter D G, Dunham G 2004 IEEE Trans. Nucl. Sci. 51 3723
[17]	Chen X J, Barnaby H J, Pease R L, Schrimpf R D, Platteter D, Shaneyfelt M, Vermeire B 2005 IEEE Trans. Nucl. Sci. 52 2245
[18]	Adell P C, Pease R L, Barnaby H J, Rax B, Chen X J, McClure S S 2009 IEEE Trans. Nucl. Sci. 56 3326

施引文献

[1]	Enlow E W, Pease R L, Combs W, Schrimpf R D, Nowlin R N 1991 IEEE Trans. Nucl. Sci. 38 1342
[2]	Fleetwood D M, Kosier S L, Nowlin R N, Schrimpf R D, Reber R A, DeLaus M, Winokur P S, Wei A, Combs W E, Pease R L 1994 IEEE Trans. Nucl. Sci. 41 1871
[3]	Barnaby H J, Cirba C, Schrimpf R D, Kosier S, Fouillat P, Montagner X 1999 IEEE Trans. Nucl. Sci. 46 1652
[4]	Zheng Y Z, Lu W, Ren D Y, Wang Y Y, Guo Q, Yu X F, He C F 2009 Acta Phys. Sin. 58 5572 (in Chinese) [郑玉展, 陆妩, 任迪远, 王义元, 郭旗, 余学锋, 何承发 2009 58 5572]
[5]	Wang Y Y, Lu W, Ren D Y, Guo Q, Yu X F, He C F, Gao B 2011 Acta Phys. Sin. 60 096104 (in Chinese) [王义元, 陆妩, 任迪远, 郭旗, 余学锋, 何承发, 高博 2011 60 096104]
[6]	Rashkeev S N, Cirba C R, Fleetwood D M, Schrimpf R D, Witczak S C, Michez A, Pantelides S T 2002 IEEE Trans. Nucl. Sci. 49 2650
[7]	Kosier S L, Schrimpf R D, Nowlin R N, Fleetwood D M, DeLaus M, Pease R L, Combs W E, Wei A, Chai F 1993 IEEE Trans. Nucl. Sci. 40 1276
[8]	Niu G F, Banerjee G, Cressler J D, Roldan J M, Clark S D, Ahlgren D C 1998 IEEE Trans. Nucl. Sci. 45 2361
[9]	Cazenave P, Fouillat P, Montagner X, Barnaby H, Schrimpf R D, Bonora L, David J P, Touboul A, Calvet M C, Calvel P 1998 IEEE Trans. Nucl. Sci. 45 2577
[10]	Chen X J, Barnaby H J, Pease R L, Schrimpf R D, Platteter D G, Dunham G 2004 IEEE Trans. Nucl. Sci. 51 3178
[11]	Pease R L, Platteter D G, Dunham G W, Seiler J M, Barnaby H J, Schrimpf R D, Shaneyfelt M R, Maher M C, Nowlin R N 2004 IEEE Trans. Nucl. Sci. 51 3773
[12]	Nowlin R N, Pease R L, Platteter D G, Dunham G W, Seiler J E 2005 IEEE Trans. Nucl. Sci. 52 2609
[13]	Chen X J, Barnaby H J, Schrimpf R D, Fleetwood D M, Pease R L, Platteter D G, Dunham G W 2006 IEEE Trans. Nucl. Sci. 53 3649
[14]	Hughart D R, Schrimpf R D, Fleetwood D M, Chen X J, Barnaby H J, Holbert K E, Pease R L, Platteter D G, Tuttle B R, Pantelides S T 2009 IEEE Trans. Nucl. Sci. 56 3361
[15]	Ball D R, Schrimpf R D, Barnaby H J 2002 IEEE Trans. Nucl. Sci. 49 3185
[16]	Minson E, Sanchez I, Barnaby H J, Pease R L, Platteter D G, Dunham G 2004 IEEE Trans. Nucl. Sci. 51 3723
[17]	Chen X J, Barnaby H J, Pease R L, Schrimpf R D, Platteter D, Shaneyfelt M, Vermeire B 2005 IEEE Trans. Nucl. Sci. 52 2245
[18]	Adell P C, Pease R L, Barnaby H J, Rax B, Chen X J, McClure S S 2009 IEEE Trans. Nucl. Sci. 56 3326

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