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非球面光学元件在芯片制造、遥感探测及航空航天等前沿领域具有重要应用价值，因而对其加工和检测精度的要求不断提高。非球面环形子孔径拼接测量技术是一种高精度、通用性强的有效检测技术，但在大非球面度、大陡度元件检测中显著的面形特征与测量误差的耦合问题制约了其测量精度的提升。本文提出一种基于全口径面形特征与局部测量误差全局优化拟合的非球面测量误差解耦合技术，通过构建包含全口径圆形泽尼克多项式与子孔径环形泽尼克多项式的全局优化模型，实现全口径面形特征与子孔径局部测量误差的同步拟合解算与解耦合并提升测量精度。仿真与实验结果表明，该技术可有效分离面形特征与测量误差，同时可避免传统拼接测量方法中面形参考基准存在误差和子孔径误差累积的问题，在本文的实验中其PVr精度较传统方法可提升近30%。此外，该技术无需依赖子孔径重叠区域，能够减少子孔径数量、提升测量效率。此方法为大非球面度、大陡度光学元件的高精度测量提供了技术解决方案。Aspheric optical elements are essential in high-end manufacturing and scientific research. As precision demands increase, the coupling of surface features and measurement errors during high-asphericity and high steepness element measurement based on annular subaperture stitching limits high-precision measurement development. The traditional overlapping-region based subaperture stitching method suffers from two major issues: the error of the first subaperture, which serves as the reference, cannot be decoupled, and the error accumulation. To solve the error coupling problem, this paper proposes an aspherical measurement error decoupling technology based on global optimal fitting of full-aperture surface shape features and local measurement errors. The method uses fullaperture circular and subaperture annular Zernike polynomials to build a global optimization model, where the former represents surface features and the latter describes subaperture errors. By integrating these polynomials to create a global optimization function and solving for Zernike coefficients, error decoupling and enhanced accuracy can be achieved. Furthermore, processing errors globally can avoid error accumulation in the traditional method and reduce the number of subapertures for higher measurement efficiency. Simulation and experimental validations are demonstrated in this paper. The simulation shows effective fitting of Zernike polynomial coefficients and error decoupling. Experiments shows that the achievement of error decoupling in measurement of high-asphericity and high steepness elements with the proposed method, and the PVr accuracy of measurement is improved by nearly 30% compared to traditional methods. The proposed method offers a practical solution for high-precision measurement of high-asphericity and high steepness element measurement.
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Keywords:
- optical surface measurement /
- asphere /
- subaperture stitching /
- global stitching
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