Effects of underlayer on structures and magnetic properties of Fe<sub>65</sub>Co<sub>35</sub> alloy films

Han Ze-Yu; Song Cheng-Ji; Zhou Jie; Zheng Fu

doi:10.7498/aps.71.20220476

Abstract

Fe_100-xCo_x (x = 30–40) alloys have the highest saturation magnetizations, 4πM_s ≥ 24 kG (1 G = 10^–4 T). Therefore, FeCo thin flms have been widely used in microwave magnetic devices. However, the as-deposited FeCo film has a large coercivity, which is attributed to the large saturation magnetostriction and high magneto-crystalline anisotropy. On the basis of maintaining high saturation magnetization, adding an appropriate underlayer is a simple and effective method to reduce the coercivity of the film and facilitate the magnetic field-induced in-plane uniaxial magnetic anisotropy. Since these kinds of films are used in a high-frequency environment, the eddy current loss in GHz band must be considered. For a certain film material, the thinner the film, the lower the eddy current loss is. However, at present, the thickness of ferromagnetic layer is generally tens of nanometers or even hundreds of nanometers, which will not help to suppress the eddy current loss at high frequency. In the present study, to obtain FeCo films with good soft magnetic properties and excellent high-frequency characteristics, Fe₆₅Co₃₅ alloy films with a thickness of 13 nm and different underlayers (Cu, Co and Ni₈₀Fe₂₀) are prepared by magnetron sputtering. The effects of different underlayer materials and different NiFe underlayer thickness values on the structures and magnetic properties of FeCo films are studied. The results show that the introduction of underlayers can increase the in-plane uniaxial magnetic anisotropies of films, and the soft magnetic properties of films are significantly improved. The reason why the good soft magnetic properties can be achieved is attributed to the grain refinement, the dipolar interaction between layers, and the reduction of surface roughness. For different underlayer materials with the same thickness, NiFe underlayer can obviously improve the soft magnetic properties of FeCo films: the covercivity of easy axis is 23 Oe. By changing the thickness of NiFe underlayer, the dynamic magnetic properties of films can be adjusted. The resonance frequency changes from 3.13 GHz for NiFe(1 nm)/FeCo(13 nm) film to 2.78 GHz for NiFe(9.3 nm)/ FeCo(13 nm) film. For all NiFe/FeCo bilayer films, the real part of the permeability μ′ at low frequency has a large value of 350–450, and the damping coefficient α shows a small value of 0.01–0.02. In addition, the smaller film thickness can reduce eddy current loss, which contributes to its application in high-frequency microwave magnetic devices.

Keywords:

Authors and contacts

School of Physics and Electronic-Electrical Engineering, Ningxia University, Yinchuan 750021, China

Corresponding author: Zheng Fu, zhengfu@nxu.edu.cn

Funds: Project supported by the National Natural Science Foundation of China (Grant No. 11964027).

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References

[1]	Li T Y, Liu X Y, Li J W, Pan L N, He A N, Dong Y Q 2022 J. Magn. Magn. Mater. 547 168777 Google Scholar
[2]	Cronin D, Lordan D, Wei G, McCloskey P, Mathúna C O, Masood A 2020 J. Appl. Phys. 127 243903 Google Scholar
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Cited By

图 1 不同衬底层上沉积的FeCo薄膜的XRD图谱, 实线为拟合曲线

Figure 1. XRD patterns of FeCo films deposited on different underlayers. Solid lines are the fitting curves.

DownLoad: Full-Size Img PowerPoint

图 2 在不同衬底层上沉积的FeCo薄膜归一化的易轴磁滞回线

Figure 2. Normalized easy axis hysteresis loops of FeCo films deposited on different underlayers.

DownLoad: Full-Size Img PowerPoint

图 3 不同衬底层上沉积的FeCo薄膜的δM曲线

Figure 3. δM curves of FeCo films deposited on different underlayers.

DownLoad: Full-Size Img PowerPoint

图 4 在(a) Si基底、(b) Cu、(c) Co、(d) NiFe衬底层上沉积的FeCo薄膜的三维AFM图

Figure 4. Three-dimensional AFM images of FeCo films deposite on (a) Si substrate, (b) Cu, (c) Co, and (d) NiFe underlayers.

DownLoad: Full-Size Img PowerPoint

图 5 不同衬底层上沉积的FeCo薄膜的磁谱图

Figure 5. Permeability spectra of FeCo films deposited on different underlayers.

DownLoad: Full-Size Img PowerPoint

图 6 具有不同NiFe衬底层厚度的FeCo薄膜的XRD图谱(实线为拟合曲线)

Figure 6. The XRD patterns of FeCo films with different NiFe underlayer thicknesses. Solid lines are the fitting curves.

DownLoad: Full-Size Img PowerPoint

图 7 NiFe衬底层厚度为(a) 0, (b) 1, (c) 2.3, (d) 4.6, (e) 7, (f) 9.3 nm的FeCo薄膜的面内磁滞回线

Figure 7. In-plane hysteresis loops of FeCo films with NiFe underlayer thickness of (a) 0, (b) 1, (c) 2.3, (d) 4.6, (e) 7, and (f) 9.3 nm.

DownLoad: Full-Size Img PowerPoint

图 8 NiFe/FeCo薄膜的面内矫顽力和饱和磁化强度与NiFe衬底层厚度的关系

Figure 8. Dependence of the in-plane coercivity and saturation magnetization of NiFe/FeCo films on the thickness of NiFe underlayers.

DownLoad: Full-Size Img PowerPoint

图 9 NiFe衬底层厚度为(a) 1, (b) 2.3, (c) 4.6, (d) 9.3 nm的FeCo薄膜的磁谱图, 红线为基于LLG方程的拟合结果

Figure 9. Permeability spectra of FeCo films with NiFe underlayer thickness of (a) 1, (b) 2.3, (c) 4.6, and (d) 9.3 nm. The red lines are the fitting results based on the LLG equation.

DownLoad: Full-Size Img PowerPoint

图 10 (a) NiFe/FeCo薄膜的各向异性场和共振频率与NiFe衬底层厚度的关系; (b) NiFe/FeCo薄膜的阻尼系数和频率线宽与NiFe衬底层厚度的关系

Figure 10. (a) Dependence of anisotropic field and resonance frequency of NiFe/FeCo films on thickness of NiFe underlayers; (b) dependence of damping coefficient and frequency linewidth of NiFe/FeCo films on thickness of NiFe underlayers.

DownLoad: Full-Size Img PowerPoint

表 1 Si基底和不同衬底上沉积的FeCo薄膜的易轴矫顽力、剩磁比、应变、晶粒尺寸以及阻尼系数

Table 1. Coercivity of easy axis, remanent magnetization ratio, strain, grain size, and damping coefficient of FeCo films deposited on Si substrate and different underlayers.

衬底层材料	易轴矫顽力 H_c/Oe	剩磁比 M_r/M_s	应变 ∆ε/%	晶粒尺寸 D/nm	阻尼 α
Si	112	0.834	—	9.4±0.2	—
Cu	41	0.949	0.59	7.5±0.6	0.045
Co	38	0.951	0.27	7.5±0.2	0.025
NiFe	23	0.991	0.29	6.9±0.2	0.015

DownLoad: CSV

表 2 不同衬底上沉积的FeCo薄膜的磁性总结

Table 2. Summary of magnetic properties of FeCo films deposited on different underlayers.

材料	厚度t/nm	f_r/GHz	μ_i	H_c/Oe
材料	厚度t/nm	f_r/GHz	μ_i	H_ce	H_ch
Cu/FeCo^[21]	10+100	—	—	～33	～15
Cu/FeCo^a	7+13	3.13	406	41	18
Co/FeCo^[38]	7.5+100	3.04	221.1	45.8	14.7
Co/FeCo^a	7+13	3.05	296	38	13.3
NiFe/FeCo^[39]	10+100	—	—	～30	～25
NiFe/FeCo^a	7+13	2.83	360	23	8
^a 本文所研究的双层合金薄膜.

DownLoad: CSV

map

[1]	Li T Y, Liu X Y, Li J W, Pan L N, He A N, Dong Y Q 2022 J. Magn. Magn. Mater. 547 168777 Google Scholar
[2]	Cronin D, Lordan D, Wei G, McCloskey P, Mathúna C O, Masood A 2020 J. Appl. Phys. 127 243903 Google Scholar
[3]	Tang X L, Yu Y, Su H, Zhang H W, Zhong Z Y, Jing Y L 2018 J. Mater. Sci. 53 3573 Google Scholar
[4]	Chai G, Phuoc N N, Ong C K 2012 Sci. Rep. 2 832 Google Scholar
[5]	Masood A, McCloskey P, Mathúna C Ó, Kulkarni S 2017 J. Phys. Conf. Ser. 903 012050 Google Scholar
[6]	Kurlyandskaya G V, Shcherbinin S V, Volchkov S O, Bhagat S M, Calle E, Pérez R, Vazquez M 2018 J. Magn. Magn. Mater. 459 154 Google Scholar
[7]	Zheng F, Ma Z, Gao H, Pan F C, Li S T, Cao J W, Bai J M, Wei F L 2017 J. Mater. Sci. Mater. Electron. 28 17448 Google Scholar
[8]	Yang F J, Min J J, Hui J H, Chen H B, Degao L, Li W J, Chen X Q, Yang C P 2017 J. Mater. Sci. Mater. Electron. 28 11733 Google Scholar
[9]	Baco S, Abbas Q A, Hayward T J, Morley N A 2021 J. Alloy. Compd. 881 160549 Google Scholar
[10]	Cabral L, Aragon F H, Villegas-Lelovsky L, Lima M P, Macedo W A A, Da Silva J L F 2019 ACS Appl. Mater. Inter. 11 1529 Google Scholar
[11]	Vopsaroiu M, Georgieva M, Grundy P J, Fernandez G V, Manzoor S, Thwaites M J, O’Grady K 2005 J. Appl. Phys. 97 10N303 Google Scholar
[12]	Vas’ko V A, Rantschler J O, Kief M T 2004 IEEE Trans. Magn. 40 2335 Google Scholar
[13]	Xi L, Du J H, Zhou J J, Ma J H, Li X Y, Wang Z, Zuo Y L, Xue D S 2012 Thin Solid Films 520 5421 Google Scholar
[14]	王璇, 郑富, 卢佳, 白建民, 王颖, 魏福林 2011 60 017505 Google Scholar Wang X, Zheng F, Lu J, Bai J M, Wang Y, Wei F L 2011 Acta. Phys. Sin. 60 017505 Google Scholar
[15]	Wang X, Zheng F, Liu Z Y, Liu X X, Wei D, Wei F L 2009 J. Appl. Phys. 105 07B714 Google Scholar
[16]	Wu Y P, Yang Y, Yang Z H, Ma F S, Zong B Y, Ding J 2014 J. Appl. Phys. 116 093905 Google Scholar
[17]	Xu F, Liao Z Q, Huang Q J, Ong C K, Li S D 2011 IEEE Trans. Magn. 47 3921 Google Scholar
[18]	Acosta A, Fitzell K, Schneider J D, Dong C Z, Yao Z, Wang Y E, Carman G P, Sun N X, Chang J P 2020 Appl. Phys. Lett. 116 222404 Google Scholar
[19]	Acosta A, Fitzell K, Schneider J D, Dong C Z, Yao Z, Sheil R, Wang Y E, Carman G P, Sun N X, Chang J P 2020 J. Appl. Phys. 128 013903 Google Scholar
[20]	Fu Y, Miyao T, Cao J W, Yang Z, Matsumoto M, Liu X X, Morisako A 2007 J. Magn. Magn. Mater. 308 165 Google Scholar
[21]	Li Y B, Li Z H, Liu X, Fu Y, Wei F L, Kamzin A S, Wei D 2010 J. Appl. Phys. 107 09A325 Google Scholar
[22]	Sun N X, Wang S X 2002 J. Appl. Phys. 92 1477 Google Scholar
[23]	Shimatsu T, Katada H, Watanabe I, Muraoka H, Nakamura Y 2003 IEEE Trans. Magn. 39 2365 Google Scholar
[24]	Langford J I, Wilson A J C 1978 J. Appl. Cryst. 11 102 Google Scholar
[25]	Scherrer P 1918 Nachr. Ges. Wiss. Göttingen 26 98
[26]	Herzer G 1990 IEEE Trans. Magn. 26 1397 Google Scholar
[27]	Jiang H, Chen Y J, Chen L F, Huai Y M 2002 J. Appl. Phys. 91 6821 Google Scholar
[28]	Inturi V R, Barnard J A 1996 J. Appl. Phys. 79 5904 Google Scholar
[29]	Liu X X, Kanda H, Morisako A 2011 J. Phys. Conf. Ser. 266 012037 Google Scholar
[30]	Jung H S, Doyle W D, Wittig J E, Al-Sharab J F, Bentley J 2002 Appl. Phys. Lett. 81 2415 Google Scholar
[31]	O'Grady K, Laidler H 1999 J. Magn. Magn. Mater. 200 616 Google Scholar
[32]	Wohlfarth E P 1958 J. Appl. Phys. 29 595 Google Scholar
[33]	Henkel O 1964 Phys. Stat. Sol. 7 919 Google Scholar
[34]	Gilbert T L 2004 IEEE Trans. Magn. 40 3443 Google Scholar
[35]	Ge S H, Yao D S, Yamaguchi M, Yang X L, Zuo H P, Ishii T, Zhou D, Li F 2007 J. Phys. D Appl. Phys. 40 3660 Google Scholar
[36]	Kuanr B K, Camley R E, Celinski Z 2005 J. Magn. Magn. Mater. 286 276 Google Scholar
[37]	Ben Youssef J, Vukadinovic N, Billet D, Labrune M 2004 Phys. Rev. B 69 174402 Google Scholar
[38]	Wu Y P, Han G C, Kong L B 2010 J. Magn. Magn. Mater. 322 3223 Google Scholar
[39]	Zhong X X, Soh W T, Phuoc N N, Liu Y, Ong C K 2015 J. Appl. Phys. 117 013906 Google Scholar
[40]	Fu Y, Cheng X F, Yang Z 2006 Phys. Stat. Sol. (a) 203 963 Google Scholar
[41]	Phuoca N N, Hungb L T, Ongb C K 2011 J. Alloy. Compd. 509 4010 Google Scholar

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Effects of underlayer on structures and magnetic properties of Fe₆₅Co₃₅ alloy films

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Corresponding author: Zheng Fu, zhengfu@nxu.edu.cn

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Effects of underlayer on structures and magnetic properties of Fe65Co35 alloy films

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Corresponding author: Zheng Fu, zhengfu@nxu.edu.cn

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Effects of underlayer on structures and magnetic properties of Fe₆₅Co₃₅ alloy films