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FeCoAlOC thin films with various C contents were fabricated by magnetron sputtering. The effect of C and Al2O3 addition on magnetic properties and frequency response of FeCo alloy films was studied. The microstructure of FeCo alloy films changed from polycrystalline to nano-crystalline, and became amorphous eventually with the increasing of content of AlO and C. It was found that the soft magnetic properties of FeCo alloy film was improved and resistivity increased from 87 μΩ·cm to 900 μΩ·cm because of C, Al-O addition. Frequency characteristics were improved: the cut-off frequency increased up to 2. 9 GHz, the permeability at low-frequency reached 400.
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Keywords:
- nanocrystalline /
- amorphous /
- soft magnetic film
[1] Kim C S, Bae S, Kim H J 2001 IEEE Trans. Magn. 37 2894
[2] Kim K H, Kim J Y, Kim H J 2002 IEEE Trans Magn 38 3162
[3] R M Bozorth 1993 Ferromagnetism (New York)
[4] Fu Y, Yang Z, Matsumoto M, Liu X X, Morisato A 2006 Chin. Phys. 15 1351
[5] Li Y B, Liu X, Li Z H, Fu Y, Kamzin A S, Wei F L, Yang Z 2009 Acta Phys. Sin. 58 7972(in Chinese)[李彦波、刘 曦、李正华、付 煜、Kamzin A S、魏福林、杨 正 2009 58 7972]
[6] Liu X, Miyao T, Morisako A 2006 IEEE Trans Magn. 42 2772
[7] Zhang S Y, Lu Q, Xue R H, Du Y W 1988 The fundamental of magnetic materials (Beijing: Science Press) p285 (in Chinese) [张世远、路 权、薛荣华、都有为1988磁性材料基础 (北京: 科学出版社) 第285页]
[8] Chikazumi S 1978 Physics of Magnetism Boca Raton
[9] G Herzer 1990 IEEE Trans. Magn. 26 1397
[10] Herzer G 1995 Soft magnetic nanocrystalline materials 33 1741
[11] Lffler J F, Braun H B, Wagner W, Kostorz G, Wiedenmann A 2001 Materials Science and Engineering 1050 304
[12] Wan D F, Ma X L 1999 Magnetic Physics(Chengdu: University of electronic science and technology Press) p449 (in Chinese) [宛德福、马兴隆1999 磁性物理学(成都: 电子科技大学出版社)第449页]
[13] T L Gilbert 2004 IEEE Trans. Magn. 40 3443
[14] Yan Liu, Z W Liu, C Y Tan, C K Ong 2006 J. Appl. Phy. 100 093912
[15] Tian M B 2006 Thin Film Technologies and Mterials (Beijing: Qinghua Press) (in Chinese) [田民波 2006 薄膜技术与薄膜材料 (北京:清华大学出版社)]
[16] Morikawa T, Suzuki M, Taga Y 1998 J. Appl. Phys. 83 6664
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[1] Kim C S, Bae S, Kim H J 2001 IEEE Trans. Magn. 37 2894
[2] Kim K H, Kim J Y, Kim H J 2002 IEEE Trans Magn 38 3162
[3] R M Bozorth 1993 Ferromagnetism (New York)
[4] Fu Y, Yang Z, Matsumoto M, Liu X X, Morisato A 2006 Chin. Phys. 15 1351
[5] Li Y B, Liu X, Li Z H, Fu Y, Kamzin A S, Wei F L, Yang Z 2009 Acta Phys. Sin. 58 7972(in Chinese)[李彦波、刘 曦、李正华、付 煜、Kamzin A S、魏福林、杨 正 2009 58 7972]
[6] Liu X, Miyao T, Morisako A 2006 IEEE Trans Magn. 42 2772
[7] Zhang S Y, Lu Q, Xue R H, Du Y W 1988 The fundamental of magnetic materials (Beijing: Science Press) p285 (in Chinese) [张世远、路 权、薛荣华、都有为1988磁性材料基础 (北京: 科学出版社) 第285页]
[8] Chikazumi S 1978 Physics of Magnetism Boca Raton
[9] G Herzer 1990 IEEE Trans. Magn. 26 1397
[10] Herzer G 1995 Soft magnetic nanocrystalline materials 33 1741
[11] Lffler J F, Braun H B, Wagner W, Kostorz G, Wiedenmann A 2001 Materials Science and Engineering 1050 304
[12] Wan D F, Ma X L 1999 Magnetic Physics(Chengdu: University of electronic science and technology Press) p449 (in Chinese) [宛德福、马兴隆1999 磁性物理学(成都: 电子科技大学出版社)第449页]
[13] T L Gilbert 2004 IEEE Trans. Magn. 40 3443
[14] Yan Liu, Z W Liu, C Y Tan, C K Ong 2006 J. Appl. Phy. 100 093912
[15] Tian M B 2006 Thin Film Technologies and Mterials (Beijing: Qinghua Press) (in Chinese) [田民波 2006 薄膜技术与薄膜材料 (北京:清华大学出版社)]
[16] Morikawa T, Suzuki M, Taga Y 1998 J. Appl. Phys. 83 6664
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