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INVESTIGATION OF GROWTH MECHANISM OF NANOCRYSTALLINE SILICON THIN FILMS PREPARED BY HOT-FILAMENT CHEMICAL VAPOR DEPOSITION

CHEN GUO GUO XIAO-XU ZHU MEI-FANG SUN JING-LAN XU HUAI-ZHE HAN YI-QIN

Citation:

INVESTIGATION OF GROWTH MECHANISM OF NANOCRYSTALLINE SILICON THIN FILMS PREPARED BY HOT-FILAMENT CHEMICAL VAPOR DEPOSITION

CHEN GUO, GUO XIAO-XU, ZHU MEI-FANG, SUN JING-LAN, XU HUAI-ZHE, HAN YI-QIN
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(PLEASE TRANSLATE TO ENGLISH

BY GOOGLE TRANSLATE IF NEEDED.)

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  • Abstract views:  7139
  • PDF Downloads:  706
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Publishing process
  • Received Date:  05 November 1996
  • Accepted Date:  28 March 1997
  • Published Online:  05 May 1997

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