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利用反应磁控溅射方法在单晶硅和高速钢(W18Cr4V)基片上制备出不同C含量Ti-B-C-N纳米复合薄膜. 使用X射线衍射和高分辨透射电子显微镜研究了Ti-B-C-N纳米复合薄膜的组织和微观结构,用纳米压痕仪测试了它们的硬度和弹性模量. 结果表明,利用往真空室通入C2H2气体的方法制备得到的Ti-B-C-N纳米复合薄膜中,在所研究成分范围内只发现TiN基的纳米晶. 当C2H2流量较小时,C元素的加入可以促进Ti-B-C
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关键词:
- Ti-B-C-N薄膜 /
- 磁控溅射 /
- 微观结构 /
- 力学性能
Ti-B-C-N nanocomposite coatings with different C quantities are deposited on Si(100) and high speed steel (W18Cr4V) substrates by the closed-field unbalanced reactive magnetron sputtering in the mixture of argon, nitrogen and acetylene gases. The microstructures of Ti-B-C-N nanocomposite coatings are characterized by X-ray diffraction and high-resolution transmission electron microscopy; while the nanohardness and elastic modulus values are measured by the nano-indention method. The results indicate that in the studied composition range, the deposited Ti-B-C-N nanocomposite coatings are found still only in the TiN base nanocrystalline. When the C2H2 flux is small, adding C can promote crystallization of Ti-B-C-N nanocomposite coatings, and the grain can be increased to improve the mechanical properties, when the grain size of about 6 nm (C2H2 flux rate 2 cm3/min), hardness, elastic modulus and fracture toughness of Ti-B-C-N nanocomposite coatings achieve the maximum, respectively, 35.7 GPa, 363.1 GPa and 2.46 MPa m1/2; the further increase of the C content of Ti-B-C-N nanocomposite coating can reduce mechanical properties of coating dramatically.-
Keywords:
- Ti-B-C-N films /
- magnetron sputtering /
- microstructure /
- mechanical properties
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[26] Li H K, Lin G Q, Dong C 2010 Acta Phys. Sin. 59 4301 (in Chinese) [李红凯、 林国强、 董 闯 2010 59 4301]
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[1] Xiao S R, Gao M Z, Deng X C 2008 Nonferr. Met. 60 48 (in Chinese) [肖寿仁、 高鸣智、 邓晓春 2008 有色金属 60 48]
[2] Zhang C H, Luo J B, Li W Z, Chen D R 2004 Acta Phys. Sin. 53 182 (in Chinese) [张晨辉、 雒建斌、 李文治、 陈大融 2004 53 182]
[3] [4] [5] Holzschuh H 2002 Int. J. Refract. Met. Hard Mater. 20 143
[6] Zhong D, Sutter E, Moore J J, Mustoe G G, Levashov E A, Disam J 2001 Thin Solid Films 398 320
[7] [8] Tsai P C, Chen W J, Chen J H, Chang C L 2009 Thin Solid Films 517 5044
[9] [10] Stuber M, Schier V, Holleck H 1995 Surf. Coat. Technol. 74 833
[11] [12] [13] Shimada S, Takahashi M, Tsujino J, Yamazaki I, Tsuda K 2007 Surf. Coat. Technol. 201 7194
[14] [15] Mollart T P, Haupt J, Gilmore R, Gissler W 1996 Surf. Coat. Technol. 86 231
[16] Vyas A, Lu Y H, Shen Y G 2010 Surf. Coat. Technol. 204 1528
[17] [18] [19] Musil J, Regent F 1998 J. Vac. Sci. Technol. A 16 3301
[20] [21] Luo Q H, Yu D L, Lu Y H, Lou Y Z, Wang Y B 2010 Chin. J. Vac. Sci. Technol. 30 138 (in Chinese) [罗庆洪、 于栋利、 陆永浩、 娄艳芝、 王燕斌 2010 真空科学与技术学报 30 138]
[22] [23] Wu X M, Wu Q C, Sui Y F 1992 Acta Phys. Sin. 41 1133 (in Chinese) [吴雪梅、 邬钦崇、 隋毅峰 1992 41 1133]
[24] [25] Fang Z B, Gong H X, Liu X Q, Xu D Y, Huang C M, Wang Y Y 2003 Acta Phys. Sin. 52 1749 (in Chinese) [方泽波、 龚恒翔、 刘雪芹、 徐大印、 黄春明、 王印月 2003 52 1749]
[26] Li H K, Lin G Q, Dong C 2010 Acta Phys. Sin. 59 4301 (in Chinese) [李红凯、 林国强、 董 闯 2010 59 4301]
[27] [28] [29] Yu L H, Dong S R, Xu J H, Li G Y 2008 Acta Phys. Sin. 57 7066 (in Chinese) [喻利花、 董师润、 许俊华、 李戈扬 2008 57 7066]
[30] [31] Ding W Y, Xu J, Lu W Q, Deng X L, Dong C 2008 Acta Phys. Sin. 57 5174 (in Chinese) [丁万昱、 徐 军、 陆文琪、 邓新绿、 董 闯 2008 57 5174]
[32] [33] Lawn B, Evans A, Marshall D 1980 J. Am. Ceram. Soc. 63 574
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