Based on the results of the previous paper [1], the dynamic aberration correetion in a combined scanning electron beam system is studied. The possibility of dynamic aberration correction by using electro-magnetic multipole fields is discussed. The formulas for calculating aberrations, caused by round and multipole correctors, are derived.Thus we show that in a combined scanning electron beam system most of the third order deflection aberrations may be eliminated by properly using a dynamic aberration correction system, consisting of round lens, deflector and quadrupole devices.
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