飞秒光纤激光相干合成技术最新进展

王井上; 张瑶; 王军利; 魏志义; 常国庆

doi:10.7498/aps.70.20201683

摘要

飞秒光纤激光器具有平均功率高、散热性能佳、光束质量好和空间体积小等优势, 在基础研究、工业加工、生物医疗等方面得到越来越广泛的应用. 相干合成技术能够有效克服光纤中有害的非线性效应和热效应的影响, 进一步提高飞秒光纤激光器输出的脉冲能量和平均功率. 本文介绍高功率飞秒光纤激光器相干合成的基本技术路线, 重点阐述相干合成技术中关于填充孔径相干合成与平铺孔径相干合成的最新研究进展, 并详细介绍相干合成技术中不同类型主动相位锁定技术的基本原理. 相信在不远的将来, 飞秒光纤激光相干合成系统的单脉冲能量和平均功率将不断攀升, 从而开创许多崭新的研究领域.

关键词:

Abstract

Widely employed in fundamental research, industrial processing, and biomedicine, femtosecond fiber lasers exhibit many attractive features such as high average power, good heat dissipation, excellent beam quality, and compact footprint. Coherent combining technology can effectively suppress the detrimental nonlinear and thermal effects in the fiber amplifiers, and therefore further increase the output pulse energy and average power of femtosecond fiber lasers. In this article, we mainly discuss different coherent combining techniques in high-power ultrafast Yb-fiber laser systems and the relevant phase-locking methods. We believe that the advent of new coherent combining techniques will further improve the average power and pulse energy of femtosecond fiber laser systems, thereby opening up some new research areas.

Keywords:

作者及机构信息

1.
中国科学院物理研究所, 光物理重点实验室, 北京　100190

2.
西安电子科技大学物理与光电工程学院, 西安　710071

通信作者: 常国庆, guoqing.chang@iphy.ac.cn

作者简介:

常国庆, 中国科学院物理研究所特聘研究员, 博士生导师. 在清华大学电子工程系先后获得学士和硕士学位. 2006年在美国密歇根大学电子工程系获得博士学位. 2007年在密歇根大学超快光科学中心从事博士后工作. 2008—2011年在麻省理工学院电子工程系先从事博士后工作, 后任研究员. 2012—2017年, 获聘Helmholtz研究员, 在德国自由电子激光科学中心创建超快激光与相干成像实验室, 担任实验室主任 (永久职位). 2017年加入中国科学院物理研究所. 现担任美国光学学会Optics Express编委、《光电产品与资讯》编委、中国激光杂志社青年编委、《光子学报》编委. 主要研究方向包括高功率高能量超快光纤激光技术、超快生物光子学、超快中红外激光技术等

基金项目: 广东省重点领域研发计划(批准号: 2018B090904003)、国家自然科学基金(批准号: 11774234, 91850209)和用于三维生物模型大深度和高精度成像的新型多光子显微镜研制项目(批准号: YJKYYQ20190034)资助的课题

Authors and contacts

1.
Key Laboratory of Optical Physics, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China

2.
School of Physics and Optoelectronic Engineering, Xidian University, Xi’an 710071, China

Corresponding author: Chang Guo-Qing, guoqing.chang@iphy.ac.cn

Funds: Project supported by the Key-Area R&D Program of Guangdong Province, China (Grant No. 2018B090904003), the National Natural Science Foundation of China (Grant Nos. 11774234, 91850209), and the Program of Development of a New Multiphoton Microscope for Large Depth and High Precision Imaging of Three-dimensional Biological Models, China (Grant No. YJKYYQ20190034).

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参考文献

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[2]	Leemans W, Chou W, Uesaka M 2011 ICFA Beam Dyn. Newsl. 56 10
[3]	Abhari R S, Rollinger B, Giovannini A Z, Morris O, Henderson I, Ellwi S S 2012 J. Micro/Nanolithogr. MEMS MOEMS 11 021114 Google Scholar
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[7]	Galvanauskas A, Fermann M, Harter D 1994 Opt. Lett. 19 1201 Google Scholar
[8]	Jauregui C, Stihler C, Limpert J 2020 Adv. Opt. Photonics 12 429 Google Scholar
[9]	Zervas M N 2019 Opt. Express 27 19019 Google Scholar
[10]	Stutzki F, Jansen F, Otto H J, Jauregui C, Limpert J, Tünnermann A 2014 Optica 1 233 Google Scholar
[11]	Eidam T, Rothhardt J, Stutzki F, Jansen F, Hädrich S, Carstens H, Jauregui C, Limpert J, Tünnermann A 2011 Opt. Express 19 255 Google Scholar
[12]	Wan P, Yang L M, Liu J 2013 Opt. Express 21 29854 Google Scholar
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[14]	王小林, 周朴, 粟荣涛, 马鹏飞, 陶汝茂, 马阎星, 许晓军, 刘泽金 2017 中国激光 44 0201001 Google Scholar Wang X L, Zhou P, Li R T, Ma P F, Tao R M, Ma Y X, Xu X J, Liu Z J 2017 Chin. J. Laser 44 0201001 Google Scholar
[15]	Mourou G A, Hulin D, Galvanauskas A 2006 AIP Conf. Proc. Varenna, Italy, September 19−24, 2005 pp152–163
[16]	Veldkamp W B, Leger J R, Swanson G J 1986 Opt. Lett. 11 303 Google Scholar
[17]	Hassan M T, Luu T T, Moulet A, Raskazovskaya O, Zhokhov P, Garg M, Karpowicz N, Zheltikov A, Pervak V, Krausz F 2016 Nature 530 66 Google Scholar
[18]	Mourou G, Brocklesby B, Tajima T, Limpert J 2013 Nat. Photonics 7 258 Google Scholar
[19]	Chang G, Wei Z 2020 Science 23 101101 Google Scholar
[20]	Stark H, Buldt J, Müller M, Klenke A, Tünnermann A, Limpert J 2019 Opt. Lett. 44 5529 Google Scholar
[21]	Müller M, Aleshire C, Klenke A, Haddad E, Légaré F, Tünnermann A, Limpert J 2020 Opt. Lett. 45 3083 Google Scholar
[22]	Hanna M, Guichard F, Zaouter Y, Papadopoulos D N, Druon F, Georges P 2016 J. Phys. B: At. Mol. Opt. Phys 49 062004 Google Scholar
[23]	Klenke A, Müller M, Stark H, Kienel M, Jauregui C, Tünnermann A, Limpert J 2018 IEEE J. Sel. Top. Quantum Electron. 24 1 Google Scholar
[24]	杨康文, 郝强, 曾和平 2018 红外与激光工程 47 103004 Google Scholar Yang K W, Hao Q, Zeng H P 2018 Infrared and Laser Engineering 47 103004 Google Scholar
[25]	王郁飞, 李雷, 赵鹭明 2018 红外与激光工程 47 803010 Google Scholar Wang Y F, Li L, Zhao L M 2018 Infrared and Laser Engineering 47 803010 Google Scholar
[26]	粟荣涛, 周朴, 张鹏飞, 王小林, 马阎星, 马鹏飞 2018 红外与激光工程 47 0103001 Google Scholar Su R T, Zhou P, Zhang P F, Wang X L, Ma Y X, Ma P F 2018 Infrared and Laser Engineering 47 0103001 Google Scholar
[27]	Liu Z, Jin X, Su R, Ma P, Zhou P 2019 Science China Information Sciences 62 41301 Google Scholar
[28]	Müller M, Klenke A, Steinkopff A, Stark H, Tünnermann A, Limpert J 2018 Opt. Lett. 43 6037 Google Scholar
[29]	Zhou S, Wise F W, Ouzounov D G 2007 Opt. Lett. 32 871 Google Scholar
[30]	Seise E, Klenke A, Limpert J, Tünnermann A 2010 Opt. Express 18 27827 Google Scholar
[31]	Klenke A, Seise E, Limpert J, Tünnermann A 2011 Opt. Express 19 25379 Google Scholar
[32]	Müller M, Kienel M, Klenke A, Gottschall T, Shestaev E, Plötner M, Limpert J, Tünnermann A 2016 Opt. Lett. 41 3439 Google Scholar
[33]	Müeller M, Klenke A, Stark H, Buldt J, Gottschall T, Tünnermann A, Limpert J 2018 Fiber Lasers XV: Technology and Systems San Francisco, California, United States, February, 26, 2018 p1051208
[34]	Kienel M, Müller M, Klenke A, Eidam T, Limpert J, Tünnermann A 2015 Opt. Lett. 40 522 Google Scholar
[35]	Kienel M, Müller M, Klenke A, Limpert J, Tünnermann A 2016 Opt. Lett. 41 3343 Google Scholar
[36]	Zhou T, Ruppe J, Zhu C, Hu I N, Nees J, Galvanauskas A 2015 Opt. Express 23 7442 Google Scholar
[37]	Breitkopf S, Wunderlich S, Eidam T, Shestaev E, Holzberger S, Gottschall T, Carstens H, Tünnermann A, Pupeza I, Limpert J 2016 Appl. Phys. B 122 297 Google Scholar
[38]	Astrauskas I, Kaksis E, Flöry T, Andriukaitis G, Pugžlys A, Baltuška A, Ruppe J, Chen S, Galvanauskas A, Balčiūnas T 2017 Opt. Lett. 42 2201 Google Scholar
[39]	Yang B, Liu G, Abulikemu A, Wang Y, Wang A, Zhang Z 2020 CLEO: Applications and Technology Washington DC, United States, May 10–15, 2020 pJW2F.28
[40]	Fang X H, Hu M L, Liu B W, Chai L, Wang C Y, Zheltikov A M 2010 Opt. Lett. 35 2326 Google Scholar
[41]	Klenke A, Müller M, Stark H, Stutzki F, Hupel C, Schreiber T, Tünnermann A, Limpert J 2018 Opt. Lett. 43 1519 Google Scholar
[42]	Aleshire C, Steinkopff A, Jauregui C, Klenke A, Tünnermann A, Limpert J 2020 Opt. Express 28 21035 Google Scholar
[43]	Heilmann A, Le Dortz J, Daniault L, Fsaifes I, Bellanger S, Bourderionnet J, Larat C, Lallier E, Antier M, Durand E 2018 Opt. Express 26 31542 Google Scholar
[44]	Brignon A 2013 Coherent Laser Beam Combining (New Jersey: John Wiley & Sons) pp130−132
[45]	Fsaifes I, Daniault L, Bellanger S, Veinhard M, Bourderionnet J, Larat C, Lallier E, Durand E, Brignon A, Chanteloup J C 2020 Opt. Express 28 20152 Google Scholar
[46]	Guichard F, Zaouter Y, Hanna M, Mai K L, Morin F, Hönninger C, Mottay E, Georges P 2015 Opt. Lett. 40 89 Google Scholar
[47]	Kienel M, Klenke A, Eidam T, Hädrich S, Limpert J, Tünnermann A 2014 Opt. Lett. 39 1049 Google Scholar
[48]	Augst S J, Fan T, Sanchez A 2004 Opt. Lett. 29 474 Google Scholar
[49]	Hansch T, Couillaud B 1980 Opt. Commun. 35 441 Google Scholar
[50]	Shay T M 2006 Opt. Express 14 12188 Google Scholar
[51]	Vorontsov M A, Carhart G W, Ricklin J C 1997 Opt. Lett. 22 907 Google Scholar
[52]	Tünnermann H, Shirakawa A 2019 Opt. Express 27 24223 Google Scholar
[53]	Groß P, Boller K J, Klein M E 2005 Phys. Rev. A 71 043824 Google Scholar
[54]	Ramirez L P, Hanna M, Bouwmans G, El Hamzaoui H, Bouazaoui M, Labat D, Delplace K, Pouysegur J, Guichard F, Rigaud P 2015 Opt. Express 23 5406 Google Scholar

施引文献

图 1 TMI示意图^[8]

Fig. 1. Schematic representation of TMI^[8].

下载: 全尺寸图片幻灯片

图 2 掺Yb光纤CPA系统的脉冲能量与平均功率的关系(三角形, 单路; 圆圈, 结合了分脉冲放大(DPA)和空间相干合成(CBC)的CPA系统; 虚线表示脉冲重频)^[19]

Fig. 2. Pulse energy as a function of average power for Yb-fiber CPA systems. Triangles, single emitters; circles, CPA systems incorporating divided pulse amplification (DPA) and coherent beam combining (CBC). Dashed lines mark the repetition rate^[19].

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图 3 (a)填充孔径相干合成; (b)平铺孔径相干合成

Fig. 3. (a) Filled aperture coherent combination; (b) tiled aperture coherent combination.

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图 4 (a), (b)空间上的分束与合成; (c), (d) 时间上的分束与合成

Fig. 4. (a), (b) Splitting and combining in space domain; (c), (d) splitting and combining in time domain.

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图 5 12路相干合成的装置图^[21]

Fig. 5. Setup of twelve channel coherent beam combination^[21].

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图 6 多维度相干合成实验装置图^[35]

Fig. 6. Experimental setup of multi-dimension coherent combination^[35].

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图 7 使用EOM的多维度相干合成实验装置图^[20]

Fig. 7. Experimental setup of multi-dimension coherent combination using EOM^[20].

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图 8 七芯光子晶体光纤横截面的扫描电子显微镜图像^[40]

Fig. 8. Scanning electron microscope images of a seven-core photonic crystal fiber cross section^[40].

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图 9 多芯光纤相干合成的实验装置图^[41]

Fig. 9. Setup of coherent combination in multi-core fiber^[41].

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图 10 三种简化的SMS设计变体(R₁, R₂, R₃表示多个输入光束之间共享的不同反射率镀膜区域; N₁, N₂, N₃表示每个镀膜区域共享的光束数目)^[42]

Fig. 10. Three simplified SMS design variants. R₁, R₂, R₃ indicate reflectivity of coating sections shared between multiple input beams. N₁, N₂, N₃ indicate the number of beams shared in each coating section^[42].

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图 11 CBC实验装置图^[43]

Fig. 11. Setup of CBC ^[43].

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图 12 采用 61根光纤合束的端面实物图^[45]

Fig. 12. Image of the end face of 61 fibers^[45].

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图 13 61根光纤相干合成实验装置图^[45]

Fig. 13. Setup of 61 fibers coherent combination^[45].

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图 14 HC装置示意图 ^[53]

Fig. 14. Setup of HC device^[53].

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表 1 不同合成方法的最佳参数与特点

Table 1. The best parameters and characteristics of different combining methods

技术名称	子类	截至目前最佳参数	特点
填充孔径	空间合成	P = 10.4 kW; E = 0.13 mJ; η = 96%^[21]	有效提高系统的平均功率
	时间合成	—	有效提高脉冲能量
	多维度相干合成	P = 674 W; E = 23 mJ; η = 71%^[20]	同时提高脉冲能量与平均功率
	多芯合成	P = 205 W; E = 20.5 μJ; η = 80%^[41]	减少空间体积, 简化实验装置
平铺孔径		P = 1.5 kW; E = 750 μJ; η = 48%^[45]	合成效率低, 但合成通道数潜力巨大

下载: 导出CSV

map

[1]	Esmiller B, Jacquelard C, Eckel H A, Wnuk E 2014 Appl. Opt. 53 I45 Google Scholar
[2]	Leemans W, Chou W, Uesaka M 2011 ICFA Beam Dyn. Newsl. 56 10
[3]	Abhari R S, Rollinger B, Giovannini A Z, Morris O, Henderson I, Ellwi S S 2012 J. Micro/Nanolithogr. MEMS MOEMS 11 021114 Google Scholar
[4]	Jauregui C, Limpert J, Tünnermann A 2013 Nat. Photonics 7 861 Google Scholar
[5]	Eidam T, Hanf S, Seise E, Andersen T V, Gabler T, Wirth C, Schreiber T, Limpert J, Tünnermann A 2010 Opt. Lett. 35 94 Google Scholar
[6]	Eidam T, Wirth C, Jauregui C, Stutzki F, Jansen F, Otto H J, Schmidt O, Schreiber T, Limpert J, Tünnermann A 2011 Opt. Express 19 13218 Google Scholar
[7]	Galvanauskas A, Fermann M, Harter D 1994 Opt. Lett. 19 1201 Google Scholar
[8]	Jauregui C, Stihler C, Limpert J 2020 Adv. Opt. Photonics 12 429 Google Scholar
[9]	Zervas M N 2019 Opt. Express 27 19019 Google Scholar
[10]	Stutzki F, Jansen F, Otto H J, Jauregui C, Limpert J, Tünnermann A 2014 Optica 1 233 Google Scholar
[11]	Eidam T, Rothhardt J, Stutzki F, Jansen F, Hädrich S, Carstens H, Jauregui C, Limpert J, Tünnermann A 2011 Opt. Express 19 255 Google Scholar
[12]	Wan P, Yang L M, Liu J 2013 Opt. Express 21 29854 Google Scholar
[13]	程勇, 刘洋, 许立新 2007 红外与激光工程 36 163 Google Scholar Cheng Y, Liu Y, Xu L X 2007 Infrared and Laser Engineering 36 163 Google Scholar
[14]	王小林, 周朴, 粟荣涛, 马鹏飞, 陶汝茂, 马阎星, 许晓军, 刘泽金 2017 中国激光 44 0201001 Google Scholar Wang X L, Zhou P, Li R T, Ma P F, Tao R M, Ma Y X, Xu X J, Liu Z J 2017 Chin. J. Laser 44 0201001 Google Scholar
[15]	Mourou G A, Hulin D, Galvanauskas A 2006 AIP Conf. Proc. Varenna, Italy, September 19−24, 2005 pp152–163
[16]	Veldkamp W B, Leger J R, Swanson G J 1986 Opt. Lett. 11 303 Google Scholar
[17]	Hassan M T, Luu T T, Moulet A, Raskazovskaya O, Zhokhov P, Garg M, Karpowicz N, Zheltikov A, Pervak V, Krausz F 2016 Nature 530 66 Google Scholar
[18]	Mourou G, Brocklesby B, Tajima T, Limpert J 2013 Nat. Photonics 7 258 Google Scholar
[19]	Chang G, Wei Z 2020 Science 23 101101 Google Scholar
[20]	Stark H, Buldt J, Müller M, Klenke A, Tünnermann A, Limpert J 2019 Opt. Lett. 44 5529 Google Scholar
[21]	Müller M, Aleshire C, Klenke A, Haddad E, Légaré F, Tünnermann A, Limpert J 2020 Opt. Lett. 45 3083 Google Scholar
[22]	Hanna M, Guichard F, Zaouter Y, Papadopoulos D N, Druon F, Georges P 2016 J. Phys. B: At. Mol. Opt. Phys 49 062004 Google Scholar
[23]	Klenke A, Müller M, Stark H, Kienel M, Jauregui C, Tünnermann A, Limpert J 2018 IEEE J. Sel. Top. Quantum Electron. 24 1 Google Scholar
[24]	杨康文, 郝强, 曾和平 2018 红外与激光工程 47 103004 Google Scholar Yang K W, Hao Q, Zeng H P 2018 Infrared and Laser Engineering 47 103004 Google Scholar
[25]	王郁飞, 李雷, 赵鹭明 2018 红外与激光工程 47 803010 Google Scholar Wang Y F, Li L, Zhao L M 2018 Infrared and Laser Engineering 47 803010 Google Scholar
[26]	粟荣涛, 周朴, 张鹏飞, 王小林, 马阎星, 马鹏飞 2018 红外与激光工程 47 0103001 Google Scholar Su R T, Zhou P, Zhang P F, Wang X L, Ma Y X, Ma P F 2018 Infrared and Laser Engineering 47 0103001 Google Scholar
[27]	Liu Z, Jin X, Su R, Ma P, Zhou P 2019 Science China Information Sciences 62 41301 Google Scholar
[28]	Müller M, Klenke A, Steinkopff A, Stark H, Tünnermann A, Limpert J 2018 Opt. Lett. 43 6037 Google Scholar
[29]	Zhou S, Wise F W, Ouzounov D G 2007 Opt. Lett. 32 871 Google Scholar
[30]	Seise E, Klenke A, Limpert J, Tünnermann A 2010 Opt. Express 18 27827 Google Scholar
[31]	Klenke A, Seise E, Limpert J, Tünnermann A 2011 Opt. Express 19 25379 Google Scholar
[32]	Müller M, Kienel M, Klenke A, Gottschall T, Shestaev E, Plötner M, Limpert J, Tünnermann A 2016 Opt. Lett. 41 3439 Google Scholar
[33]	Müeller M, Klenke A, Stark H, Buldt J, Gottschall T, Tünnermann A, Limpert J 2018 Fiber Lasers XV: Technology and Systems San Francisco, California, United States, February, 26, 2018 p1051208
[34]	Kienel M, Müller M, Klenke A, Eidam T, Limpert J, Tünnermann A 2015 Opt. Lett. 40 522 Google Scholar
[35]	Kienel M, Müller M, Klenke A, Limpert J, Tünnermann A 2016 Opt. Lett. 41 3343 Google Scholar
[36]	Zhou T, Ruppe J, Zhu C, Hu I N, Nees J, Galvanauskas A 2015 Opt. Express 23 7442 Google Scholar
[37]	Breitkopf S, Wunderlich S, Eidam T, Shestaev E, Holzberger S, Gottschall T, Carstens H, Tünnermann A, Pupeza I, Limpert J 2016 Appl. Phys. B 122 297 Google Scholar
[38]	Astrauskas I, Kaksis E, Flöry T, Andriukaitis G, Pugžlys A, Baltuška A, Ruppe J, Chen S, Galvanauskas A, Balčiūnas T 2017 Opt. Lett. 42 2201 Google Scholar
[39]	Yang B, Liu G, Abulikemu A, Wang Y, Wang A, Zhang Z 2020 CLEO: Applications and Technology Washington DC, United States, May 10–15, 2020 pJW2F.28
[40]	Fang X H, Hu M L, Liu B W, Chai L, Wang C Y, Zheltikov A M 2010 Opt. Lett. 35 2326 Google Scholar
[41]	Klenke A, Müller M, Stark H, Stutzki F, Hupel C, Schreiber T, Tünnermann A, Limpert J 2018 Opt. Lett. 43 1519 Google Scholar
[42]	Aleshire C, Steinkopff A, Jauregui C, Klenke A, Tünnermann A, Limpert J 2020 Opt. Express 28 21035 Google Scholar
[43]	Heilmann A, Le Dortz J, Daniault L, Fsaifes I, Bellanger S, Bourderionnet J, Larat C, Lallier E, Antier M, Durand E 2018 Opt. Express 26 31542 Google Scholar
[44]	Brignon A 2013 Coherent Laser Beam Combining (New Jersey: John Wiley & Sons) pp130−132
[45]	Fsaifes I, Daniault L, Bellanger S, Veinhard M, Bourderionnet J, Larat C, Lallier E, Durand E, Brignon A, Chanteloup J C 2020 Opt. Express 28 20152 Google Scholar
[46]	Guichard F, Zaouter Y, Hanna M, Mai K L, Morin F, Hönninger C, Mottay E, Georges P 2015 Opt. Lett. 40 89 Google Scholar
[47]	Kienel M, Klenke A, Eidam T, Hädrich S, Limpert J, Tünnermann A 2014 Opt. Lett. 39 1049 Google Scholar
[48]	Augst S J, Fan T, Sanchez A 2004 Opt. Lett. 29 474 Google Scholar
[49]	Hansch T, Couillaud B 1980 Opt. Commun. 35 441 Google Scholar
[50]	Shay T M 2006 Opt. Express 14 12188 Google Scholar
[51]	Vorontsov M A, Carhart G W, Ricklin J C 1997 Opt. Lett. 22 907 Google Scholar
[52]	Tünnermann H, Shirakawa A 2019 Opt. Express 27 24223 Google Scholar
[53]	Groß P, Boller K J, Klein M E 2005 Phys. Rev. A 71 043824 Google Scholar
[54]	Ramirez L P, Hanna M, Bouwmans G, El Hamzaoui H, Bouazaoui M, Labat D, Delplace K, Pouysegur J, Guichard F, Rigaud P 2015 Opt. Express 23 5406 Google Scholar

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