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本文研制了全三维粒子模拟/蒙特卡罗碰撞算法, 并采用该算法对国外研究较热的 Japan Atomic Energy Agency 10 Ampere (JAEA 10A) 离子源进行了全方位的数值诊断, 探索了电子能量沉积过程中电子的横向漂移和能量分布规律, 分析了离子源放电的主要物理参数对电子沉积的影响作用. 模拟及分析结果显示: 电子横向漂移 (-Y方向) 来源于过滤区的磁漂移, 增加过滤磁场, 导致磁漂移增大, 横向漂移加剧, 且电子的利用率增大; 提高放电室气压, 电子的碰撞更频繁, 进而加剧横向非均匀性, 也同时提高电子的利用率.This paper develops a full three-dimensional PIC/MCC algorithm, and uses it to conduct a full range of numerical diagnosis of the hot JAEA 10A ion source at home and abroad, explores lateral drift and energy distribution of electrons in the electron energy deposition process, analyzes the influence of the main physical parameters on the electronic deposition. Simulation and analysis results show that electronic horizontal shift (-Y direction) comes from the filtering zone of the magnetic drift. Increasing the filtering field, the magnetic drift increases, and lateral drift is aggravated, and the utilization of electronics increases; improving the discharge of chamber pressure, the electronic collision will be more frequent; thereby increasing lateral non-uniformity can improve the utilization of electronics.
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Keywords:
- Japan Atomic Energy Agency 10 Ampere multi-cusp negative hydrogen ion source /
- a full three-dimensional particle-in-cell/Monte Carlo collisions
[1] Yang C, Wu X B, Liu D G 2012 Chin. Phys. C 36 1013
[2] Terasaki R, Fujino I, Hatayama A, Mizuno T, Inoue T 2010 Rev. Sci. Instrum 81 02A703
[3] Yang C, Liu D G, Xia M Z, Wang H H, Wang X M, Liu L Q, Peng K 2012 Acta Phys. Sin. 61 185205 (in Chinese) [杨超, 刘大刚, 夏蒙重, 王辉辉, 王小敏, 刘腊群, 彭凯 2012 61 185205]
[4] Fujino I, Hatayama A, Takado N, Inoue T 2008 Rev. Sci. Instrum 79 02A510
[5] Yang C, Liu D G, Wang X M, Liu L Q, Wang X Q, Liu S G 2012 Acta Phys. Sin. 61 045204 (in Chinese) [杨超, 刘大刚, 王小敏, 刘腊群, 王学琼, 刘盛纲 2012 61 045204]
[6] Yang C 2012 Ph. D. Dissertation (Chengdu: University of Electronic Science and Technology of China) (in Chinese) [杨超 2012 博士学位论文 (成都: 电子科技大学)]
[7] Yang C, Wang H H, Chen Y, Xia M Z, Wang X M, Liu D G 2012 Chinese Journal of Computational Physics 29 734 [杨超, 王辉辉, 陈颖, 夏蒙重, 王小敏, 刘大刚 2012 计算物理 29 734]
[8] Terasaki R, Hatayama A, Shibata T, Inoue T 2011 Second International Symposium on Negative Ions, Beams and Sources (Japan: Takayama) p22
[9] Shibata T, Terasaki R, Kashiwagi M, Inoue T, Dairaku M, Taniguchi M, Tobari H, Watanabe K, Sakamoto K, Hatayama A 2013 Third International Symposium on Negative Ions, Beams and Sources (Finland: Jyväskylä) p177
[10] Takado N, Tobari H, Inoue T, Hanatani J, Hatayama A, Hanada M, Kashiwagi M 2008 J. Appl. Phys. 103 053302
[11] Zou G Q, Zhong G W, Lei G J, Jiang S F, Lu D L, Cao J Y, Liu H 2008 Chin. Phys. C 32 283
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[1] Yang C, Wu X B, Liu D G 2012 Chin. Phys. C 36 1013
[2] Terasaki R, Fujino I, Hatayama A, Mizuno T, Inoue T 2010 Rev. Sci. Instrum 81 02A703
[3] Yang C, Liu D G, Xia M Z, Wang H H, Wang X M, Liu L Q, Peng K 2012 Acta Phys. Sin. 61 185205 (in Chinese) [杨超, 刘大刚, 夏蒙重, 王辉辉, 王小敏, 刘腊群, 彭凯 2012 61 185205]
[4] Fujino I, Hatayama A, Takado N, Inoue T 2008 Rev. Sci. Instrum 79 02A510
[5] Yang C, Liu D G, Wang X M, Liu L Q, Wang X Q, Liu S G 2012 Acta Phys. Sin. 61 045204 (in Chinese) [杨超, 刘大刚, 王小敏, 刘腊群, 王学琼, 刘盛纲 2012 61 045204]
[6] Yang C 2012 Ph. D. Dissertation (Chengdu: University of Electronic Science and Technology of China) (in Chinese) [杨超 2012 博士学位论文 (成都: 电子科技大学)]
[7] Yang C, Wang H H, Chen Y, Xia M Z, Wang X M, Liu D G 2012 Chinese Journal of Computational Physics 29 734 [杨超, 王辉辉, 陈颖, 夏蒙重, 王小敏, 刘大刚 2012 计算物理 29 734]
[8] Terasaki R, Hatayama A, Shibata T, Inoue T 2011 Second International Symposium on Negative Ions, Beams and Sources (Japan: Takayama) p22
[9] Shibata T, Terasaki R, Kashiwagi M, Inoue T, Dairaku M, Taniguchi M, Tobari H, Watanabe K, Sakamoto K, Hatayama A 2013 Third International Symposium on Negative Ions, Beams and Sources (Finland: Jyväskylä) p177
[10] Takado N, Tobari H, Inoue T, Hanatani J, Hatayama A, Hanada M, Kashiwagi M 2008 J. Appl. Phys. 103 053302
[11] Zou G Q, Zhong G W, Lei G J, Jiang S F, Lu D L, Cao J Y, Liu H 2008 Chin. Phys. C 32 283
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