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ZnO/MgO multi-quantum wells with modulation structure are grown on oxidated Al2O3 （0001） substrates using radio-frequency reactive magnetron sputtering method. X-ray reflectivity and X-ray diffraction measurement，electronic probe，atom force microscopy，transmission spectrum and PL spectrum are used to characterize the samples. The XRD scan and phi-scan results show the films are highly （001） textured and have epitaxial relationship with the substrates. The width of quantum well is determined to be between 838 nm and 2178 nm by XRR and EPMA. The AFM results show that the RMS roughness of the MQWs increases from 64 nm to 212 nm with the decrease of period of modulation. Low temperature PL spectrum shows the peak can be assigned to the radiative recombination of bound excitons，and the activation energy is estimated to be about 30 meV. The emission due to spatially separated carriers caused by quantum-confined Stark effect is also found in the spectrum of sample with smaller well width.
[1] ［1］Tang Z K，Wong G K L，Yu P，Kawasaki M，Ohtomo A，Koinuma H，Segawa Y 1998 Appl. Phys. Lett. 72 3270
[2] ［2］Ohtomo A，Kawasaki M，Ohkubo I，Koinuma H，Yasuda T，Segawa Y 1999 Appl. Phys. Lett. 75 980
[3] ［3］Makino T，Chia C H，Tuan N T，Sun H D，Segawa Y，Kawasaki M，Ohtomo A，Tamura K，Koinuma H 2000 Appl. Phys. Lett. 77 975
[4] ［4］Chia C H，Makino T，Segawa Y，Kawasaki M，Ohtomo A，Tamura K，Koinuma H 2001 J. Appl. Phys. 90 3650
[5] ［5］Makino T，Tuan N T，Sun H D，Chia C H，Segawa Y，Kawasaki M，Ohtomo A，Tomura K，Suemoto T，Akiyama H，Baba M，Saito S，Tomita T，Koinuma H 2001 Appl. Phys. Lett. 78 1979
[6] ［6］Makino T，Tamura K，Chia C H，Segawa Y，Kawasaki M，Ohtomo A，Koinuma H 2002 Appl. Phys. Lett. 81 2355
[7] ［7］Zhu J J，Kuznetsov A Y，Han M S，Park Y S，Ahn H K，Ju J W，Lee I H 2007 Appl. Phy. Lett. 90 21909
[8] ［8］Gu X Q，Zhu L P，Ye Z Z，He H P，Zhang Y Z，Huang F，Qiu M X，Zeng Y J，Liu F，Jaeger W 2007 Appl. Phy. Lett. 91 022103
[9] ［9］Xin P，Sun C W，Qin F W，Wen S P，Zhang Q Y 2007 Acta Phys. Sin. 56 1082 （in Chinese）［辛萍、孙成伟、秦福文、文胜平、张庆瑜 2007 56 1082］
[10] ］Thompson A V，Boutwell C，Mares J W，Schoenfeld W V，Osinsky A，Hertog B，Xie J Q，Pearton S J，Norton D P 2007 Appl. Phy. Lett. 91 201921
[11] ］Liu M，Liu Z W，GU J F，Qin F W，Ma C Y，Zhang Q Y 2008 Acta Phys. Sin. 57 1133 （in Chinese）［刘明、刘志文、谷建峰、秦福文、马春雨、张庆瑜 2008 57 1133］
[12] ］Chen Y，Bagnall D M，Koh H，Park K，Hirage K，Zhu Z，Yao T 1998 J. Appl. Phys. 84 3912
[13] ］Yashar P C，Sproul W D 1999 Vacuum 55 179
[14] ］Leroux M，Grandjean N，Beaumont B，Nataf G，Semond F，Massies J，Gibart P 1999 J. Appl. Phys. 86 3721
[15] ］Meyer B K，Alves H，Hofmann D M，Kriegseis W，Forster D，Bertram F，Christen J，Hoffmann A，Straβburg M，Dworzak M，Haboeck U，Rodina A V 2004 Phys. Status. Solidi B 241 231
[16] ］Zhang B P，Liu B L，Yu J Z，Wang Q M，Liu C Y，Liu Y C，Segawa Y 2007 Appl. Phy. Lett. 90 132113
[17] ］Leroux M，Grandjean N，Massies J，Gil B，Lefebvre P，Bigenwald P 1999 Phys. Rev. B 60 1496
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[1] ［1］Tang Z K，Wong G K L，Yu P，Kawasaki M，Ohtomo A，Koinuma H，Segawa Y 1998 Appl. Phys. Lett. 72 3270
[2] ［2］Ohtomo A，Kawasaki M，Ohkubo I，Koinuma H，Yasuda T，Segawa Y 1999 Appl. Phys. Lett. 75 980
[3] ［3］Makino T，Chia C H，Tuan N T，Sun H D，Segawa Y，Kawasaki M，Ohtomo A，Tamura K，Koinuma H 2000 Appl. Phys. Lett. 77 975
[4] ［4］Chia C H，Makino T，Segawa Y，Kawasaki M，Ohtomo A，Tamura K，Koinuma H 2001 J. Appl. Phys. 90 3650
[5] ［5］Makino T，Tuan N T，Sun H D，Chia C H，Segawa Y，Kawasaki M，Ohtomo A，Tomura K，Suemoto T，Akiyama H，Baba M，Saito S，Tomita T，Koinuma H 2001 Appl. Phys. Lett. 78 1979
[6] ［6］Makino T，Tamura K，Chia C H，Segawa Y，Kawasaki M，Ohtomo A，Koinuma H 2002 Appl. Phys. Lett. 81 2355
[7] ［7］Zhu J J，Kuznetsov A Y，Han M S，Park Y S，Ahn H K，Ju J W，Lee I H 2007 Appl. Phy. Lett. 90 21909
[8] ［8］Gu X Q，Zhu L P，Ye Z Z，He H P，Zhang Y Z，Huang F，Qiu M X，Zeng Y J，Liu F，Jaeger W 2007 Appl. Phy. Lett. 91 022103
[9] ［9］Xin P，Sun C W，Qin F W，Wen S P，Zhang Q Y 2007 Acta Phys. Sin. 56 1082 （in Chinese）［辛萍、孙成伟、秦福文、文胜平、张庆瑜 2007 56 1082］
[10] ］Thompson A V，Boutwell C，Mares J W，Schoenfeld W V，Osinsky A，Hertog B，Xie J Q，Pearton S J，Norton D P 2007 Appl. Phy. Lett. 91 201921
[11] ］Liu M，Liu Z W，GU J F，Qin F W，Ma C Y，Zhang Q Y 2008 Acta Phys. Sin. 57 1133 （in Chinese）［刘明、刘志文、谷建峰、秦福文、马春雨、张庆瑜 2008 57 1133］
[12] ］Chen Y，Bagnall D M，Koh H，Park K，Hirage K，Zhu Z，Yao T 1998 J. Appl. Phys. 84 3912
[13] ］Yashar P C，Sproul W D 1999 Vacuum 55 179
[14] ］Leroux M，Grandjean N，Beaumont B，Nataf G，Semond F，Massies J，Gibart P 1999 J. Appl. Phys. 86 3721
[15] ］Meyer B K，Alves H，Hofmann D M，Kriegseis W，Forster D，Bertram F，Christen J，Hoffmann A，Straβburg M，Dworzak M，Haboeck U，Rodina A V 2004 Phys. Status. Solidi B 241 231
[16] ］Zhang B P，Liu B L，Yu J Z，Wang Q M，Liu C Y，Liu Y C，Segawa Y 2007 Appl. Phy. Lett. 90 132113
[17] ］Leroux M，Grandjean N，Massies J，Gil B，Lefebvre P，Bigenwald P 1999 Phys. Rev. B 60 1496
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