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为解决小孔点衍射干涉仪构建中, 显微物镜汇聚光斑与衍射小孔之间对准误差对波前误差、衍射强度、干涉条纹对比度产生影响, 而导致实际测量精度降低的问题, 本文提出一种衍射小孔可视对准方法, 借助电荷耦合器件和分光棱镜在小孔衍射前端搭建辅助对准光路, 通过对小孔衍射板反射图像进行采集及处理来监测小孔对准状态并计算对准误差. 文中设计了可视精密对准光路方案, 仿真分析了平移、倾斜以及离焦三种典型对准偏差下对准图像的视觉表现, 构建了对准图像与对准误差之间物像关系数学模型, 研究了对准图像处理算法. 经原理性验证实验表明, 本文所提辅助光路对准方法和对准图像处理算法可行, 对准精度可达到0.05 μm. 研究成果有利于提高点衍射干涉仪的对准效率和精度, 可为实用点衍射干涉仪开发奠定一定的技术基础.In the construction of the pinhole point diffraction interferometer, the alignment error between the convergent spot of the microscopic objective lens and the diffraction hole in the front end of the pinhole diffraction will lead to problems such as diffraction wavefront error, diffraction intensity reduction, and interference fringe contrast reduction, which will affect the actual measurement accuracy. In order to solve the problem of inaccurate alignment between the convergent spot of the microscopic objective lens and the diffraction hole, a diffraction hole visual alignment method based on the auxiliary optical path is proposed in this work. An auxiliary alignment optical path is built at the front end of the pinhole diffraction, and the beam reflected by the pinhole diffraction plate is mainly reflected by the beam splitter prism, and then received by a charge coupled device (CCD). By collecting and processing the spot image reflected by the small hole diffraction plate, the alignment state of the small hole is monitored and the alignment error is calculated. In this work, a visual-precision optical path alignment scheme is designed, and the visual performance of the alignment image under three typical alignment deviations of translation, tilt and defocus is simulated and analyzed. The mathematical model of the object-image relationship between the alignment image and the alignment error is constructed, and the alignment image error measurement and processing algorithm is studied. The experimental results show that the auxiliary optical path alignment method and the alignment image processing algorithm proposed in this work are feasible, and the alignment accuracy can reach 0.05 μm. The research results are helpful in improving the alignment efficiency and accuracy of point diffraction interferometer, and can lay a certain technical foundation for the development of practical point diffraction interferometer.
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Keywords:
- point diffraction interferometer /
- diffraction pinhole /
- visual alignment /
- alignment error
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图 1 辅助对准光路原理示意图
Fig. 1. Schematic diagram of the principle of auxiliary alignment optical path.
图 2 不同对准状态示意图 (a)完全对准; (b)离焦; (c)平移; (d)倾斜
Fig. 2. Schematic diagram of different alignment states: (a) Fully aligned; (b) defocused; (c) translation; (d) inclination.
图 3 不同对准状态下的可视图像示意图 (a)完全对准; (b)离焦; (c)平移; (d)倾斜
Fig. 3. Visual images in different alignment states: (a) Fully aligned; (b) defocus; (c) translation; (d) inclination.
图 5 不同偏离情况下的仿真图像 (a)同心; (b)右偏; (c)左偏
Fig. 5. Simulation images under different deviations: (a) Concentric; (b) right-deviated; (c) left-deviated.
图 6 对准图像中心提取结果 (a)同心; (b)右偏; (c)左偏
Fig. 6. Center extraction results of alignment image: (a) Concentric; (b) right-deviated; (c) left-deviated.
表 2 仿真图像中心提取像素坐标
Table 2. Pixel coordinates extracted from the center of the simulation image.
下载: 导出CSV
表 4 实验图像中心点相机靶面坐标
Table 4. Experimental image center point camera target surface coordinates.
下载: 导出CSV
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