高温压电材料、器件与应用

吴金根; 高翔宇; 陈建国; 王春明; 张树君; 董蜀湘

doi:10.7498/aps.67.20181091

摘要

作为重要的功能材料，压电材料已经在国民经济的多个领域里有着重要应用.随着现代工业的快速发展，特别是新能源、交通和国防工业的高速发展，功能材料的应用已经从常规使用转向极端环境下的服役.本文综述了具有高居里点的压电材料，包括钙钛矿型压电陶瓷、铋层状结构氧化物压电陶瓷、钨青铜结构压电陶瓷以及非铁电压电单晶等；介绍了其晶体结构特征和高温压电性能、最新研究进展，并列举了一系列的高温压电器件和应用，包括高温压电探测器、传感器、换能器和驱动器等.另外，本文总结了高温压电材料的热点研究问题，并展望了今后的发展方向.

关键词:

Abstract

Piezoelectric functional materials have been extensively studied and employed in numerous devices. With the rapid development of modern industries, such as power plants, aerospace, automotive, renewable energy and material processing industries, the high temperature piezoelectric materials that can work in extreme environments are in great demand. Piezoelectric materials including piezoelectric single crystals, ceramics and films, are at the heart of electromechanical actuation and sensing devices. A variety of applications where piezoelectric actuators and sensors operate at elevated temperatures (T 200℃) would be extremely desired. The actuators need to work efficiently with high strokes, torques, and forces while operating under relatively harsh conditions. These include high-temperature fans and turbines, motors for valves or natural gas industries, kiln automation, and actuators for automotive engines such as fuel injectors and cooling system elements. Yet, the majority of industrial actuator applications are at or below the 250℃ temperature limit. In addition to the increase in operational temperatures of piezoelectric motors and actuators, a future area of interest is high-temperature MEMS research, which can be used for high-temperature valving. On the other hand, the piezoelectric sensors have been widely used for structural health monitoring applications. This is due to their wide bandwidth, versatility, simplicity, high rigidity, high stability, high reproducibility, fast response time, wide operating temperature range, insensitivity to electric and magnetic fields, the capacity for miniaturization and minimal dependence on moving parts and low power consumption, and wide piezoelectric materials and mechanisms selections, which will greatly benefit the sensing applications. In addition to the temperature usage range, the piezoelectric sensors must withstand the harsh environments encountered in space, engine, power plants, and also need to possess high sensitivity, resistivity, reliability, stability and robustness. In order to use the piezoelectric materials for a specific high temperature application, many aspects need to be considered together with piezoelectric properties, such as phase transition, thermal aging, thermal expansion, chemical stability, electrical resistivity, and the stability of properties at elevated temperature. In this paper, ferroelectric materials with high Curie point, including perovskite-type ferroelectrics, bismuth layer structured ferroelectrics, tungsten-bronze structured ferroelectrics, together with non-ferroelectric piezoelectric single crystals, are surveyed. The crystal structure characteristics, high temperature piezoelectric properties, and recent research progress are discussed. A series of high temperature piezoelectric devices and their applications are reviewed, including high temperature piezoelectric detectors, sensors, transducers, actuators, etc. Finally, recent important research topics, the future development of high temperature piezoelectric materials and the potential new applications are summarized.

Keywords:

high temperature piezoelectric materials /
extreme environments /
piezoelectric detect /
sensors

作者及机构信息

1.
北京大学工学院材料科学与工程系, 北京 100871;

2.
北京大学, 磁电功能材料与器件北京市重点实验室, 北京 100871;

3.
上海大学材料学院, 上海 200444;

4.
山东大学物理学院, 晶体材料国家重点实验室, 济南 250100;

5.
伍伦贡大学, 澳大利亚先进材料研究所, 伍伦贡, NSW 2500, 澳大利亚;

6.
西安交通大学电子与信息工程学院, 电子陶瓷与器件教育部重点实验室与国际电介质研究中心, 西安 710049

通信作者: 陈建国, kpfocus@shu.edu.cn;wangcm@sdu.edu.cn;shujun@uow.edu.au;sxdong@pku.edu.cn ; 王春明, kpfocus@shu.edu.cn;wangcm@sdu.edu.cn;shujun@uow.edu.au;sxdong@pku.edu.cn ; 张树君, kpfocus@shu.edu.cn;wangcm@sdu.edu.cn;shujun@uow.edu.au;sxdong@pku.edu.cn ; 董蜀湘, kpfocus@shu.edu.cn;wangcm@sdu.edu.cn;shujun@uow.edu.au;sxdong@pku.edu.cn

基金项目: 国家自然科学基金（批准号：51772005，51072003，51872166，51872180）、上海市自然科学基金（批准号：18ZR1414800）、山东大学基本科研业务费（批准号：2016JC036，2017JC032）和磁电功能材料与器件北京市重点实验室资助的课题.

Authors and contacts

1.
Department of Materials Science and Engineering, College of Engineering, Peking University, Beijing 100871, China;

2.
Beijing Key Laboratory of Magneto-Electrical Functional Materials and Devices, Peking University, Beijing 100817, China;

3.
College of Materials, Shanghai University, Shanghai 200444, China;

4.
School of Physics, State Key Laboratory of Crystal Materials, Shandong University, Ji'nan 250100, China;

5.
Australian Institute of Advanced Materials, Wollongong University, Wollongong, NSW 2500, Australia;

6.
Electronic Materials Research Laboratory, Key Laboratory of the Ministry of Education and International Center for Dielectric Research, School of Electronic and Information Engineering, Xi'an Jiaotong University, Xi'an 710049, China

Corresponding author: Chen Jianguo, kpfocus@shu.edu.cn;wangcm@sdu.edu.cn;shujun@uow.edu.au;sxdong@pku.edu.cn ; Wang Chun-Ming, kpfocus@shu.edu.cn;wangcm@sdu.edu.cn;shujun@uow.edu.au;sxdong@pku.edu.cn ; Zhang Shujun, kpfocus@shu.edu.cn;wangcm@sdu.edu.cn;shujun@uow.edu.au;sxdong@pku.edu.cn ; Dong Shuxiang, kpfocus@shu.edu.cn;wangcm@sdu.edu.cn;shujun@uow.edu.au;sxdong@pku.edu.cn

Funds: Project supported by the National Natural Science Foundation of China (Grant Nos. 51772005, 51072003, 51872166, 51872180), the Natural Science Foundation of Shanghai, China (Grant No. 18ZR1414800), the Fundamental Research Fund for Shandong University, China (Grant Nos. 2016JC036, 2017JC032), and the Beijing Key Laboratory for Magnetoelectric Materials and Devices.

参考文献

[1]	Curie J, Curie P 1880 Bull. Soc. Min. France 3 90
[2]	Yun C, Ishii T, Nakamura K, Ueha S, Akashi K 2001 J. J. Appl. Phys. 40 3773
[3]	Cady W G 2018 Piezoelectricity: Volume Two (New York: Courier Dover Publications) pp667-731
[4]	Wang C L, Li J C, Zhao M L 2009 Piezoelectric Ferroelectric Physics (Beijing: Science Press) p73 (in Chinese)[王春雷, 李吉超, 赵明磊 2009 压电铁电物理(北京:科学出版社) 第73页]
[5]	Zhang F X, Wang L K 2001 Modern Piezoelectric Research (Vol. 2) (Beijing: Science Press) p3 (in Chinese)[张福学, 王丽坤 2001 现代压电学(中册)(北京:科学出版社) 第3页]
[6]	Zhang F X 1987 Applications of Piezoelectrics and Ferroelectrics (Beijing: National Defense Industry Press) p1 (in Chinese)[张福学 1987 压电铁电应用(北京: 国防工业出版社) 第1页]
[7]	Nan C W, Bichurin M I, Dong S X, Viehland D, Srinivasan G 2008 J. Appl. Phys. 103 31101
[8]	Uchino K 2010 Advanced Piezoelectric Materials: Science and Technology (Cambridge: Woodhead Publishing Ltd) p5
[9]	Jaffe B (translated by Lin S H) 1979 Piezoelectric Ceramics (Version 1) (Beijing: Science Press) p1 (in Chinese)[贾菲B 著 (林声和译) 1979 压电陶瓷(第一版)(北京: 科学出版社) 第1页]
[10]	Kumar A, Bhanu Prasad V, James Raju K C, James A R 2015 J. Mater. Sci.: Mater. El. 26 3757
[11]	Ye Z G, Noheda B, Dong M 2001 Phys. Rev. B 64 184114
[12]	Noheda B, Cox D, Shirane G, Park S, Cross L, Zhong Z 2001 Phys. Rev. Lett. 86 3891
[13]	Liu J K 2012 Piezoelectric and Optics 34 1 (in Chinese)[刘军凯 2012 压电与声光 34 1]
[14]	Shi W, Ran Y Z, Zuo J H, Wang Q, Tao T, Ouyang K 2011 Journal of Tongren University 13 5 (in Chinese)[石维, 冉耀宗, 左江红, 王强, 陶涛, 欧永康 2011 铜仁学院学报 13 5]
[15]	Ouyang Y, Li L C, Xu Y S, Gan J R 1999 Automobile Electronics 4 5 (in Chinese)[欧阳烨, 李凌川, 徐元森, 甘俊仁 1999 汽车电器 4 5]
[16]	Luan G D, Zhang J D, Wang R Q 2005 Piezoelectric Transducer and Transducer Array (Beijing: Peking University Press) p80 (in Chinese)[栾桂冬, 张金铎, 王仁乾 2005 压电换能器和换能器阵(北京:北京大学出版社) 第80页]
[17]	Egerton L, Dillon D M 1959 J. Am. Ceram. Soc. 42 438
[18]	Jaffe B, Cook W R, Jaffe H 1971 Piezoelectric Ceramics (New York: Academic Press) p247
[19]	Saito Y, Takao H, Tani T, Nonoyama T, Takatori K, Homma T, Nagaya T, Nakamura M 2004 Nature 432 84
[20]	Guo Y, Kakimoto K, Ohsato H 2004 Appl. Phys. Lett. 85 4121
[21]	Guo Y, Kakimoto K, Ohsato H 2005 Mater. Lett. 59 242
[22]	Zang G Z, Wang J F, Chen H C 2006 Appl. Phys. Lett. 88 212908
[23]	Wu J, Wang Y, Xiao D 2007 Appl. Phys. Lett. 91 132914
[24]	Zhang S, Xia R, Hao H, Liu H, Shrout T R 2008 Appl. Phys. Lett. 92 152904
[25]	Zuo R, Fu J 2011 J. Am. Ceram. Soc. 94 1467
[26]	Zhang B, Wu J, Cheng X 2013 ACS Appl. Mater. Interfaces 5 7718
[27]	Cheng X, Wu J, Wang X 2013 Appl. Phys. Lett. 103 52906
[28]	Wang X, Wu J, Xiao D 2014 J. Am. Ceram. Soc. 136 2905
[29]	Wu J, Wang X, Cheng X 2014 J. Appl. Phys. 115 114104
[30]	Fernando R M, Rigoberto L J 2015 ACS Appl. Mater. Interfaces 7 23080
[31]	Wang K, Yao F Z, Jo W, Gobeljic D, Shvartsman V V, Lupascu D C, Li J F, Rdel J 2013 Adv. Funct. Mater. 23 4079
[32]	Yao F Z, Wang K, Jo W, Webber K G, Comyn T P, Ding J X, Xu B, Cheng L Q, Zheng M P, Hou Y D, Li J F 2016 Adv. Funct. Mater. 26 1217
[33]	Zhang M H, Wang K, Du Y J, Dai G, Sun W, Li G, Hu D, Thong H C, Zhao C, Xi X Q, Yue Z X, Li J F 2017 J. Am. Chem. Soc. 139 3889
[34]	Li P, Zhai J, Shen B 2018 Adv. Mater. 30 1705171
[35]	Eitel R E, Randall C A, Shrout T R, Rehrig P W, Hackenberger W, Park S E 2001 Jpn. J. Appl. Phys. 40 5999
[36]	Goldschmidt V M, Krystallochemie D G D 1926 Science of Nature 14 477
[37]	Eitel R E, Randall C A, Shrout T R, Park S E 2002 Jpn. J. Appl. Phys. 41 2099
[38]	Iniguez J, Vanderbilt D, Bellaniche L 2003 Phys. Rev. B 67 224107
[39]	Zhang S, Randall C A, Shrout T R 2003 Appl. Phys. Lett. 83 3150
[40]	Zhang S, Eitel R E, Randall C A, Shrout T R 2005 Appl. Phys. Lett. 86 262904
[41]	Chen S, Dong X, Mao C, Cao F 2006 J. Am. Ceram. Soc. 89 3270
[42]	Zou T T, Wang X H, Wang H, Zhong C F, Li L T, Chen I W 2008 Appl. Phys. Lett. 93 192913
[43]	Wang Y, Cai K, Shao T, Zhao Q, Guo D 2015 J. Appl. Phys. 117 164102
[44]	Chen J, Hu Z, Shi H, Li M, Dong S 2012 J. Phys. D: Appl. Phys. 45 465303
[45]	Zhang S, Yu Y, Wu J, Gao X, Huang C, Dong S 2018 J. Alloy. Compd. 731 1140
[46]	Aurivillius B 1949 Ark. Kemi 1 463
[47]	Subbarao E C 1962 J. Phys. Chem. Solids 23 665
[48]	Subbarao E C 1962 J. Am. Ceram. Soc. 45 166
[49]	Takenaka T, Sakata K 1980 Jpn. J. Appl. Phys. 19 31
[50]	Takenaka T, Sakata K 1984 J. Appl. Phys. 55 1092
[51]	Rae A D, Thompson J G, Withers R L 1991 Acta Cryst. B 47 870
[52]	Rae A D, Thompson J G, Withers R L, Willis A C 1990 Acta Cryst. B 46 474
[53]	Withers R L, Thompson J G, Rae A D 1991 J. Solid State Chem. 94 404
[54]	Wang C M, Zhao L, Wang J F, Zhang S J, Shrout T R 2009 Phys. Stat. Sol. (RRL) 3 7
[55]	Ismunandar, Kennedy B J 1999 J. Mater. Chem. 9 541
[56]	Macquart R, Kennedy B J, Kubota Y, Nishibori E, Takata M 2000 Ferroelectrics 248 27
[57]	Hervoches C H, Snedden A, Riggs R, Kilcoyne S H, Manuel P, Lightfoot P 2002 J. Solid State Chem. 164 280
[58]	Borg S, Svensson G 2001 J. Solid State Chem. 157 160
[59]	Ismunandar, Kamiyama T, Hoshikawa A, Zhou Q, Kennedy B J, Kubota Y, Kato K 2004 J. Solid State Chem. 177 4188
[60]	de Araujo C A P, Cuchiaro J D, McMillan L D, Scott M C, Scott J F 1995 Nature 374 627
[61]	Auciello O, Foster C M, Ramesh R 1998 Annu. Rev. Mater. Sci. 28 501
[62]	Auciello O, Scott J F, Ramesh R 1998 Phys. Today 51 22
[63]	Du X, Chen I W 1998 J. Am. Ceram. Soc. 81 3253
[64]	Du X, Chen I W 1998 J. Am. Ceram. Soc. 81 3260
[65]	Du X, Chen I W 1998 J. Am. Ceram. Soc. 81 3265
[66]	Ganpule C S, Stanishevsky A, Aggarwal S, Melngailis J, Williams E, Ramesh R, Joshi V, de Araujo C P 1999 Appl. Phys. Lett. 75 3874
[67]	Chon U, Kim K B, Jang H M, Yi G C 2001 Appl. Phys. Lett. 79 3137
[68]	Ding Y, Liu J S, Qin H X, Zhu J S, Wang Y N 2001 Appl. Phys. Lett. 78 4175
[69]	Kimura M, Sawada T, Ando A, Sakabe Y 1999 Jpn. J. Appl. Phys. 38 5557
[70]	Takeuchi T, Tani T, Saito Y 1999 Jpn. J. Appl. Phys. 38 5553
[71]	Hong S H, Trolier McKinstry S, Messing G L 2000 J. Am. Ceram. Soc. 83 113
[72]	Pardo L, Castro A, Millan P, Alemany C, Jimenez R, Jimenez B 2000 Acta Mater. 48 2421
[73]	Yan H, Li C G, Zhou J G, Zhu W M, He L X, Song Y X 2000 Jpn. J. Appl. Phys. 39 6339
[74]	Mao X, Wang W, Chen X, Lu Y 2009 Appl. Phys. Lett. 95 082901
[75]	Bai W, Gao Y Q, Zhu J Y, Meng X J, Lin T, Yang J, Zhu Z Q, Chu J H 2011 J. Appl. Phys. 109 064901
[76]	Wu F, Chen Z, Chen Y B, Zhang S, Zhou J, Zhu Y, Chen Y 2011 Appl. Phys. Lett. 98 212501
[77]	Birenbaum A Y, Ederer C 2014 Phys. Rev. B 90 214109
[78]	Zhao H, Kimura H, Cheng Z, Osada M, Wang J, Wang X, Dou S, Liu Y, Yu J, Matsumoto T, Tohei T, Shibata N, Ikuhara Y 2014 Sci. Rep. 4 5255
[79]	Wang C M, Wang J F 2006 Appl. Phys. Lett. 89 202905
[80]	Wang C M, Wang J F, Zhang S J, Shrout T R 2009 J. Appl. Phys. 105 094110
[81]	Wang Q, Wang C M, Wang J F, Zhang S 2016 Ceram. Int. 42 6993
[82]	Wang C M, Zhang S J, Wang J F, Zhao M L, Wang C L 2009 Mater. Chem. Phys. 118 21
[83]	Sun L, Feng C, Chen L, Huang S 2007 J. Am. Ceram. Soc. 90 3875
[84]	Zhang H, Yan H, Reece M J 2010 J. Appl. Phys. 108 014109
[85]	Jiang X P, Yang Q, Zhou S L, Chen C, Chen Y, Tu N, Yu Z D 2011 J. Am. Ceram. Soc. 94 1109
[86]	Chen Y, Liang D, Wang Q, Zhu J 2014 J. Appl. Phys. 116 074108
[87]	Wang Q, Liang Y, Wang C M, Wang C L, Zhao M L 2015 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA) Jinan, October 30-November 2, 2015 p70
[88]	Zhao T L, Wang C M, Wang C L, Wang Y M, Dong S 2015 Mat. Sci. Eng. B 201 51
[89]	Cao Z P, Wang C M, Zhao T L, Yu S L, Wu H Z, Wang Y M, Wang Q, Liang Y, Wei Y N, Zhang Y, Liu Y, Tang X S 2015 Ceram. Int. 41 13974
[90]	Fang P, Fan H, Xi Z, Chen W 2012 Solid State Commun. 152 979
[91]	Wang C M, Zhao L, Liu Y, Withers R L, Zhang S, Wang Q 2016 Ceram. Int. 42 4268
[92]	Wang C M, Wang J F 2008 J. Am. Ceram. Soc. 91 918
[93]	Wang C M, Wang J F, Zhang S J, Shrout T R 2009 Phys. Stat. Sol. (RRL) 3 49
[94]	Cai K, Huang C, Guo D 2017 J. Phys. D: Appl. Phys. 50 155302
[95]	Shen Z Y, Luo W Q, Tang Y, Zhang S, Li Y 2016 Ceram. Int. 42 7868
[96]	Wang Q, Cao Z P, Wang C M, Fu Q W, Yin D F, Tian H H 2016 J. Alloys Compd. 674 37
[97]	Cao Z P, Wang C M, Lau K, Wang Q, Fu Q W, Tian H H, Yin D F 2016 Ceram. Int. 42 11619
[98]	Guo Z L, Wang C M, Zhao T L, Yu S L, Cao Z P 2013 Mater. Chem. Phys. 140 260
[99]	Magneli A 1949 Arkiv for Kemi 1 213
[100]	Jamieson P B, Abrahams S C, Bernstein J L 1969 J. Chem. Phys. 50 4352
[101]	Hussain A, Gruehn R, Ruseher C H 1979 J. Alloys Compd. 246 51
[102]	Skokan M R, Moulton W G, Morris R C 1978 B. Am. Phys. Soc. 23 231
[103]	Franeombe M H 1960 Acta Crystallogr. 13 131
[104]	Sleight A W 1966 Acta Chem. Scand. 20 1102
[105]	Stennett M C, Reaney I M, Miles G C, Woodward D I, West A R, Kirk C A, Levin I 2007 J. Appl. Phys. 101 104114
[106]	Chen X M, Yuan Y, Sun Y H 2005 J. Appl. Phys. 97 074108
[107]	Zhu X L, Wu S Y, Chen X M 2007 Appl. Phy. Lett. 91 162906
[108]	Bai Y 2011 M. S. Thesis (Hangzhou: Zhejiang University) (in Chinese)[白阳 2011 硕士学位论文(杭州: 浙江大学)]
[109]	Tizeff. https://upload.wikimedia.org/wikipedia/commons/thumb/a/a3/PbNb2O6.png/116px-PbNb2O6.png[2018-09-16]
[110]	Li M Y, Cheng L, Gu X Y, Zhang Y P, Liao R H 2006 Journal of Ceramics 27 3 (in Chinese)[李明月, 程亮, 顾幸勇, 张玉平, 廖润华 2006 陶瓷学报 27 3]
[111]	Cai K, Jiang F, Deng P, Ma J, Guo D 2015 J. Am. Ceram. Soc. 98 3165
[112]	Luan G D, Zhang J D, Wang R Q 2005 Piezoelectric Transducer and Transducer Array (Beijing: Peking University Press) p93 (in Chinese)[栾桂冬, 张金铎, 王仁乾 2005 压电换能器和换能器阵(北京: 北京大学出版社) 第93页]
[113]	Kenji U 2010 Ferroelectric Devices (New York: Taylor Francis Group CRC Press) p171
[114]	Zhang P L, Zhong W L 1996 Piezoelectric Materials and Device Physics (Jinan: Shandong Science Technology Press) p113 (in Chinese)[张沛霖, 钟维烈 1996 压电材料与器件物理 (济南: 山东科学技术出版社) 第113页]
[115]	Qin Z K 1980 Piezoelectric Quartz Crystal (Beijing: National Defense Industry Press) p100 (in Chinese)[秦自楷1980 压电石英晶体(北京: 国防工业出版社) 第100页]
[116]	Shekhar P C, Schreuer J 2012 J. Appl. Phys. 111 13516
[117]	Smith R T 2003 J. Appl. Phys. 42 2219
[118]	Krempl P, Schleinzer G, Wallno Fer W 1997 Sensors Actuators A: Physical 61 361
[119]	Sotnikov A V, Schmidt H, Weihnacht M, Smirnova E P, Chemekova T Y, Makarov Y N 2010 IEEE Trans. Ultrason. Ferroelectr. Freq. Control 57 808
[120]	Riekkinen T, Nurmela A, Molarius J 2009 Thin Solid Films 517 6588
[121]	Bohm J, Chilla E, Flannery C, Frohlich H J, Hauke T, Heimann R B, Hengst M, Straube U 2000 J. Cryst. Growth 216 293
[122]	Yu F P 2011 Ph. D. Dissertation (Jinan: Shandong University) (in Chinese)[于法鹏 2011 博士学位论文(济南: 山东大学)]
[123]	Kyawthetlatt (Nus). https://cpb-us-w2.wpmucdn.com/blog.nus.edu.sg/dist/3/3243/files/2013/08/image2-1qaf3mb.png[2013-08]
[124]	Gong M X 2001 International Electronic Elements 26 9 (in Chinese)[龚美霞 2001 国外电子元器件 26 9]
[125]	Helen Brand. https://www.iycr2014.org/learn/crystallography365/articles/20141209[2014-02-09]
[126]	London D 2011 Can. Mineral. 49 117
[127]	Somma C, Reimann K, Flytzanis C, Elsaesser T, Woerner M 2014 Phys. Rev. Lett. 112 146602
[128]	Solid State. https://commons.wikimedia.org/wiki/File:LiNbO3.png[2008-04-15]
[129]	Carruthers J R, Peterson G E, Grasso M, Bridenbaugh P M 1971 J. Appl. Phys. 42 1846
[130]	Kitamura K 1999 J. Cryst. Growth 197 889
[131]	Malovichko G I, Grachev V G, Yurchenko L P, Proshko V Y, Kokanyan E P, Gabrielyan V T 1992 Physica Status Solidi 133 K29
[132]	Malovichko G I, Grachev V G, Kokanyan E P, Schirmer O F, Betzler K, Gather B, Jermann F, Klauer S, Schlarb U, Whlecke M 1993 Appl. Phys. A 56 103
[133]	Jundt D H, Fejer M M, Byer R L 1990 IEEE J. Quantum Elect. 26 135
[134]	Bordui P F, Jundt D H, Standifer E M, Norwood R G, Sawin R L, Galipeau J D 1999 J. Appl. Phys. 85 3766
[135]	Haines J, Cambon O, Prudhomme N, Fraysse G, Keen D A, Chapon L C, Tucker M G 2006 Phys. Rev. B 73 10
[136]	Philippot E, Ibanez A, Goiffon A, Cochez M, Zarka A, Capelle B, Schwartzel J, Dtaint J 1993 J. Cryst. Growth 130 195
[137]	Li J, Liang X, Xu G, Zhao H, Wang J 2007 Piezoelectrics and Acoustooptics 29 695
[138]	Krempl P, Schleinzer G, Wallno Fer W 1997 Sensors Actuators A: Physical 61 361
[139]	Fachberger R, Bruckner G, Knoll G, Hauser R, Biniasch J, Reindl L 2004 IEEE Trans. Ultrason. Ferroelectr. Freq. Control 51 1427
[140]	Sotnikov A V, Schmidt H, Weihnacht M, Smirnova E P, Chemekova T Y, Makarov Y N 2010 IEEE Trans. Ultrason. Ferroelectr. Freq. Control 57 808
[141]	Zhao C L, Song B, Zhang X H, Han J C 2012 Materials Review A: Review 26 11 (in Chinese)[赵超亮, 宋波, 张幸红, 韩杰才 2012 材料导报A: 综述篇 26 11]
[142]	Oreshko A P, Ovchinnikova E N, Rogalev A, Wilhelm F, Mill B V, Dmitrienko V 2018 J. Synchrotron Rad. 25 1
[143]	Dou R, Liu W, Zhang Q, Zhang Q, Ding S, Shi Z, Sun D, Wang J 2017 Appl. Phys. A 23 1
[144]	Sato J, Takeda H, Morikoshi H, Shimamura K, Rudolph P, Fukuda T 1998 J. Cryst. Growth 191 746
[145]	NaKaoa H, Nishida M, Shikida T, Shimisu H, Takeda H, Shiosaki T 2006 J. Alloy. Compd. 408-412 582
[146]	Kumatoriya M, Sato H, Nakanishi J, Fujii T, Kadota M, Sakabe Y 2001 J. Cryst. Growth 229 289
[147]	Zhang S, Yoshikawa A, Kamada K, Frantz E, Xia R, Snyder D W, Fukuda T, Shrout T R 2008 Solid State Commun. 148 213
[148]	Zhang S, Kong H, Xia R, Zheng Y, Xin J, Shrout T R 2010 Solid State Commun. 150 435
[149]	Xiong K, Zheng Y, Tu X, Zhang S, Kong H, Shi E 2014 J. Cryst. Growth 401 820
[150]	Zhang S, Zheng Y, Kong H, Xin J, Frantz E, Shrout T R 2009 J. Appl. Phys. 105 114107
[151]	Douchet G, Sthal F, Bigler E, Bourquin R 2010 Solid State Sci. 12 325
[152]	le Traon O, Masson S, Chartier C, Janiaud D 2010 Solid State Sci. 12 318
[153]	Tortissier G, Blanc L, Tetelin A, Lachaud J, Benoit M, Condra V, Dejous C, Rebire D 2009 Procedia Chemistry 1 963
[154]	Zhong D, Teng B, Kong W, Ji S, Zhang S, Li J, Cao L, Jing H, He L 2017 J. Alloy. Compd. 692 413
[155]	Fei Y, Chai B H T, Ebbers C A, Liao Z M, Schaffers K I, Thelin P 2006 J. Cryst. Growth 290 301
[156]	Zhang S, Yu F, Xia R, Fei Y, Frantz E, Zhao X, Yuan D, Chai B H T, Snyder D, Shrout T R 2011 J. Cryst. Growth 318 884
[157]	Takeda H, Nakao H, Izukawa S, Shimizu H, Nishida T, Okamura S, Shiosaki T 2006 J. Alloy. Compd. 408-412 474
[158]	Zhang S, Fei Y, Chai B H T, Frantz E, Snyder D W, Jiang X, Shrout T R 2008 Appl. Phys. Lett. 92 202905
[159]	Yu F, Zhang S, Zhao X, Yuan D, Wang Q, Shrout T R 2010 Physica Status Solidi: Rapid Research Letters 4 103
[160]	Yu F, Zhang S, Zhao X, Yuan D, Wang Q, Shrout T R 2011 Physica Status Solidi: Rapid Research Letters 5 47
[161]	Shen C, Zhang S, Cao W, Cong H, Yu H, Wang J, Zhang H 2015 J. Appl. Phys. 117 64106
[162]	Shen C, Zhang S, Wang D, Xu T, Yu H, Cao W, Wang J, Zhang H 2015 Crystengcomm 17 1791
[163]	Takeda H, Hagiwara M, Noguchi H, Hoshina T, Takahashi T, Kodama N, Tsurumi T 2013 Appl. Phys. Lett. 102 242907
[164]	Zhang Y, Yin X, Yu H, Cong H, Zhang H, Wang J, Boughton R I 2012 Cryst. Growth Des. 12 622
[165]	Shen C, Zhang H, Cong H, Yu H, Wang J, Zhang S 2014 J. Appl. Phys. 116 44106
[166]	Chen J, Liu G, Li X, Chen Z, Dong S X 2013 IEEE Trans. Ultrason. Ferroelectr. Freq. Control 60 446
[167]	Shi H, Chen J, Liu G, Xiao W, Dong S X 2013 Appl. Phys. Lett. 102 242904
[168]	Chen J, Li X, Liu G, Chen Z, Dong S X 2012 Appl. Phys. Lett. 101 012909
[169]	Li X, Chen J, Chen Z, Dong S X 2012 Appl. Phys. Lett. 101 072902
[170]	Chen J, Chen Z, Li X, Dong S X 2013 Appl. Phys. Lett. 102 052902
[171]	Stewart Sherrit. https://www.techbriefs.com/component/content/article/3-ntb/tech-briefs/mechanics-and-machinery/9440[2011-03-01]
[172]	Bar-Cohen Y 2014 High Temperature Materials and Mechanisms (New York: CRC Press/Taylor and Francis group) pp427-465
[173]	Bao X, Scott J, Boudreau K, Bar-Cohen Y, Sherrit S, Badescu M, Zhang S, Shrout T R 2009 SPIE 2009 7292 72922B
[174]	Wu J, Shi H, Zhao T, Yu Y, Dong S X 2016 Adv. Funct. Mater. 26 7186
[175]	Wu J, Chen X, Chu Z, Shi W, Yu Y, Dong S X 2016 Appl. Phys. Lett. 109 173901
[176]	Parks D, Zhang S, Tittmann B 2013 IEEE Trans. Ultrason. Ferroelectr. Freq. Control 60 1010
[177]	Johnson J A, Kim K, Zhang S, Wu D, Jiang X 2014 IEEE Trans. Ultrason. Ferroelectr. Freq. Control 61 805
[178]	Johnson J A, Kim K, Zhang S, Di Wu, Jiang X 2013 Proceedings of Spie. 8694 869428
[179]	Kim K, Zhang S, Salazar G, Jiang X 2012 Sensors and Actuators A: Physical 178 40
[180]	Kim K, Zhang S, Huang W, Yu F, Jiang X 2011 J. Appl. Phys. 109 126103
[181]	Zhang S, Jiang X, Lapsley M, Moses P, Shrout T R 2010 Appl. Phys. Lett. 96 13506
[182]	Hamidon M, Skarda V, White N, Krispel F, Krempl P, Binhack M, Buff W 2006 IEEE Trans. Ultrason. Ferroelectr. Freq. Control 53 2465
[183]	Pereira da Cunha M, Lad R J, Moonlight T, Moulzolf S, Canabal A, Behanan R, Davulis P M, Frankel D, Bernhardt G, Pollard T, McCann D F 2011 IEEE Sensors Proceedings 2011 p614
[184]	RFSAW Inc., https://rfsaw.com/[2018-09-16]
[185]	Aubert T, Bardong J, Legrani O, Elmazria O, Badreddine Assouar M, Bruckner G, Talbi A 2013 J. Appl. Phys. 114 14505
[186]	Fritze H, Tuller H L, Seh H, Borchardt G 2001 Sensors and Actuators B 76 103
[187]	Fritze H, Seh H, Tuller H L, Borchardt G 2001 J. Eur. Ceram. Soc. 21 1473
[188]	Takeda H, Hagiwara M, Noguchi H, Hoshina T, Takahashi T, Kodama N, Tsurumi T 2013 Appl. Phys. Lett. 102 242907
[189]	Zhang S, Yu F 2011 J. Am. Ceram. Soc. 94 3153
[190]	Huang C, Cai K, Wang Y, Bai Y, Guo D 2018 J. Mater. Chem. C 6 1433
[191]	Wang Y, Cai K, Jiang F, Zhang J, Guo D 2014 Sensor Actuat A: Physical 216 335
[192]	Zhang S, Fei Y, Frantz E, Snyder D W, Chai B H, Shrout T R 2008 IEEE Trans. Ultrason. Ferroelectr. Freq. Control. 55 2703

施引文献

[1]	Curie J, Curie P 1880 Bull. Soc. Min. France 3 90
[2]	Yun C, Ishii T, Nakamura K, Ueha S, Akashi K 2001 J. J. Appl. Phys. 40 3773
[3]	Cady W G 2018 Piezoelectricity: Volume Two (New York: Courier Dover Publications) pp667-731
[4]	Wang C L, Li J C, Zhao M L 2009 Piezoelectric Ferroelectric Physics (Beijing: Science Press) p73 (in Chinese)[王春雷, 李吉超, 赵明磊 2009 压电铁电物理(北京:科学出版社) 第73页]
[5]	Zhang F X, Wang L K 2001 Modern Piezoelectric Research (Vol. 2) (Beijing: Science Press) p3 (in Chinese)[张福学, 王丽坤 2001 现代压电学(中册)(北京:科学出版社) 第3页]
[6]	Zhang F X 1987 Applications of Piezoelectrics and Ferroelectrics (Beijing: National Defense Industry Press) p1 (in Chinese)[张福学 1987 压电铁电应用(北京: 国防工业出版社) 第1页]
[7]	Nan C W, Bichurin M I, Dong S X, Viehland D, Srinivasan G 2008 J. Appl. Phys. 103 31101
[8]	Uchino K 2010 Advanced Piezoelectric Materials: Science and Technology (Cambridge: Woodhead Publishing Ltd) p5
[9]	Jaffe B (translated by Lin S H) 1979 Piezoelectric Ceramics (Version 1) (Beijing: Science Press) p1 (in Chinese)[贾菲B 著 (林声和译) 1979 压电陶瓷(第一版)(北京: 科学出版社) 第1页]
[10]	Kumar A, Bhanu Prasad V, James Raju K C, James A R 2015 J. Mater. Sci.: Mater. El. 26 3757
[11]	Ye Z G, Noheda B, Dong M 2001 Phys. Rev. B 64 184114
[12]	Noheda B, Cox D, Shirane G, Park S, Cross L, Zhong Z 2001 Phys. Rev. Lett. 86 3891
[13]	Liu J K 2012 Piezoelectric and Optics 34 1 (in Chinese)[刘军凯 2012 压电与声光 34 1]
[14]	Shi W, Ran Y Z, Zuo J H, Wang Q, Tao T, Ouyang K 2011 Journal of Tongren University 13 5 (in Chinese)[石维, 冉耀宗, 左江红, 王强, 陶涛, 欧永康 2011 铜仁学院学报 13 5]
[15]	Ouyang Y, Li L C, Xu Y S, Gan J R 1999 Automobile Electronics 4 5 (in Chinese)[欧阳烨, 李凌川, 徐元森, 甘俊仁 1999 汽车电器 4 5]
[16]	Luan G D, Zhang J D, Wang R Q 2005 Piezoelectric Transducer and Transducer Array (Beijing: Peking University Press) p80 (in Chinese)[栾桂冬, 张金铎, 王仁乾 2005 压电换能器和换能器阵(北京:北京大学出版社) 第80页]
[17]	Egerton L, Dillon D M 1959 J. Am. Ceram. Soc. 42 438
[18]	Jaffe B, Cook W R, Jaffe H 1971 Piezoelectric Ceramics (New York: Academic Press) p247
[19]	Saito Y, Takao H, Tani T, Nonoyama T, Takatori K, Homma T, Nagaya T, Nakamura M 2004 Nature 432 84
[20]	Guo Y, Kakimoto K, Ohsato H 2004 Appl. Phys. Lett. 85 4121
[21]	Guo Y, Kakimoto K, Ohsato H 2005 Mater. Lett. 59 242
[22]	Zang G Z, Wang J F, Chen H C 2006 Appl. Phys. Lett. 88 212908
[23]	Wu J, Wang Y, Xiao D 2007 Appl. Phys. Lett. 91 132914
[24]	Zhang S, Xia R, Hao H, Liu H, Shrout T R 2008 Appl. Phys. Lett. 92 152904
[25]	Zuo R, Fu J 2011 J. Am. Ceram. Soc. 94 1467
[26]	Zhang B, Wu J, Cheng X 2013 ACS Appl. Mater. Interfaces 5 7718
[27]	Cheng X, Wu J, Wang X 2013 Appl. Phys. Lett. 103 52906
[28]	Wang X, Wu J, Xiao D 2014 J. Am. Ceram. Soc. 136 2905
[29]	Wu J, Wang X, Cheng X 2014 J. Appl. Phys. 115 114104
[30]	Fernando R M, Rigoberto L J 2015 ACS Appl. Mater. Interfaces 7 23080
[31]	Wang K, Yao F Z, Jo W, Gobeljic D, Shvartsman V V, Lupascu D C, Li J F, Rdel J 2013 Adv. Funct. Mater. 23 4079
[32]	Yao F Z, Wang K, Jo W, Webber K G, Comyn T P, Ding J X, Xu B, Cheng L Q, Zheng M P, Hou Y D, Li J F 2016 Adv. Funct. Mater. 26 1217
[33]	Zhang M H, Wang K, Du Y J, Dai G, Sun W, Li G, Hu D, Thong H C, Zhao C, Xi X Q, Yue Z X, Li J F 2017 J. Am. Chem. Soc. 139 3889
[34]	Li P, Zhai J, Shen B 2018 Adv. Mater. 30 1705171
[35]	Eitel R E, Randall C A, Shrout T R, Rehrig P W, Hackenberger W, Park S E 2001 Jpn. J. Appl. Phys. 40 5999
[36]	Goldschmidt V M, Krystallochemie D G D 1926 Science of Nature 14 477
[37]	Eitel R E, Randall C A, Shrout T R, Park S E 2002 Jpn. J. Appl. Phys. 41 2099
[38]	Iniguez J, Vanderbilt D, Bellaniche L 2003 Phys. Rev. B 67 224107
[39]	Zhang S, Randall C A, Shrout T R 2003 Appl. Phys. Lett. 83 3150
[40]	Zhang S, Eitel R E, Randall C A, Shrout T R 2005 Appl. Phys. Lett. 86 262904
[41]	Chen S, Dong X, Mao C, Cao F 2006 J. Am. Ceram. Soc. 89 3270
[42]	Zou T T, Wang X H, Wang H, Zhong C F, Li L T, Chen I W 2008 Appl. Phys. Lett. 93 192913
[43]	Wang Y, Cai K, Shao T, Zhao Q, Guo D 2015 J. Appl. Phys. 117 164102
[44]	Chen J, Hu Z, Shi H, Li M, Dong S 2012 J. Phys. D: Appl. Phys. 45 465303
[45]	Zhang S, Yu Y, Wu J, Gao X, Huang C, Dong S 2018 J. Alloy. Compd. 731 1140
[46]	Aurivillius B 1949 Ark. Kemi 1 463
[47]	Subbarao E C 1962 J. Phys. Chem. Solids 23 665
[48]	Subbarao E C 1962 J. Am. Ceram. Soc. 45 166
[49]	Takenaka T, Sakata K 1980 Jpn. J. Appl. Phys. 19 31
[50]	Takenaka T, Sakata K 1984 J. Appl. Phys. 55 1092
[51]	Rae A D, Thompson J G, Withers R L 1991 Acta Cryst. B 47 870
[52]	Rae A D, Thompson J G, Withers R L, Willis A C 1990 Acta Cryst. B 46 474
[53]	Withers R L, Thompson J G, Rae A D 1991 J. Solid State Chem. 94 404
[54]	Wang C M, Zhao L, Wang J F, Zhang S J, Shrout T R 2009 Phys. Stat. Sol. (RRL) 3 7
[55]	Ismunandar, Kennedy B J 1999 J. Mater. Chem. 9 541
[56]	Macquart R, Kennedy B J, Kubota Y, Nishibori E, Takata M 2000 Ferroelectrics 248 27
[57]	Hervoches C H, Snedden A, Riggs R, Kilcoyne S H, Manuel P, Lightfoot P 2002 J. Solid State Chem. 164 280
[58]	Borg S, Svensson G 2001 J. Solid State Chem. 157 160
[59]	Ismunandar, Kamiyama T, Hoshikawa A, Zhou Q, Kennedy B J, Kubota Y, Kato K 2004 J. Solid State Chem. 177 4188
[60]	de Araujo C A P, Cuchiaro J D, McMillan L D, Scott M C, Scott J F 1995 Nature 374 627
[61]	Auciello O, Foster C M, Ramesh R 1998 Annu. Rev. Mater. Sci. 28 501
[62]	Auciello O, Scott J F, Ramesh R 1998 Phys. Today 51 22
[63]	Du X, Chen I W 1998 J. Am. Ceram. Soc. 81 3253
[64]	Du X, Chen I W 1998 J. Am. Ceram. Soc. 81 3260
[65]	Du X, Chen I W 1998 J. Am. Ceram. Soc. 81 3265
[66]	Ganpule C S, Stanishevsky A, Aggarwal S, Melngailis J, Williams E, Ramesh R, Joshi V, de Araujo C P 1999 Appl. Phys. Lett. 75 3874
[67]	Chon U, Kim K B, Jang H M, Yi G C 2001 Appl. Phys. Lett. 79 3137
[68]	Ding Y, Liu J S, Qin H X, Zhu J S, Wang Y N 2001 Appl. Phys. Lett. 78 4175
[69]	Kimura M, Sawada T, Ando A, Sakabe Y 1999 Jpn. J. Appl. Phys. 38 5557
[70]	Takeuchi T, Tani T, Saito Y 1999 Jpn. J. Appl. Phys. 38 5553
[71]	Hong S H, Trolier McKinstry S, Messing G L 2000 J. Am. Ceram. Soc. 83 113
[72]	Pardo L, Castro A, Millan P, Alemany C, Jimenez R, Jimenez B 2000 Acta Mater. 48 2421
[73]	Yan H, Li C G, Zhou J G, Zhu W M, He L X, Song Y X 2000 Jpn. J. Appl. Phys. 39 6339
[74]	Mao X, Wang W, Chen X, Lu Y 2009 Appl. Phys. Lett. 95 082901
[75]	Bai W, Gao Y Q, Zhu J Y, Meng X J, Lin T, Yang J, Zhu Z Q, Chu J H 2011 J. Appl. Phys. 109 064901
[76]	Wu F, Chen Z, Chen Y B, Zhang S, Zhou J, Zhu Y, Chen Y 2011 Appl. Phys. Lett. 98 212501
[77]	Birenbaum A Y, Ederer C 2014 Phys. Rev. B 90 214109
[78]	Zhao H, Kimura H, Cheng Z, Osada M, Wang J, Wang X, Dou S, Liu Y, Yu J, Matsumoto T, Tohei T, Shibata N, Ikuhara Y 2014 Sci. Rep. 4 5255
[79]	Wang C M, Wang J F 2006 Appl. Phys. Lett. 89 202905
[80]	Wang C M, Wang J F, Zhang S J, Shrout T R 2009 J. Appl. Phys. 105 094110
[81]	Wang Q, Wang C M, Wang J F, Zhang S 2016 Ceram. Int. 42 6993
[82]	Wang C M, Zhang S J, Wang J F, Zhao M L, Wang C L 2009 Mater. Chem. Phys. 118 21
[83]	Sun L, Feng C, Chen L, Huang S 2007 J. Am. Ceram. Soc. 90 3875
[84]	Zhang H, Yan H, Reece M J 2010 J. Appl. Phys. 108 014109
[85]	Jiang X P, Yang Q, Zhou S L, Chen C, Chen Y, Tu N, Yu Z D 2011 J. Am. Ceram. Soc. 94 1109
[86]	Chen Y, Liang D, Wang Q, Zhu J 2014 J. Appl. Phys. 116 074108
[87]	Wang Q, Liang Y, Wang C M, Wang C L, Zhao M L 2015 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA) Jinan, October 30-November 2, 2015 p70
[88]	Zhao T L, Wang C M, Wang C L, Wang Y M, Dong S 2015 Mat. Sci. Eng. B 201 51
[89]	Cao Z P, Wang C M, Zhao T L, Yu S L, Wu H Z, Wang Y M, Wang Q, Liang Y, Wei Y N, Zhang Y, Liu Y, Tang X S 2015 Ceram. Int. 41 13974
[90]	Fang P, Fan H, Xi Z, Chen W 2012 Solid State Commun. 152 979
[91]	Wang C M, Zhao L, Liu Y, Withers R L, Zhang S, Wang Q 2016 Ceram. Int. 42 4268
[92]	Wang C M, Wang J F 2008 J. Am. Ceram. Soc. 91 918
[93]	Wang C M, Wang J F, Zhang S J, Shrout T R 2009 Phys. Stat. Sol. (RRL) 3 49
[94]	Cai K, Huang C, Guo D 2017 J. Phys. D: Appl. Phys. 50 155302
[95]	Shen Z Y, Luo W Q, Tang Y, Zhang S, Li Y 2016 Ceram. Int. 42 7868
[96]	Wang Q, Cao Z P, Wang C M, Fu Q W, Yin D F, Tian H H 2016 J. Alloys Compd. 674 37
[97]	Cao Z P, Wang C M, Lau K, Wang Q, Fu Q W, Tian H H, Yin D F 2016 Ceram. Int. 42 11619
[98]	Guo Z L, Wang C M, Zhao T L, Yu S L, Cao Z P 2013 Mater. Chem. Phys. 140 260
[99]	Magneli A 1949 Arkiv for Kemi 1 213
[100]	Jamieson P B, Abrahams S C, Bernstein J L 1969 J. Chem. Phys. 50 4352
[101]	Hussain A, Gruehn R, Ruseher C H 1979 J. Alloys Compd. 246 51
[102]	Skokan M R, Moulton W G, Morris R C 1978 B. Am. Phys. Soc. 23 231
[103]	Franeombe M H 1960 Acta Crystallogr. 13 131
[104]	Sleight A W 1966 Acta Chem. Scand. 20 1102
[105]	Stennett M C, Reaney I M, Miles G C, Woodward D I, West A R, Kirk C A, Levin I 2007 J. Appl. Phys. 101 104114
[106]	Chen X M, Yuan Y, Sun Y H 2005 J. Appl. Phys. 97 074108
[107]	Zhu X L, Wu S Y, Chen X M 2007 Appl. Phy. Lett. 91 162906
[108]	Bai Y 2011 M. S. Thesis (Hangzhou: Zhejiang University) (in Chinese)[白阳 2011 硕士学位论文(杭州: 浙江大学)]
[109]	Tizeff. https://upload.wikimedia.org/wikipedia/commons/thumb/a/a3/PbNb2O6.png/116px-PbNb2O6.png[2018-09-16]
[110]	Li M Y, Cheng L, Gu X Y, Zhang Y P, Liao R H 2006 Journal of Ceramics 27 3 (in Chinese)[李明月, 程亮, 顾幸勇, 张玉平, 廖润华 2006 陶瓷学报 27 3]
[111]	Cai K, Jiang F, Deng P, Ma J, Guo D 2015 J. Am. Ceram. Soc. 98 3165
[112]	Luan G D, Zhang J D, Wang R Q 2005 Piezoelectric Transducer and Transducer Array (Beijing: Peking University Press) p93 (in Chinese)[栾桂冬, 张金铎, 王仁乾 2005 压电换能器和换能器阵(北京: 北京大学出版社) 第93页]
[113]	Kenji U 2010 Ferroelectric Devices (New York: Taylor Francis Group CRC Press) p171
[114]	Zhang P L, Zhong W L 1996 Piezoelectric Materials and Device Physics (Jinan: Shandong Science Technology Press) p113 (in Chinese)[张沛霖, 钟维烈 1996 压电材料与器件物理 (济南: 山东科学技术出版社) 第113页]
[115]	Qin Z K 1980 Piezoelectric Quartz Crystal (Beijing: National Defense Industry Press) p100 (in Chinese)[秦自楷1980 压电石英晶体(北京: 国防工业出版社) 第100页]
[116]	Shekhar P C, Schreuer J 2012 J. Appl. Phys. 111 13516
[117]	Smith R T 2003 J. Appl. Phys. 42 2219
[118]	Krempl P, Schleinzer G, Wallno Fer W 1997 Sensors Actuators A: Physical 61 361
[119]	Sotnikov A V, Schmidt H, Weihnacht M, Smirnova E P, Chemekova T Y, Makarov Y N 2010 IEEE Trans. Ultrason. Ferroelectr. Freq. Control 57 808
[120]	Riekkinen T, Nurmela A, Molarius J 2009 Thin Solid Films 517 6588
[121]	Bohm J, Chilla E, Flannery C, Frohlich H J, Hauke T, Heimann R B, Hengst M, Straube U 2000 J. Cryst. Growth 216 293
[122]	Yu F P 2011 Ph. D. Dissertation (Jinan: Shandong University) (in Chinese)[于法鹏 2011 博士学位论文(济南: 山东大学)]
[123]	Kyawthetlatt (Nus). https://cpb-us-w2.wpmucdn.com/blog.nus.edu.sg/dist/3/3243/files/2013/08/image2-1qaf3mb.png[2013-08]
[124]	Gong M X 2001 International Electronic Elements 26 9 (in Chinese)[龚美霞 2001 国外电子元器件 26 9]
[125]	Helen Brand. https://www.iycr2014.org/learn/crystallography365/articles/20141209[2014-02-09]
[126]	London D 2011 Can. Mineral. 49 117
[127]	Somma C, Reimann K, Flytzanis C, Elsaesser T, Woerner M 2014 Phys. Rev. Lett. 112 146602
[128]	Solid State. https://commons.wikimedia.org/wiki/File:LiNbO3.png[2008-04-15]
[129]	Carruthers J R, Peterson G E, Grasso M, Bridenbaugh P M 1971 J. Appl. Phys. 42 1846
[130]	Kitamura K 1999 J. Cryst. Growth 197 889
[131]	Malovichko G I, Grachev V G, Yurchenko L P, Proshko V Y, Kokanyan E P, Gabrielyan V T 1992 Physica Status Solidi 133 K29
[132]	Malovichko G I, Grachev V G, Kokanyan E P, Schirmer O F, Betzler K, Gather B, Jermann F, Klauer S, Schlarb U, Whlecke M 1993 Appl. Phys. A 56 103
[133]	Jundt D H, Fejer M M, Byer R L 1990 IEEE J. Quantum Elect. 26 135
[134]	Bordui P F, Jundt D H, Standifer E M, Norwood R G, Sawin R L, Galipeau J D 1999 J. Appl. Phys. 85 3766
[135]	Haines J, Cambon O, Prudhomme N, Fraysse G, Keen D A, Chapon L C, Tucker M G 2006 Phys. Rev. B 73 10
[136]	Philippot E, Ibanez A, Goiffon A, Cochez M, Zarka A, Capelle B, Schwartzel J, Dtaint J 1993 J. Cryst. Growth 130 195
[137]	Li J, Liang X, Xu G, Zhao H, Wang J 2007 Piezoelectrics and Acoustooptics 29 695
[138]	Krempl P, Schleinzer G, Wallno Fer W 1997 Sensors Actuators A: Physical 61 361
[139]	Fachberger R, Bruckner G, Knoll G, Hauser R, Biniasch J, Reindl L 2004 IEEE Trans. Ultrason. Ferroelectr. Freq. Control 51 1427
[140]	Sotnikov A V, Schmidt H, Weihnacht M, Smirnova E P, Chemekova T Y, Makarov Y N 2010 IEEE Trans. Ultrason. Ferroelectr. Freq. Control 57 808
[141]	Zhao C L, Song B, Zhang X H, Han J C 2012 Materials Review A: Review 26 11 (in Chinese)[赵超亮, 宋波, 张幸红, 韩杰才 2012 材料导报A: 综述篇 26 11]
[142]	Oreshko A P, Ovchinnikova E N, Rogalev A, Wilhelm F, Mill B V, Dmitrienko V 2018 J. Synchrotron Rad. 25 1
[143]	Dou R, Liu W, Zhang Q, Zhang Q, Ding S, Shi Z, Sun D, Wang J 2017 Appl. Phys. A 23 1
[144]	Sato J, Takeda H, Morikoshi H, Shimamura K, Rudolph P, Fukuda T 1998 J. Cryst. Growth 191 746
[145]	NaKaoa H, Nishida M, Shikida T, Shimisu H, Takeda H, Shiosaki T 2006 J. Alloy. Compd. 408-412 582
[146]	Kumatoriya M, Sato H, Nakanishi J, Fujii T, Kadota M, Sakabe Y 2001 J. Cryst. Growth 229 289
[147]	Zhang S, Yoshikawa A, Kamada K, Frantz E, Xia R, Snyder D W, Fukuda T, Shrout T R 2008 Solid State Commun. 148 213
[148]	Zhang S, Kong H, Xia R, Zheng Y, Xin J, Shrout T R 2010 Solid State Commun. 150 435
[149]	Xiong K, Zheng Y, Tu X, Zhang S, Kong H, Shi E 2014 J. Cryst. Growth 401 820
[150]	Zhang S, Zheng Y, Kong H, Xin J, Frantz E, Shrout T R 2009 J. Appl. Phys. 105 114107
[151]	Douchet G, Sthal F, Bigler E, Bourquin R 2010 Solid State Sci. 12 325
[152]	le Traon O, Masson S, Chartier C, Janiaud D 2010 Solid State Sci. 12 318
[153]	Tortissier G, Blanc L, Tetelin A, Lachaud J, Benoit M, Condra V, Dejous C, Rebire D 2009 Procedia Chemistry 1 963
[154]	Zhong D, Teng B, Kong W, Ji S, Zhang S, Li J, Cao L, Jing H, He L 2017 J. Alloy. Compd. 692 413
[155]	Fei Y, Chai B H T, Ebbers C A, Liao Z M, Schaffers K I, Thelin P 2006 J. Cryst. Growth 290 301
[156]	Zhang S, Yu F, Xia R, Fei Y, Frantz E, Zhao X, Yuan D, Chai B H T, Snyder D, Shrout T R 2011 J. Cryst. Growth 318 884
[157]	Takeda H, Nakao H, Izukawa S, Shimizu H, Nishida T, Okamura S, Shiosaki T 2006 J. Alloy. Compd. 408-412 474
[158]	Zhang S, Fei Y, Chai B H T, Frantz E, Snyder D W, Jiang X, Shrout T R 2008 Appl. Phys. Lett. 92 202905
[159]	Yu F, Zhang S, Zhao X, Yuan D, Wang Q, Shrout T R 2010 Physica Status Solidi: Rapid Research Letters 4 103
[160]	Yu F, Zhang S, Zhao X, Yuan D, Wang Q, Shrout T R 2011 Physica Status Solidi: Rapid Research Letters 5 47
[161]	Shen C, Zhang S, Cao W, Cong H, Yu H, Wang J, Zhang H 2015 J. Appl. Phys. 117 64106
[162]	Shen C, Zhang S, Wang D, Xu T, Yu H, Cao W, Wang J, Zhang H 2015 Crystengcomm 17 1791
[163]	Takeda H, Hagiwara M, Noguchi H, Hoshina T, Takahashi T, Kodama N, Tsurumi T 2013 Appl. Phys. Lett. 102 242907
[164]	Zhang Y, Yin X, Yu H, Cong H, Zhang H, Wang J, Boughton R I 2012 Cryst. Growth Des. 12 622
[165]	Shen C, Zhang H, Cong H, Yu H, Wang J, Zhang S 2014 J. Appl. Phys. 116 44106
[166]	Chen J, Liu G, Li X, Chen Z, Dong S X 2013 IEEE Trans. Ultrason. Ferroelectr. Freq. Control 60 446
[167]	Shi H, Chen J, Liu G, Xiao W, Dong S X 2013 Appl. Phys. Lett. 102 242904
[168]	Chen J, Li X, Liu G, Chen Z, Dong S X 2012 Appl. Phys. Lett. 101 012909
[169]	Li X, Chen J, Chen Z, Dong S X 2012 Appl. Phys. Lett. 101 072902
[170]	Chen J, Chen Z, Li X, Dong S X 2013 Appl. Phys. Lett. 102 052902
[171]	Stewart Sherrit. https://www.techbriefs.com/component/content/article/3-ntb/tech-briefs/mechanics-and-machinery/9440[2011-03-01]
[172]	Bar-Cohen Y 2014 High Temperature Materials and Mechanisms (New York: CRC Press/Taylor and Francis group) pp427-465
[173]	Bao X, Scott J, Boudreau K, Bar-Cohen Y, Sherrit S, Badescu M, Zhang S, Shrout T R 2009 SPIE 2009 7292 72922B
[174]	Wu J, Shi H, Zhao T, Yu Y, Dong S X 2016 Adv. Funct. Mater. 26 7186
[175]	Wu J, Chen X, Chu Z, Shi W, Yu Y, Dong S X 2016 Appl. Phys. Lett. 109 173901
[176]	Parks D, Zhang S, Tittmann B 2013 IEEE Trans. Ultrason. Ferroelectr. Freq. Control 60 1010
[177]	Johnson J A, Kim K, Zhang S, Wu D, Jiang X 2014 IEEE Trans. Ultrason. Ferroelectr. Freq. Control 61 805
[178]	Johnson J A, Kim K, Zhang S, Di Wu, Jiang X 2013 Proceedings of Spie. 8694 869428
[179]	Kim K, Zhang S, Salazar G, Jiang X 2012 Sensors and Actuators A: Physical 178 40
[180]	Kim K, Zhang S, Huang W, Yu F, Jiang X 2011 J. Appl. Phys. 109 126103
[181]	Zhang S, Jiang X, Lapsley M, Moses P, Shrout T R 2010 Appl. Phys. Lett. 96 13506
[182]	Hamidon M, Skarda V, White N, Krispel F, Krempl P, Binhack M, Buff W 2006 IEEE Trans. Ultrason. Ferroelectr. Freq. Control 53 2465
[183]	Pereira da Cunha M, Lad R J, Moonlight T, Moulzolf S, Canabal A, Behanan R, Davulis P M, Frankel D, Bernhardt G, Pollard T, McCann D F 2011 IEEE Sensors Proceedings 2011 p614
[184]	RFSAW Inc., https://rfsaw.com/[2018-09-16]
[185]	Aubert T, Bardong J, Legrani O, Elmazria O, Badreddine Assouar M, Bruckner G, Talbi A 2013 J. Appl. Phys. 114 14505
[186]	Fritze H, Tuller H L, Seh H, Borchardt G 2001 Sensors and Actuators B 76 103
[187]	Fritze H, Seh H, Tuller H L, Borchardt G 2001 J. Eur. Ceram. Soc. 21 1473
[188]	Takeda H, Hagiwara M, Noguchi H, Hoshina T, Takahashi T, Kodama N, Tsurumi T 2013 Appl. Phys. Lett. 102 242907
[189]	Zhang S, Yu F 2011 J. Am. Ceram. Soc. 94 3153
[190]	Huang C, Cai K, Wang Y, Bai Y, Guo D 2018 J. Mater. Chem. C 6 1433
[191]	Wang Y, Cai K, Jiang F, Zhang J, Guo D 2014 Sensor Actuat A: Physical 216 335
[192]	Zhang S, Fei Y, Frantz E, Snyder D W, Chai B H, Shrout T R 2008 IEEE Trans. Ultrason. Ferroelectr. Freq. Control. 55 2703

[1]	王伟, 李金洋, 毛国培, 杨艳, 高志强, 马骢, 钟翔雨, 史青. 温度弱敏感光纤高温压力传感器. , 2024, 73(1): 014208. doi: 10.7498/aps.73.20231155
[2]	李银辉, 殷荣艳, 梁建国, 李玮栋, 范凯, 周赟磊. 一种耐高温的柔性压电/热释电双功能传感器. , 2024, 73(20): 206801. doi: 10.7498/aps.73.20241006
[3]	张如轩, 宗肖航, 于婷婷, 葛一璇, 胡适, 梁文杰. 基于纳米传感器矩阵的混合气体组分探测与识别. , 2022, 71(18): 180702. doi: 10.7498/aps.71.20220955
[4]	张宇琦, 王俊杰, 吕子玉, 韩素婷. 应用于感存算一体化系统的多模调控忆阻器. , 2022, 71(14): 148502. doi: 10.7498/aps.71.20220226
[5]	张嘉伟, 姚鸿博, 张远征, 蒋伟博, 吴永辉, 张亚菊, 敖天勇, 郑海务. 通过机器学习实现基于摩擦纳米发电机的自驱动智能传感及其应用. , 2022, 71(7): 078702. doi: 10.7498/aps.71.20211632
[6]	王坤, 段高燕, 郎佩琳, 赵玉芳, 刘尖斌, 宋钢. 基于银纳米链的马赫-曾德干涉仪结构的生物传感器. , 2022, 71(1): 017301. doi: 10.7498/aps.71.20211420
[7]	杨生辉, 董明义, 渠超越, 田兴成, 董静, 吴冶, 马骁妍, 章红宇, 江晓山, 欧阳群, 李岚坤, 郑国恒. 基于单片有源像素传感器的探测模块测试研究. , 2021, 70(17): 170702. doi: 10.7498/aps.70.20210464
[8]	丁子平, 廖健飞, 曾泽楷. 基于表面等离子体共振的新型超宽带微结构光纤传感器研究. , 2021, 70(7): 074207. doi: 10.7498/aps.70.20201477
[9]	庞慧中, 王鑫, 王俊林, 王宗利, 刘苏雅拉图, 田虎强. 双频带太赫兹超材料吸波体传感器传感特性. , 2021, 70(16): 168101. doi: 10.7498/aps.70.20210062
[10]	刘志福, 李培, 程铁栋, 黄文. 铁掺杂多孔氧化铟的NO₂传感特性. , 2020, 69(24): 248101. doi: 10.7498/aps.69.20200956
[11]	武佩, 胡潇, 张健, 孙连峰. 硅基底石墨烯器件的现状及发展趋势. , 2017, 66(21): 218102. doi: 10.7498/aps.66.218102
[12]	王家璐, 杜木清, 张伶莉, 刘永军, 孙伟民. 基于不同液晶填充光子晶体光纤传输特性的研究. , 2015, 64(12): 120702. doi: 10.7498/aps.64.120702
[13]	孙杰, 杨剑锋, 闫肃, 杨晶晶, 黄铭. 等离子体辅助平板波导的传输特性及应用研究. , 2015, 64(7): 078402. doi: 10.7498/aps.64.078402
[14]	罗雪雪, 陈家璧, 胡金兵, 梁斌明, 蒋强. 基于双面金属包覆光波导的传感器温度特性研究及实验验证. , 2015, 64(23): 234208. doi: 10.7498/aps.64.234208
[15]	廖文英, 范万德, 李海鹏, 隋佳男, 曹学伟. 准晶体结构光纤表面等离子体共振传感器特性研究. , 2015, 64(6): 064213. doi: 10.7498/aps.64.064213
[16]	陈炳章, 易航, 杨金戈, 迟子惠, 荣健, 胡兵, 蒋华北. 光声内窥镜系统在人体直肠癌离体组织中的实验研究. , 2014, 63(8): 084204. doi: 10.7498/aps.63.084204
[17]	朱利, 刘尚合, 郑会志, 魏明, 胡小锋, 索罗金·安德烈. 航空发动机喷流起电机理建模与试验研究. , 2013, 62(22): 225201. doi: 10.7498/aps.62.225201
[18]	张海燕, 曹亚萍, 于建波, 陈先华. 采用单个压电传感器的单模式兰姆波激发频率的选择. , 2011, 60(11): 114301. doi: 10.7498/aps.60.114301
[19]	黄覃, 冷逢春, 梁文耀, 董建文, 汪河洲. 光子晶体的相位特性在高灵敏温度传感器中的应用. , 2010, 59(6): 4014-4017. doi: 10.7498/aps.59.4014
[20]	李鲠颖, 潘涛, 夏小建. 压电体的远程探测. , 1997, 46(2): 400-405. doi: 10.7498/aps.46.400

计量

文章访问数: 48565
PDF下载量: 1645
被引次数: 0

姓名
邮箱
手机号码
标题
留言内容
验证码

搜索

留言板