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X射线组合折射透镜（CRL）已逐步成为同步辐射光源下X射线聚焦光学器件的标准配件之一，它具有结构紧凑、易调节校准、适用光子能量范围大等优点. 本文设计了一种级联式平面抛物面型CRL，它将N1个具有较大抛物面几何孔径（R0）的折射单元Ⅰ与N2个具有较小抛物面顶点曲率半径（R）的折射单元Ⅱ级联，以解决常规CRL设计过程中焦斑尺寸与透过率的矛盾. 采用PMMA材料，利用LIGA技术制作了一组级联式平面抛物面型CRL，其中折射单元I的主要结构参数为N1=15，R1=200 μm，2R01=564 μm；折射单元Ⅱ的主要结构参数为N2=20，R2=50 μm，2R02=140 μm. 在上海光源同步辐射线束上，所制作的级联式平面抛物面型CRL实现了对初始光斑尺寸为200 μm×100 μm的入射X射线的一维聚焦，测试得到的焦距为1.052 m，横向焦斑尺寸为24.9 μm@8 keV，透过率为2.19%.Due to its attractive features such as compact size, simple to align and wide working range of photon energy, the X-ray compound refractive lens (CRL) has gradually become one of the standard accessories to focus the X-ray beams from the synchrotron radiation light source. In this paper, a cascaded planar parabolic CRL is designed and fabricated. The novel CRL is composed of type Ⅰ and type Ⅱ refractive elements in order to achieve a small spot size while maintaining the transmission. In type I refractive element, the parabolic geometry aperture (R0) is large, while, in type Ⅱ refractive element, the radius of curvature (R) at the parabolic vertex is small. So N1 numbers of type I and N2 numbers of type Ⅱ refractive elements are cascaded to form a single-chip CRL. A cascaded X-ray planar parabolic CRL is constructed using PMMA material by means of LIGA techniques. The main structural parameters of type Ⅰ refractive elements are: N1=15, R1=200 μm, 2R01=564 μm. The main structural parameters of type Ⅱ refractive elements are: N2=20, R2=50 μm, 2R02=140 μm. The cascaded planar parabolic CRL is tested on the beam line whose original incident X-ray spot is 200 μm×100 μm at Shanghai synchrotron radiation facility. The measured lateral focusing spot size is 24.9 μm@8 keV, the transmission rate is 2.19% and the focal length is 1.052 m.
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Keywords:
- compound refractive lenses /
- X-ray optics /
- parabolic lenses
[1] Cao Z R, Dong J J, Yang Z H, Zhan X Y, Yuan Z, Zhang H Y, Jiang S E, Ding Y K 2013 Acta Phys. Sin. 62 045205(in Chinese) [曹柱荣, 董建军, 杨正华, 詹夏宇, 袁铮, 张海鹰, 江少恩, 丁永坤 2013 62 045205]
[2] Fox O J L, Alianelli L, Malik A M, Pape I, May P W, Sawhney K J S 2014 Opt. Express 22 7657
[3] Huang Q S, Li H C, Song Z Q, Zhu J T, Wang Z S, Li A G, Yan S, Mao C W, Wang H, Yan F, Zhang L, Yu X H, Liu P, Li M 2013 Chin. Phys. C 37 028002
[4] Li Y D, Lin X Y, Liu S G, He J L, Guo F, Sun T X, Liu P 2013 Chin. Phys. B 22 044103
[5] Guilherme A, Buzanich G, Carvalho M L 2012 Spectrochim. Acta. Part B 77 1
[6] Snigireva I, Snigirev A 2013 Journal of Physics: Conference Series 463 012044
[7] Ogurreck M, Wilde F, Herzen J, Beckmann F, Nazmov V, Mohr J, Haibel A, Mller M, Schreyer A 2013 Journal of Physics: Conference Series 425 182002
[8] Guilherme A, Buzanich G, Radtke M, Reinholz U, Coroado J, Dos Santos J M F, Carvalho M L 2012 J. Anal. At. Spectrom 27 966
[9] Buzanich G, Radtke M, Reinholz U, Riesemeier H, Streli C 2012 J. Anal. At. Spectrom 27 1803
[10] Vaughan G B M, Wright J P, Bytchkov A, Rossat M, Gleyzolle H, Snigireva I, Snigirev A 2011 J. Synchrotron. Radiat 18 125
[11] Zozulya A V, Bondarenko S, Schavkan A, Westermeier F, Grbel G, Sprung M 2012 Opt. Express 20 18967
[12] Andrejczuk A, Nagamine M, Sakurai Y, Itou M 2014 J. Synchrotron. Radiat 21 57
[13] Le Z C, Liang J Q, Dong W, Zhu P P, Peng L Q, Wang W B, Huang W X, Yuan Q X, Wang J Y 2007 Chin. Phys. 16 984
[14] Le Z C, Dong W, Liu W, Zhang M, Liang J Q, Quan B S, Liu K, Liang Z Z, Zhu P P, Yin F T, Huang W X 2010 Acta Phys. Sin. 59 1977(in Chinese) [乐孜纯, 董文, 刘魏, 张明, 梁静秋, 全必胜, 刘恺, 梁中翥, 朱佩平, 伊福廷, 黄万霞 2010 59 1977]
[15] Le Z C, Zhang M, Dong W, Quan B S, Liu W, Liu K 2010 Acta Phys. Sin. 59 6284(in Chinese) [乐孜纯, 张明, 董文, 全必胜, 刘魏, 刘恺 2010 59 6284]
[16] Yao Q J 1989 Optical tutorial (Second Edition) (Beijing: Higher Education Press) p210 (in Chinese) [姚启钧1989光学教程(第二版) (北京: 高等教育出版社)第210页]
[17] Le Z C, Liang J Q 2003 J. Opt. A: Pure & Appl. Opt. 5 374
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[1] Cao Z R, Dong J J, Yang Z H, Zhan X Y, Yuan Z, Zhang H Y, Jiang S E, Ding Y K 2013 Acta Phys. Sin. 62 045205(in Chinese) [曹柱荣, 董建军, 杨正华, 詹夏宇, 袁铮, 张海鹰, 江少恩, 丁永坤 2013 62 045205]
[2] Fox O J L, Alianelli L, Malik A M, Pape I, May P W, Sawhney K J S 2014 Opt. Express 22 7657
[3] Huang Q S, Li H C, Song Z Q, Zhu J T, Wang Z S, Li A G, Yan S, Mao C W, Wang H, Yan F, Zhang L, Yu X H, Liu P, Li M 2013 Chin. Phys. C 37 028002
[4] Li Y D, Lin X Y, Liu S G, He J L, Guo F, Sun T X, Liu P 2013 Chin. Phys. B 22 044103
[5] Guilherme A, Buzanich G, Carvalho M L 2012 Spectrochim. Acta. Part B 77 1
[6] Snigireva I, Snigirev A 2013 Journal of Physics: Conference Series 463 012044
[7] Ogurreck M, Wilde F, Herzen J, Beckmann F, Nazmov V, Mohr J, Haibel A, Mller M, Schreyer A 2013 Journal of Physics: Conference Series 425 182002
[8] Guilherme A, Buzanich G, Radtke M, Reinholz U, Coroado J, Dos Santos J M F, Carvalho M L 2012 J. Anal. At. Spectrom 27 966
[9] Buzanich G, Radtke M, Reinholz U, Riesemeier H, Streli C 2012 J. Anal. At. Spectrom 27 1803
[10] Vaughan G B M, Wright J P, Bytchkov A, Rossat M, Gleyzolle H, Snigireva I, Snigirev A 2011 J. Synchrotron. Radiat 18 125
[11] Zozulya A V, Bondarenko S, Schavkan A, Westermeier F, Grbel G, Sprung M 2012 Opt. Express 20 18967
[12] Andrejczuk A, Nagamine M, Sakurai Y, Itou M 2014 J. Synchrotron. Radiat 21 57
[13] Le Z C, Liang J Q, Dong W, Zhu P P, Peng L Q, Wang W B, Huang W X, Yuan Q X, Wang J Y 2007 Chin. Phys. 16 984
[14] Le Z C, Dong W, Liu W, Zhang M, Liang J Q, Quan B S, Liu K, Liang Z Z, Zhu P P, Yin F T, Huang W X 2010 Acta Phys. Sin. 59 1977(in Chinese) [乐孜纯, 董文, 刘魏, 张明, 梁静秋, 全必胜, 刘恺, 梁中翥, 朱佩平, 伊福廷, 黄万霞 2010 59 1977]
[15] Le Z C, Zhang M, Dong W, Quan B S, Liu W, Liu K 2010 Acta Phys. Sin. 59 6284(in Chinese) [乐孜纯, 张明, 董文, 全必胜, 刘魏, 刘恺 2010 59 6284]
[16] Yao Q J 1989 Optical tutorial (Second Edition) (Beijing: Higher Education Press) p210 (in Chinese) [姚启钧1989光学教程(第二版) (北京: 高等教育出版社)第210页]
[17] Le Z C, Liang J Q 2003 J. Opt. A: Pure & Appl. Opt. 5 374
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