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Surface photonic crystal (PC) structure can improve the external quantum efficiency of light-emitting diode (LED). However, it is very difficult to fabricate large area and uniform nanometer photonic crystal structure in this field. In this paper, two-dimensional PC with hole-like structure is successfully transferred to the surface of gallium nitride LED (GaN-LED) by the mental-polymer double-layer mask dry etching technology combined with the nanoimprint lithography. The large area nanometer PC patterns with pore diameter of 240 nm and period of 450 nm are obtained. The results show that the photoluminescence peak intensity of LED with the PC structure is 7.2 times higher than that of the conventional LED.
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Keywords:
- photonic crystal /
- nanoimprint lithography /
- light-emitting diode
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[9] Ichikawa H, Baba T 2004 Appl. Phys. Lett. 84 457
[10] Kim D H 2005 Appl. Phys. Lett. 87 3508
[11] Long D H, Hwang I K, Ryu S W 2009 IEEE J. Sele. Top. Quan. Electro. 15 1257
[12] Lee J, Kim D H, Kim J, Jeon H 2009 Cur. Appl. Phys. 9 633
[13] Liu W, Wang L 2010 China Communications 7 134
[14] Jung G Y 2006 Nano. Lett. 6 351
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[1] Borodisky M, Yablonovitch E 1997 Proc. SPIE 3002 119
[2] Xiong W 2009 M. S. Dissertation (Wuhan: Huazhong University of Science and Technoligy) (in Chinese) [熊慰 2009 硕士学位论文(武汉:华中科技大学)]
[3] Lee K S, Kang E J, Park S J 2003 J. Appl. Phys. 93 9383
[4] Wierer J J 2001 Appl. Phys. Lett. 78 3379
[5] Kim J K, Gessmann T, Luo H, Schubert E F 2004 Appl. Phys. Lett. 84 4508
[6] Yablonovitch E 1987 Phys. Rev. Lett. 58 2059
[7] Fan S, Villeneuve P R 1997 Phys. Rev. Lett. 78 3294
[8] Li X L, 2009 Ph. D. Dissertation (Shanghai: Shanghai Jiaotong University) (in Chinese) [李小丽 2009 博士学位论文(上海: 上海交通大学)]
[9] Ichikawa H, Baba T 2004 Appl. Phys. Lett. 84 457
[10] Kim D H 2005 Appl. Phys. Lett. 87 3508
[11] Long D H, Hwang I K, Ryu S W 2009 IEEE J. Sele. Top. Quan. Electro. 15 1257
[12] Lee J, Kim D H, Kim J, Jeon H 2009 Cur. Appl. Phys. 9 633
[13] Liu W, Wang L 2010 China Communications 7 134
[14] Jung G Y 2006 Nano. Lett. 6 351
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