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采用射频反应磁控溅射法在316L不锈钢基片上分别沉积了两种薄膜: 一种是氟化类金刚石薄膜(F-DLC), 另一种是先镀上一定厚度的SiC过渡层再沉积F-DLC. 着重研究了薄膜的附着力随过渡层制备条件的变化规律.结果显示, 增加SiC过渡层后薄膜的附着力明显增加, 且附着力随SiC过渡层的制备条件有所变化, 在射频输入功率为200 W, 沉积时间5 min制备出的SiC过渡层上再沉积F-DLC时, 附着力可达8.7 N, 远高于未加过渡层时F-DLC膜的附着力(4 N). 通过研究SiC的沉积速率曲线、表面形貌和红外光谱, 探讨了SiC过渡层及其制备条件影响薄膜附着力的相关机制.Two kinds of films are deposited on 316L stainless steel substrates by radio frequency reactive magnetron sputtering technique. One is fluorinated diamond-like carbon film (F-DLC) deposited on the 316L stainless steel substrate directly and the other is F-DLC with SiC intermediate layer. This paper focuses on the changing regulation of film adhesion with preparation condition. As the result, the adhesion of fluorinated diamond-like carbon film with SiC intermediate layer is obviously much better than that of F-DLC, and the adhesion is dependent on preparation condition of preparation SiC intermediate layer. The adhesion of F-DLC can reach 8.7 N with 200 W RF input power and 5 min deposition time, which is much bigger than the adhesion of F-DLC without intermediate layer (4 N). The mechanism of the preparation condition of SiC influencing the adhesive force of F-DLC is studied by investigating the deposition rate curve, surface morphology and infrared spectrum.
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Keywords:
- F-DLC /
- SiC intermediate layer /
- infrared spectrogram /
- adhesion
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[1] Yu Y T, Zhang X D 2000 Biomedical Material (Tianjin: Tianjin University Press) p20 (in Chinese) [俞耀庭, 张兴栋 2000 生物医用材料 (天津: 天津大学出版社) 第20页]
[2] Shi C X, Li H D, Zhou L 2004 Material Science and Engineering Manuals (Art.12) (Beijing: Chemical Industry Press) p130 (in Chinese) [师昌绪, 李恒德, 周 廉 2004 材料科学与工程手册(第12篇) (北京:化学工业出版社) 第130页]
[3] Gu H Q, Xu G F 1993 Biomedical Materials (Tianjin: Tianjin Science and Technology Press) p30 (in Chinese) [顾汉卿, 徐国风 1993 生物医学材料学 (天津:天津科技翻译出版社) 第30页]
[4] Black J, Hastings G 1998 Handbook of Biomaterial Properties (London: Chapman & Hall) p32
[5] Park J B , Kim Y K 2003 Biomaterials Principles and Applications (Boca Raton: CRC Press) p1
[6] Brunski J B 2004 Biomaterials Science on Introduction to Materials in Medicine (San Diego: Elsevier Academic Press) p137
[7] Gorbet M B, Sefton M V 2004 Biomaterials 25 5681
[8] Armitage D A, Parker T L, Grant D M 2003 Biomed. Mater. Res. A 66 129
[9] Gutensohn K, Beythien C, Bau J, Fenner T, Grewe P, Koester R, Padmanaban K, Kuehnl P 2000 Thrombosis Research 99 577
[10] Ding M H, Wang B L, Li L, Zheng Y F 2010 Surf. Coat. Technol. 204 2519
[11] Wang P J, Jiang M F, Xin Y, Du J L, Dai Y F 2010 Acta Phys. Sin. 59 8902 (in Chinese) [王培君, 江美福, 辛煜, 杜记龙, 戴永丰 2010 59 8902]
[12] Dai Y F, Jiang M F, Yang Y S, Zhou Y 2011 Acta Phys. Sin. 60 118101 (in Chinese) [戴永丰, 江美福, 杨亦赏, 周杨 2011 60 118101]
[13] Hakovirta M, He X M, Nastasi M 2000 Appl. Phys. 88 1456
[14] Hasebe T, Yohena S, Kamijo A, Okazaki Y, Hotta A, Takahashi K, Suzuki T 2007 Biomed. Mater. Res. A 83 1192
[15] Hasebe T, Ishimaru T, Kamijo A, Yoshimoto Y, Yoshimura T, Yohena S, Kodama H, Hotta A, Takahashi K, Suzuki T 2007 Diamond Relat. Mater. 16 1343
[16] Cooper J A, Agarwal A K, Hara K 1999 IEEE Trans. Electron Dev. 46 442
[17] Yang Y S, Jiang G, Zhou Y, Jiang M F 2012 J. Suzhou Univ. 82 51 (in Chinese) [杨亦赏, 江舸, 周杨, 江美福, 苏州大学学报 82 51]
[18] Ollendorf H, Schneider D 1999 Surf. Coat. Technol. 113 86
[19] Yuan Y, Yin M 2006 Chin. J. Biomed. Eng. 25 95 (in Chinese) [袁媛, 尹民 2006 中国生物医学工程学报 25 95]
[20] He J, Xin Y, Ye C, Ning Z Y, Sun G 2006 J. Funct. Mater. 37 2010 (in Chinese) [贺洁, 辛煜, 叶超, 宁兆元, 孙钢 2006 功能材料 37 2010]
[21] Jiang M F, Ning Z Y 2006 Surf. Coat. Technol. 200 3682
[22] Jiang M F, Ning Z Y 2005 J. Non-Cryst. Solids. 351 2462
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