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The spectroscopy is the ultimate way for chemical analysis. This paper mainly describes the idea of an air-sensitive sensor based on MEMS technology, and more over, a photonic crystal (PC) beam splitter was designed, which can achieve high resolution beam steering, and this improves the resolution of the sensor. The paper offers a new idea and lays the foundation for the novel beam splitter that applied to many optical systems.
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Keywords:
- air-sensitive sensor /
- photonic crystal (PC) /
- superprism /
- negative refraction
[1] Gao C Q, Jiao B B, Liu M Z, Li Q B,Yang K, Shi S L, Li Z G, Ou Y, Jing Y P, Chen D P 2008 Journal of Semiconductors 29 142 (in Chinese) [高超群、焦斌斌、刘茂哲、李全宝、杨 锴、石莎莉、李志刚、欧 毅、景玉鹏、陈大鹏 2008 半导体学报 29 142]
[2] Rajic Slobodan,Datskos Panagiotis, George,EGERT, Marybeth 2000 U.S. Patent 006075
[3] Kong S H, Wijingaards D D L, Wolffenbuttel R F 2001 Sensors and Actuators A 92 88
[4] Kosaka H, Kawashima T, Tomita A, Notomi M, Tamamura T, Sato T, Kawakami S 1998 Phys. Rev. B 58 R10096
[5] Yablonovitch E 1987 Phys. Rev. Lett. 58 2059
[6] John S 1987 Phys. Rev. Lett. 58 2486
[7] Momeni B, Adibi A 2003 Appl. Phys. B 77 555
[8] Li S G, Zhang W, Wei Z Y, Zhou G Y, Hou L T 2009 Chin. Phys. B 18 1996
[9] Sun X Z, Gu P F, Ni X Y, Li M Y, Liu X, Shen W D, Zhang Y G 2008 Opt. A:Pure Appl. Opt. 10 025301:1
[10] Zhao X X, Zhu Q F, Zhang Y 2009 Chin. Phys. B 18 2864
[11] Toshihiko Baba, Masanori Nakamura 2002 IEEE Journal of Quantum Electronics 38 909
[12] An H Z, Wu T, Jiang P X, Xie Y 1993 Chinese Journal of Lasers 20 434 (in Chinese) [安浩哲、吴 铁、蒋佩旋、谢 毅 1993 中国激光 20 434]
[13] Lian C Z, Lü Z, Xu X C 2004 Environmental Monitoring in China 20 17 (in Chinese) [连晨舟、吕子安、徐旭常 2004 中国环境监测 20 17]
[14] Ye J Y, Matsuo S, Mizeikis V, Misawa H 2004 Appl. Phys. 96 6934
[15] Zhang L, Zhang X Y, Zhang F J, Yao H M, Du C L, Liu Q, Pan L 2004 Opto-Electronic Engineering 31 1 (in Chinese) [张 磊、张晓玉、张福甲、姚汉民、杜春雷、刘 强、潘 莉 2004 光电工程 31 1]
[16] Zhou M, Chen X S, Xu J, Zeng Y, Wu Y R, Lu W, Wang L W, Chen Y 2005 Acta Phys. Sin. 54 411 (in Chinese) [周 梅、陈效双、徐 靖、曾 勇、吴砚瑞、陆 卫、王连卫、陈 瑜 2005 54 411]
[17] Zhang W Y, Ji J R, Yuan X D, Ye W M, Zhu Z H 2005 Journal of Semiconductors 26 941 (in Chinese) [张晚云、季家榕、袁晓东、叶卫民、朱志宏 2005 半导体学报 26 941]
[18] Xu X S, Xiong Z G, Jin A Z, Chen H D, Zhang D Z 2007 Acta Phys. Sin. 56 916 (in Chinese) [许兴胜、熊志刚、金爱子、陈弘达、张道中 2007 56 916]
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[1] Gao C Q, Jiao B B, Liu M Z, Li Q B,Yang K, Shi S L, Li Z G, Ou Y, Jing Y P, Chen D P 2008 Journal of Semiconductors 29 142 (in Chinese) [高超群、焦斌斌、刘茂哲、李全宝、杨 锴、石莎莉、李志刚、欧 毅、景玉鹏、陈大鹏 2008 半导体学报 29 142]
[2] Rajic Slobodan,Datskos Panagiotis, George,EGERT, Marybeth 2000 U.S. Patent 006075
[3] Kong S H, Wijingaards D D L, Wolffenbuttel R F 2001 Sensors and Actuators A 92 88
[4] Kosaka H, Kawashima T, Tomita A, Notomi M, Tamamura T, Sato T, Kawakami S 1998 Phys. Rev. B 58 R10096
[5] Yablonovitch E 1987 Phys. Rev. Lett. 58 2059
[6] John S 1987 Phys. Rev. Lett. 58 2486
[7] Momeni B, Adibi A 2003 Appl. Phys. B 77 555
[8] Li S G, Zhang W, Wei Z Y, Zhou G Y, Hou L T 2009 Chin. Phys. B 18 1996
[9] Sun X Z, Gu P F, Ni X Y, Li M Y, Liu X, Shen W D, Zhang Y G 2008 Opt. A:Pure Appl. Opt. 10 025301:1
[10] Zhao X X, Zhu Q F, Zhang Y 2009 Chin. Phys. B 18 2864
[11] Toshihiko Baba, Masanori Nakamura 2002 IEEE Journal of Quantum Electronics 38 909
[12] An H Z, Wu T, Jiang P X, Xie Y 1993 Chinese Journal of Lasers 20 434 (in Chinese) [安浩哲、吴 铁、蒋佩旋、谢 毅 1993 中国激光 20 434]
[13] Lian C Z, Lü Z, Xu X C 2004 Environmental Monitoring in China 20 17 (in Chinese) [连晨舟、吕子安、徐旭常 2004 中国环境监测 20 17]
[14] Ye J Y, Matsuo S, Mizeikis V, Misawa H 2004 Appl. Phys. 96 6934
[15] Zhang L, Zhang X Y, Zhang F J, Yao H M, Du C L, Liu Q, Pan L 2004 Opto-Electronic Engineering 31 1 (in Chinese) [张 磊、张晓玉、张福甲、姚汉民、杜春雷、刘 强、潘 莉 2004 光电工程 31 1]
[16] Zhou M, Chen X S, Xu J, Zeng Y, Wu Y R, Lu W, Wang L W, Chen Y 2005 Acta Phys. Sin. 54 411 (in Chinese) [周 梅、陈效双、徐 靖、曾 勇、吴砚瑞、陆 卫、王连卫、陈 瑜 2005 54 411]
[17] Zhang W Y, Ji J R, Yuan X D, Ye W M, Zhu Z H 2005 Journal of Semiconductors 26 941 (in Chinese) [张晚云、季家榕、袁晓东、叶卫民、朱志宏 2005 半导体学报 26 941]
[18] Xu X S, Xiong Z G, Jin A Z, Chen H D, Zhang D Z 2007 Acta Phys. Sin. 56 916 (in Chinese) [许兴胜、熊志刚、金爱子、陈弘达、张道中 2007 56 916]
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