Nd:YAG纳秒激光诱导硅表面微结构的演化

袁春华; 李晓红; 唐多昌; 杨宏道; 李国强

doi:10.7498/aps.59.7015

摘要

利用Nd:YAG纳秒激光(波长为532和355 nm)对单晶硅在真空中进行了累积脉冲辐照,研究了表面微结构的演化情况.在激光辐照的初始阶段,532和355 nm激光脉冲均在硅表面诱导出了波纹结构,后者辐照硅表面后形成了近似同心但稍显混乱的环形波纹结构.随着脉冲数的增加,波纹结构逐渐演化为一种类似珠形的凹凸结构,最后形成准规则排列的微米量级锥形结构,该微结构的生长依赖于表面张力波和结构自组织.分析发现,形成的交叉环形结构主要是在355 nm激光辐照硅的过程中,表面张力波导致波纹结构部分叠加的结果.

关键词:

Abstract

We investigate the evolution of surface microstructure created on single crystal silicon wafer by irradiation of cumulative Nd:YAG nanosecond laser pulses (wavelength 532 or 355 nm) in vacuum. The wavy structures are formed on silicon surface by 532 or 355 nm laser on early stage of laser pulse irradiation, and nearly concentric but slightly disordered semi-circular rings are formed under 355 nm laser pulse irradiation. With the number of laser pulses increasing, the structures gradually evolved into the concave-convex structures which are similar to the beads. And finally quasi-ordered arrays of conical spikes are formed. The growth of these microstructures depends on the capillary waves and self-organization of structures. We find that the cross-ring structures are caused by the superposition of some wavy structures created by capillary waves in the process of 355 nm laser pulses irradiation.

Keywords:

作者及机构信息

1.
西南科技大学理学院激光与光电子实验室,极端条件物质特性实验室,绵阳 621010

基金项目: 四川省教育厅青年基金(批准号: 08ZB006)和西南科技大学博士研究基金(批准号: 06ZX7113)资助的课题.

Authors and contacts

1.
College of Science, Southwest University of Science and Technology, Laboratory of Matter Characteristic Research Under Extreme Condition, Laser and Plotoelectron Laboratory, Mianyang 621010, China

参考文献

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[17]	Halbwax M, Sarnet T, Delaporte P H, Sentis M, Etienne H, Torregrosa F, Vervisch V, Perichaud I, Martinuzzi S 2008 Thin Solid Films 516 6791
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[19]	Crawford T H R, Haugen H K 2007 Appl. Surf. Sci. 253 4970
[20]	Pedraza A J, Fowlkes J D, Jesse S, Mao C, Lowndes D H 2000 Appl. Surf. Sci. 168 251
[21]	Kolasinski K W 2007 Curr. Opin. Solid St. M. 11 76
[22]	Bloembergen N 1979 Am. Inst. Phys. Conf. Proc. 50 1
[23]	Shen M Y, Crouch C H, Carey J E, Younkin R, Mazur E, Sheehy M, Friend C M 2003 Appl. Phys. Lett. 82 1715
[24]	DAnna E, Luby S, Luches A, Majkova E, Martino M 1993 Appl. Phys. A 56 429
[25]	Ben-Yakar A, Byer R L, Harkin A 2003 Appl. Phys. Lett. 83 3030
[26]	Hardy S C 1984 J. Cryst. Growth 69 456
[27]	Bassam M A, Parvin P, Sajad B, Moghimiet A, Coster H 2008 Appl. Surf. Sci. 254 2621

施引文献

[1]	Deng Y P, Jia T Q, Leng Y X, Lu H H, Li R X, Xu Z Z 2004 Acta Phys. Sin. 532216 (in Chinese) [邓蕴沛、贾天卿、冷雨欣、陆海鹤、李儒新、徐至展 2004 53 2216]
[2]	Li C B, Jia T Q, Sun H Y, Li X X, Xu S Z, Feng D H, Wang X F, Ge X C, Xu Z Z 2006 Acta Phys. Sin. 55 217 (in Chinese) [李成斌、贾天卿、孙海轶、李晓溪、徐世珍、冯东海、王晓峰、葛晓春、徐至展 2006 55 217]
[3]	Yu B H, Dai N L, Wang Y, Li Y H, Ji L L, Zheng Q G, Lu P X 2007 Acta Phys. Sin. 56 5821 (in Chinese)[余本海、戴能利、王英、李玉华、季玲玲、郑启光、陆培祥 2007 56 5821]
[4]	Huang W Q, Xu L, Wang H X, Jin F, Wu K Y, Liu S R, Qin C J, Qin S J 2008 Chin. Phys. B 17 1817
[5]	Yang Y, Wang C, Yang R D, Li L, Xiong F, Bao J M 2009 Chin. Phys. B 18 4906
[6]	Bimbaum M, Stocker T L 1966 J. Appl. Phys. 17 461
[7]	Young J F, Preston J S, van Driel H M, Sipe J E 1983 Phys. Rev. B 27 1141
[8]	Faucets P M, Siegman A E 1982 Appl. Phys. Lett. 40 824
[9]	Rudolph P, Kautek W 2004 Thin Solid Films 453 537
[10]	Bolle M, Lazare S 1993 Appl. Surf. Sci. 69 31
[11]	Dolgaev S I, Lavrishev S V, Lyalin A A, Simakin A V, Voronov V V, Shafeev G A 2001 Appl. Phys. A 73 177
[12]	Her T H, Finlay R J, Wu C, Deliwala S, Mazur E 1998 Appl. Phys. Lett. 73 1673
[13]	Pedraza A J, Fowlkes J D, Lowndes D H 1999 Appl. Phys. Lett. 74 2322
[14]	Younkin R, Carey J E, Mazur E, Levinson J A, Friend C M 2003 J. Appl. Phys. 93 2626
[15]	Crouch C H, Carey J E, Shen M, Mazur E, Genin F Y 2004 Appl. Phys. A 79 1635
[16]	Huang Z H, Carey J E, Liu M G, Guo X Y, Mazur E, Campbellet J C 2006 Appl. Phys. Lett. 89 033506
[17]	Halbwax M, Sarnet T, Delaporte P H, Sentis M, Etienne H, Torregrosa F, Vervisch V, Perichaud I, Martinuzzi S 2008 Thin Solid Films 516 6791
[18]	Wang R, Yang J J, Liang C Y, Wang H S, Han W, Yang Y 2009 Acta Phys. Sin. 58 5429(in Chinese) [王锐、杨建军、梁春永、王洪水、韩伟、杨阳 2009 58 5429]
[19]	Crawford T H R, Haugen H K 2007 Appl. Surf. Sci. 253 4970
[20]	Pedraza A J, Fowlkes J D, Jesse S, Mao C, Lowndes D H 2000 Appl. Surf. Sci. 168 251
[21]	Kolasinski K W 2007 Curr. Opin. Solid St. M. 11 76
[22]	Bloembergen N 1979 Am. Inst. Phys. Conf. Proc. 50 1
[23]	Shen M Y, Crouch C H, Carey J E, Younkin R, Mazur E, Sheehy M, Friend C M 2003 Appl. Phys. Lett. 82 1715
[24]	DAnna E, Luby S, Luches A, Majkova E, Martino M 1993 Appl. Phys. A 56 429
[25]	Ben-Yakar A, Byer R L, Harkin A 2003 Appl. Phys. Lett. 83 3030
[26]	Hardy S C 1984 J. Cryst. Growth 69 456
[27]	Bassam M A, Parvin P, Sajad B, Moghimiet A, Coster H 2008 Appl. Surf. Sci. 254 2621

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