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The plasma surface wave propagation in a rectangular structured device is simulated using the finite-difference time-domain method. The effect of device parameters on the propagation of plasma surface wave excited by slot antenna array is investigated. The parameters considered include the relative permittivity and thickness of dielectric slab, and the air gap on the top of dielectric slab. Appropriate parameters for the relative permittivity and thickness of dielectric slab are obtained through simulations, and it is found that the existence of air gap would greatly weaken the excitation of surface wave. The simulation results provide a good reference for the design optimization of large-scale rectangular surface-wave plasma source.
[1] ［1］ Sugai H, Ghanashev I, Nagatsu M 1998 Plasma Sour. Sci. Technol. 7 192
[2] ［2］ Ghanashev I, Nagatsu M, Morita S, Sugai H 1998 J. Vac. Sci. Technol. A 16 1537
[3] ［3］ Nagatsu M, Morita S, Ghanashev I, Ito A, Toyoda N, Sugai H J 2000 Physica D 33 1143
[4] ［4］ Ghanashev I, Sugai H 2000 Phys. Plasmas 7 3051
[5] ［5］ Ganashev I, Nagatsu M, Sugai H 1997 Jpn. J. Appl. Phys. 36 337
[6] ［6］ Wu T J, Guan W J, Tsai C M 2001 Phys. Plasmas 8 3195
[7] ［7］ Nagatsu M, Ghanashev I, Sugai H 1998 Plasma Sour. Sci. Technol. 7 230
[8] ［8］ Nagatsu M, Naito K, Ogino A, Nanko S 2006 Plasma Sour. Sci. Technol. 15 37
[9] ［9］ Yasaka Y, Koga K 2002 Phys. Plasmas 9 1029
[10] ］ Ou Q R, Liang R Q 2002 Vac. Low Temp. 8 28 (in Chinese) ［欧琼荣、梁荣庆 2002 真空与低温 8 28］
[11] ］ Zhan R J, Wu C F, Wen X H, Zhu X D, Zhou H Y 2001 Vac. Sci. Techn. 21 30 (in Chinese) ［詹如娟、吴丛凤、温晓辉、朱晓东、周海洋 2001 真空科学与技术 21 30］
[12] ］ Liang Y Z, Ou Q R, Liang B, Liang R Q 2008 Chin. Phys. Lett. 25 1761
[13] ］ Liu M H, Sugai H, Hu X W, Ishijima T, Jiang Z H, Li B, Dan M 2006 Acta Phys. Sin. 55 5905 (in Chinese) ［刘明海、菅井秀郎、胡希伟、石岛芳夫、江中和、李斌、但敏 2006 55 5905］
[14] ］ Chen Z Q, Zhou P Q, Chen W, Lan C H, Liu M H, Hu X W 2008 Plasma Sci. Technol. 10 655
[15] ］ Lan C H, Chen Z Q, Liu M H, Hu X W 2009 Plasma Sci. Technol. 11 66
[16] ］ Lan C H, Hu X W, Liu M H 2009 Chin. Phys. Lett. 26 035204
[17] ］ Taflove A 1995 Computational Electrodynamics: the Finite-Difference Time-Domain Method (Boston: Artech House)
[18] ］ Chen Q, Aoyagi H P, Katsurai M 1999 IEEE Trans. Plasma Sci. 27 164
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[1] ［1］ Sugai H, Ghanashev I, Nagatsu M 1998 Plasma Sour. Sci. Technol. 7 192
[2] ［2］ Ghanashev I, Nagatsu M, Morita S, Sugai H 1998 J. Vac. Sci. Technol. A 16 1537
[3] ［3］ Nagatsu M, Morita S, Ghanashev I, Ito A, Toyoda N, Sugai H J 2000 Physica D 33 1143
[4] ［4］ Ghanashev I, Sugai H 2000 Phys. Plasmas 7 3051
[5] ［5］ Ganashev I, Nagatsu M, Sugai H 1997 Jpn. J. Appl. Phys. 36 337
[6] ［6］ Wu T J, Guan W J, Tsai C M 2001 Phys. Plasmas 8 3195
[7] ［7］ Nagatsu M, Ghanashev I, Sugai H 1998 Plasma Sour. Sci. Technol. 7 230
[8] ［8］ Nagatsu M, Naito K, Ogino A, Nanko S 2006 Plasma Sour. Sci. Technol. 15 37
[9] ［9］ Yasaka Y, Koga K 2002 Phys. Plasmas 9 1029
[10] ］ Ou Q R, Liang R Q 2002 Vac. Low Temp. 8 28 (in Chinese) ［欧琼荣、梁荣庆 2002 真空与低温 8 28］
[11] ］ Zhan R J, Wu C F, Wen X H, Zhu X D, Zhou H Y 2001 Vac. Sci. Techn. 21 30 (in Chinese) ［詹如娟、吴丛凤、温晓辉、朱晓东、周海洋 2001 真空科学与技术 21 30］
[12] ］ Liang Y Z, Ou Q R, Liang B, Liang R Q 2008 Chin. Phys. Lett. 25 1761
[13] ］ Liu M H, Sugai H, Hu X W, Ishijima T, Jiang Z H, Li B, Dan M 2006 Acta Phys. Sin. 55 5905 (in Chinese) ［刘明海、菅井秀郎、胡希伟、石岛芳夫、江中和、李斌、但敏 2006 55 5905］
[14] ］ Chen Z Q, Zhou P Q, Chen W, Lan C H, Liu M H, Hu X W 2008 Plasma Sci. Technol. 10 655
[15] ］ Lan C H, Chen Z Q, Liu M H, Hu X W 2009 Plasma Sci. Technol. 11 66
[16] ］ Lan C H, Hu X W, Liu M H 2009 Chin. Phys. Lett. 26 035204
[17] ］ Taflove A 1995 Computational Electrodynamics: the Finite-Difference Time-Domain Method (Boston: Artech House)
[18] ］ Chen Q, Aoyagi H P, Katsurai M 1999 IEEE Trans. Plasma Sci. 27 164
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