Search

x
中国物理学会期刊
Advanced Search
Liu Xian-Ming, Li Bin-Cheng, Gao Wei-Dong, Han Yan-Ling. Infrared spectroscopic ellipsometry studies of ion-implanted and annealed silicon wafersJ. Acta Physica Sinica, 2010, 59(3): 1632-1637. DOI: 10.7498/aps.59.1632
Citation: Liu Xian-Ming, Li Bin-Cheng, Gao Wei-Dong, Han Yan-Ling. Infrared spectroscopic ellipsometry studies of ion-implanted and annealed silicon wafersJ. Acta Physica Sinica, 2010, 59(3): 1632-1637. DOI: 10.7498/aps.59.1632
shu

Infrared spectroscopic ellipsometry studies of ion-implanted and annealed silicon wafers

Acta Phys. Sin., 2010, 59(3): 1632-1637.
DOI: 10.7498/aps.59.1632
CSTR: 32037.14.aps.59.1632
PDF
导出引用

  • Abstract

    Authors and contacts

    References

Turn off MathJax
Article Contents

Catalog

    /

    DownLoad:  Full-Size Img  PowerPoint
    Return
    Return
    Baidu
    map