Investigation of the model of the discharge properties of the unbalanced magnetron sputtering system

Mu Zong-Xin; Li Guo-Qing; Che De-Liang; Huang Kai-Yu; Liu Cui

doi:10.7498/aps.53.1994

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Mu Zong-Xin, Li Guo-Qing, Che De-Liang, Huang Kai-Yu, Liu Cui. Investigation of the model of the discharge properties of the unbalanced magnetron sputtering systemJ. Acta Physica Sinica, 2004, 53(6): 1994-1999. DOI: 10.7498/aps.53.1994

Citation:

Mu Zong-Xin, Li Guo-Qing, Che De-Liang, Huang Kai-Yu, Liu Cui. Investigation of the model of the discharge properties of the unbalanced magnetron sputtering systemJ. Acta Physica Sinica, 2004, 53(6): 1994-1999. DOI: 10.7498/aps.53.1994

Citation:

Mu Zong-Xin, Li Guo-Qing, Che De-Liang, Huang Kai-Yu, Liu Cui. Investigation of the model of the discharge properties of the unbalanced magnetron sputtering systemJ. Acta Physica Sinica, 2004, 53(6): 1994-1999. DOI: 10.7498/aps.53.1994