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隧道磁阻（ Tunneling Magnetoresistance,TMR）传感器作为新一代高性能磁传感技术的代表，凭借其高灵敏度、低功耗、宽频响及优异的集成性，在工业自动化、新能源汽车、生物医疗和智能电网等领域展现出广泛应用前景。本文系统综述了TMR磁传感器的性能优化策略，重点从薄膜材料体系与敏感结构设计两个维度展开分析。在材料体系方面，详细探讨了高灵敏TMR材料体系和宽量程TMR材料体系的发展现状与优化思路；在结构设计方面，系统阐述了MTJ几何形状优化、磁轭结构设计、磁通聚集器集成及噪声调制技术等创新方案。文章还总结了TMR传感器在生物医疗和智能电网等前沿领域的应用进展，并对未来发展方向进行展望：开发更高灵敏度与更宽量程的TMR材料体系、实现一体化高性能三轴TMR磁矢量传感、探索TMR与人工智能的深度融合等。本文为TMR磁传感器的性能突破与应用拓展提供了系统性参考，对推动其在高精度磁场探测领域的深入应用具有重要指导意义。Tunneling Magnetoresistance (TMR) sensors have emerged as a leading technology in high-performance magnetic sensing, distinguished by their high sensitivity, low power consumption, and miniaturization. To address the evolving demands of cutting-edge applications like biomagnetic imaging and smart grid monitoring, continuous performance enhancement is crucial. This review systematically outlines the key strategies for optimizing TMR sensors, focusing on thin-film material engineering and sensitive microstructure design. Material advancements are dissected along two paths: developing high-sensitivity systems via MgO barriers and composite free layers, and creating wide-linear-range systems through anisotropy engineering, including both perpendicular (PMA) and in-plane (IMA) configurations, as well as dynamic methods like electric-field and strain modulation. Structurally, we highlight innovations such as vortex-state MTJs and magnetic flux concentrators to enhance linearity and sensitivity, alongside advanced noise modulation techniques that effectively suppress low-frequency 1/f noise. The practical impact of these optimizations is evidenced by TMR sensors now capable of measuring magnetocardiograms (MCG) outside shielded environments and providing high-accuracy current sensing in smart grids. Future development is directed towards novel material systems that balance high sensitivity with a wide linear range, the realization of monolithic three-axis vector sensors, and the deep integration of TMR technology with artificial intelligence for smart sensing systems. This work provides a comprehensive reference for advancing TMR sensor technology and its applications in high-precision magnetic field detection.
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Keywords:
- TMR magnetic sensor /
- performance optimization /
- thin film material /
- MTJ structure design
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