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在射频容性耦合尘埃等离子体放电中，下极板凹槽通过影响鞘层里的电势分布，进而对尘埃颗粒的集体行为产生显著影响。实验中通过在腔室内撒入微米级直径的尘埃颗粒，观察到其在下电极凹槽势阱上方分层出现，整体呈“碗状”云分布。尘埃云的体积大小随射频功率和放电气压的变化而变化。尘埃空洞在每层尘埃颗粒的中心出现，其直径大小和变化受尘埃颗粒数量，射频功率和放电气压影响。此外，基于流体模型和尘埃粒子模型建立混合模型，模拟发现尘埃颗粒的集体行为主要由其所受的轴向合力（考虑轴向电场力、离子拖拽力和重力）和径向合力（考虑径向电场力和离子拖拽力）决定。实验发现，通过在射频电极施加负直流偏压，尘埃颗粒悬浮高度先增加后下降，悬浮高度的变化能够较直观地反映等离子体放电从α-γ模式的转变。
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关键词:
- 射频容性耦合等离子体 /
- 尘埃空洞 /
- 混合模型 /
- 负直流偏压
In a capacitively coupled radio-frequency dusty plasma discharge, the groove structure on the lower electrode significantly modulates the electric potential distribution within the sheath region, thereby strongly influencing the collective dynamics of dust particles. Experimentally, when micrometer-sized dust particles are injected into the discharge chamber, a clearly stratified suspension forms above the potential well created by the electrode groove, exhibiting a characteristic 'bowl-shaped' cloud structure. The macroscopic dimensions of the dust cloud, such as its vertical thickness and radial expansion, vary noticeably with changes in RF power and gas pressure. Moreover, a dust void is observed in the central region of each particle layer; its diameter and evolution are jointly determined by the dust particle density, RF power, and gas pressure. A hybrid model, which couples a fluid description with the equation of motion for dust particles, indicates that the suspension and arrangement of dust particles are predominantly determined by a balance of axial and radial forces. The axial forces include the electrostatic force from the sheath electric field, the ion drag force, and gravity, while the radial forces primarily arise from the radial component of the electric field and the corresponding ion drag force. Further experimental results show that applying a negative DC bias to the RF electrode causes the levitation height of the dust particles to first increase and then decrease with increasing bias voltage, exhibiting a non-monotonic trend. This shift in levitation height can be regarded as a clear indicator of the transition of the plasma discharge from the α-mode to the γ-mode. -
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