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Transmission grating is widely used in measurement of soft X rays. In order to measure the diffraction efficiencies of the transmission grating which is used in laser fusion, the transmission grating was calibrated on Beijing Synchrotron Radiation Facility in the energy region from 200eV to 1600eV, and the experimental results have been obtained. The model for grating efficiency simulation has been developed and calculations using a new so called 7-side quasi-trapezoidal cross section model were carried out. The results from the new model are in good agreement with the experimental data. The exact grating wire cross section is described.
[1] Dijkstra J H, Lantwaard L J 1975 Opt. Commum. 15 300
[2] Brauninger H, Kraus H, Dangschat H, Beuermann K P, Predehl P, Trumper J 1979 Appl. Opt. 18 3502
[3] Arakawa E T, Caldwell P J 1980 Nucl. Instum. and Meth. 172 293
[4] Hawryluk A M 1981 J. Vac. Sci. Tech. 19 897
[5] Bionta R M 1987 Appl. Phys. Lett. 51 725
[6] Eidmann K, Kishimoto T, Herrmann P, Mizui J, Pakula R, Sigel R, Witkowski S 1986 Laser and Part. Beams. 4 521
[7] Mochizuki T, Yabe T, Okada K, Hamada M, Ikeda N, Kiyokawa S, Yamanaka C 1986 Phys .Rev. A 33 525
[8] Tsakiris G D, Herrmann P, Pakula R, Schmalz S, Sigel R, Witkowski S 1986 Europhys. Lett. 2 213
[9] Ceglio N M, Kauffman R L, Hawryluk A M, Medecki H 1983 Appl. Opt. 22 318
[10] Matthews D L, Hagelstein P L, Rosen M D, Eckart M J, Ceglio N M, Hazi A U, Medecki H, MacGowan B J, Trebes J E, Whitten B L, Campbell E M, Hatcher C W, Hawryluk A M, Kauffman R M, Pleasance L D, Rambach G, Scofield J H, Stone G, Weaver T A 1985 Phys. Rev. Lett. 54 110
[11] Li Y L, Bai W A, Chen S S, Xu Z Z 1989 Acta Optica Sinica 9 550 (in Chinese) [李跃林、白文安、陈时胜、徐至展 1989 光学学报 9 550]
[12] Wang Z S, Tian Z H, Chen B, Wang z, Gao J S, Tian X Z, Chen Z W, Fan P Z, Chen X D 1999 Spectroscopy and Spectral Analysis 19 875 (in Chinese) [王占山、田振华、陈 斌、王 智、高劲松、田兴志、陈志伟、范品忠、陈星旦 1999 光谱学与光谱分析 19 875]
[13] Deng J, Zhong F C, Qin L, Zhang Z Q, Xu Z Z 2000 Acta Optica Sinica 20 647 (in Chinese) [邓 健、钟方川、覃 岭、张正泉、徐至展 2000 光学学报 20 647]
[14] Zhao Y D, Cui M Q, Zhu P P, Cui C W 2000 High Energy Physics and Nuclear Physics 24 1403 (in Chinese) [赵屹东、崔明启、朱佩平、崔聪悟 2000 高能物理与核物理 24 1043]
[15] Zhu W Z, Wu Y Q, Guo Z, Zhu X L, Ma J, Xie C Q, Shi P X, Zhou H J, Huo T L, Tai R Z, Xu H J 1998 Acta Phys. Sin. 57 6386 (in Chinese) [朱伟忠、吴衍青、郭 智、朱效立、马 杰、谢常青、史沛熊、周洪军、霍同林、邰仁忠、徐洪杰 1998 57 6386]
[16] Zhu X L, Ma J, Xie C Q, Ye T C, Liu M, Cao L F, Yang J M, Zhang W H 2008 Acta Optica Sinica 28 1026 (in Chinese) [朱效立、马 杰、谢常青、叶甜春、刘 明、曹磊峰、杨家敏、张文海 2008 光学学报 28 1026]
[17] Liu L H, Liu G, Xiong Y, Huang X L, Chen J, Li W J, Tian J P, Tian Y C 2009 Optics and Precision Engineering 17 72 (in Chinese) [柳龙华、刘 刚、熊 瑛、黄新龙、陈 洁、李文杰、田金萍、田扬超 2009 光学精密工程 17 72]
[18] Schnopper H W, Van Speybroeck L P, Delvaille J P, Epstein A, Kallne E, Bachrach R Z, Dijkstra J, Lantward L 1977 Appl. Opt. 16 1088
[19] Brauninger H, Predehl P, Beuermann K P 1979 Appl. Opt. 18 368
[20] Yang J M, Yi R Q, Ma H L, Chen Z L, Wang H B, Sun K X, Wen S H, Zhen Z J, Tang D Y, Cui M Q, Li G, Cui C W 1996 Acta Optica Sinica 16 1631 (in Chinese) [杨家敏、易荣清、马洪良、陈正林、王红斌、孙可煦、温树槐、郑志坚、唐道源、崔明启、黎 刚、崔聪悟 1996 光学学报 16 1631]
[21] Yang J M, Yi R Q, Chen Z L, Sun K X, Ding Y N, Zhen Z J, Li C G, Cui M Q, Zhu P P, Cui C W 1998 Acta Phys. Sin. 47 613 (in Chinese) [杨家敏、易荣清、陈正林、孙可煦、丁耀南、郑志坚、李朝光、崔明启、朱佩平、崔聪悟 1998 47 613]
[22] Yang J M, Ding Y N, Cao L F, Ding Y K, Yang G H, Zhen Z J, Wang Y M, Zhang W H, Cui M Q, Zhu P P, Zhao Y D, Li G 2000 High Power Laser and Particle Beams 12 723 (in Chinese) [杨家敏、丁耀南、曹磊峰、丁永坤、杨国洪、郑志坚、王耀梅、张文海、崔明启、朱佩平、赵屹东、黎 刚 2000 强激光与粒子束 12 723]
[23] Born M, Wolf E 1964 Principles of Optics (New York: Macmillan) Chap. 8
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[1] Dijkstra J H, Lantwaard L J 1975 Opt. Commum. 15 300
[2] Brauninger H, Kraus H, Dangschat H, Beuermann K P, Predehl P, Trumper J 1979 Appl. Opt. 18 3502
[3] Arakawa E T, Caldwell P J 1980 Nucl. Instum. and Meth. 172 293
[4] Hawryluk A M 1981 J. Vac. Sci. Tech. 19 897
[5] Bionta R M 1987 Appl. Phys. Lett. 51 725
[6] Eidmann K, Kishimoto T, Herrmann P, Mizui J, Pakula R, Sigel R, Witkowski S 1986 Laser and Part. Beams. 4 521
[7] Mochizuki T, Yabe T, Okada K, Hamada M, Ikeda N, Kiyokawa S, Yamanaka C 1986 Phys .Rev. A 33 525
[8] Tsakiris G D, Herrmann P, Pakula R, Schmalz S, Sigel R, Witkowski S 1986 Europhys. Lett. 2 213
[9] Ceglio N M, Kauffman R L, Hawryluk A M, Medecki H 1983 Appl. Opt. 22 318
[10] Matthews D L, Hagelstein P L, Rosen M D, Eckart M J, Ceglio N M, Hazi A U, Medecki H, MacGowan B J, Trebes J E, Whitten B L, Campbell E M, Hatcher C W, Hawryluk A M, Kauffman R M, Pleasance L D, Rambach G, Scofield J H, Stone G, Weaver T A 1985 Phys. Rev. Lett. 54 110
[11] Li Y L, Bai W A, Chen S S, Xu Z Z 1989 Acta Optica Sinica 9 550 (in Chinese) [李跃林、白文安、陈时胜、徐至展 1989 光学学报 9 550]
[12] Wang Z S, Tian Z H, Chen B, Wang z, Gao J S, Tian X Z, Chen Z W, Fan P Z, Chen X D 1999 Spectroscopy and Spectral Analysis 19 875 (in Chinese) [王占山、田振华、陈 斌、王 智、高劲松、田兴志、陈志伟、范品忠、陈星旦 1999 光谱学与光谱分析 19 875]
[13] Deng J, Zhong F C, Qin L, Zhang Z Q, Xu Z Z 2000 Acta Optica Sinica 20 647 (in Chinese) [邓 健、钟方川、覃 岭、张正泉、徐至展 2000 光学学报 20 647]
[14] Zhao Y D, Cui M Q, Zhu P P, Cui C W 2000 High Energy Physics and Nuclear Physics 24 1403 (in Chinese) [赵屹东、崔明启、朱佩平、崔聪悟 2000 高能物理与核物理 24 1043]
[15] Zhu W Z, Wu Y Q, Guo Z, Zhu X L, Ma J, Xie C Q, Shi P X, Zhou H J, Huo T L, Tai R Z, Xu H J 1998 Acta Phys. Sin. 57 6386 (in Chinese) [朱伟忠、吴衍青、郭 智、朱效立、马 杰、谢常青、史沛熊、周洪军、霍同林、邰仁忠、徐洪杰 1998 57 6386]
[16] Zhu X L, Ma J, Xie C Q, Ye T C, Liu M, Cao L F, Yang J M, Zhang W H 2008 Acta Optica Sinica 28 1026 (in Chinese) [朱效立、马 杰、谢常青、叶甜春、刘 明、曹磊峰、杨家敏、张文海 2008 光学学报 28 1026]
[17] Liu L H, Liu G, Xiong Y, Huang X L, Chen J, Li W J, Tian J P, Tian Y C 2009 Optics and Precision Engineering 17 72 (in Chinese) [柳龙华、刘 刚、熊 瑛、黄新龙、陈 洁、李文杰、田金萍、田扬超 2009 光学精密工程 17 72]
[18] Schnopper H W, Van Speybroeck L P, Delvaille J P, Epstein A, Kallne E, Bachrach R Z, Dijkstra J, Lantward L 1977 Appl. Opt. 16 1088
[19] Brauninger H, Predehl P, Beuermann K P 1979 Appl. Opt. 18 368
[20] Yang J M, Yi R Q, Ma H L, Chen Z L, Wang H B, Sun K X, Wen S H, Zhen Z J, Tang D Y, Cui M Q, Li G, Cui C W 1996 Acta Optica Sinica 16 1631 (in Chinese) [杨家敏、易荣清、马洪良、陈正林、王红斌、孙可煦、温树槐、郑志坚、唐道源、崔明启、黎 刚、崔聪悟 1996 光学学报 16 1631]
[21] Yang J M, Yi R Q, Chen Z L, Sun K X, Ding Y N, Zhen Z J, Li C G, Cui M Q, Zhu P P, Cui C W 1998 Acta Phys. Sin. 47 613 (in Chinese) [杨家敏、易荣清、陈正林、孙可煦、丁耀南、郑志坚、李朝光、崔明启、朱佩平、崔聪悟 1998 47 613]
[22] Yang J M, Ding Y N, Cao L F, Ding Y K, Yang G H, Zhen Z J, Wang Y M, Zhang W H, Cui M Q, Zhu P P, Zhao Y D, Li G 2000 High Power Laser and Particle Beams 12 723 (in Chinese) [杨家敏、丁耀南、曹磊峰、丁永坤、杨国洪、郑志坚、王耀梅、张文海、崔明启、朱佩平、赵屹东、黎 刚 2000 强激光与粒子束 12 723]
[23] Born M, Wolf E 1964 Principles of Optics (New York: Macmillan) Chap. 8
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