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Support-mesh structures of a self-supporting transmission grating may decrease the transmission area and diffraction efficiency, thus exert a ill effect on the original diffraction pattern of the grating and make it complicated to apply, especially in soft X-ray region. To solve this problem, we put forward a method to realize a kind of totally self-supporting transmission grating by arranging the rectangular transmission holes in a high Z foil quasi-randomly. Based on Fraunhofer's diffraction theory, we make a theoretical analysis on the diffraction pattern of this new kind of grating. We also calculate the diffraction pattern of this new kind of grating based on the Kirchhoff's diffraction theory. What's more, we fabricated a sample grating of 1000 lines/mm using focused ion beam (FIB) technology and then tested it on beam line 4B7B on the Beijing synchrotron radiation facility. Theatrical analysis and experimental result both proved that the diffraction of the transmission grating can get rid of the bad influence of the support-mesh structures by using this new designed method. Such a methodology can profit applications of this kind of X-ray dispersive element in a wide field.
[1] Shang W L, Zhu T, Xiong G, Zhao Y, Zhang W H, Yi R Q, Kuang L Y, Cao L F, Gao Y L, Yang J M, Zhao Y D, Cui M Q, Zhen L, Han Y, Zhou K J, Ma C Y 2011 Acta Phys. Sin. 60 034216 (in Chinese) [尚万里, 朱托, 熊刚, 赵阳, 张文海, 易荣清, 况龙钰, 曹磊峰, 高宇林, 杨家敏, 赵屹东, 崔明启, 郑雷, 韩勇, 周克瑾, 马陈燕 2011 60 034216]
[2] Zhang Q Q, Wei L, Yang Z H, Qian F, Fan Q P, Zhang B, Gu Y Q, Cao L F 2014 Chin. Phys. B 23 044215
[3] Huang C L, Zhang J C, Diao K D, Zeng Y, Yi Y, Cao L F, Wang H B 2014 Acta Phys. Sin. 63 018101 (in Chinese) [黄成龙, 张继成, 刁凯迪, 曾勇, 易勇, 曹磊峰, 王红斌 2014 63 018101]
[4] Weaver J L, Holland G, Feldman U, Seely J F, Brown C M Serlin V, Deniz A V, Klapisch M 2001 Rev. Sci. Instrum. 72 108
[5] Eagleton R T, James S F 2004 Rev. Sci. Instrum. 75 3969
[6] Yang J M, Ding Y N, Zhang W H Zhang J Y, Zheng Z J 2003 Rev. Sci. Instrum. 74 4268
[7] Schnopper H W, Van Speybroeck L P, Delvaille J P, Epstein A, Köllne E, Bachrach R Z, Dijkstra J, Lantward L 1977 Appl. Opt. 14 1088
[8] Zhu X L, Ma J, Xie C Q, Ye T C, Liu M, Cao L F, Yang J M, Zhang W H 2008 Acta Optical Sinica 28 1026 (in Chinese) [朱效立, 马杰, 谢常青, 叶甜春, 刘明, 曹磊峰, 杨家敏, 张文海 2008 光学学报 28 1026]
[9] Li H L, Wu J, Zhu X L, Xie C Q, Liu M, Cao L F 2007 Acta Optical Sinica 29 2650 (in Chinese) [李海亮, 吴坚, 朱效立, 谢常青, 刘明, 曹磊峰 2007 光学学报 29 2650]
[10] Desauté P, Merdji H, Greiner V, Missalla T, Chenais-Popovics C, Troussel P 2000 Opt. Com. 173 37
[11] Wilhein T, Rehbein S, Hambach D, Berglund M, Rymell L, Hertz H M 1999 Rev. Sci. Instrum. 70 1694
[12] N N G 2006 Fourier Optics 2 (Beijing: China Machine Press) pp77-93 (in Chinese) [吕乃光 2006 傅里叶光学(第2版) (北京: 机械工业出版社) 第77–93页]
[13] Cao L F 2002 Ph. D. Dissertation (Mianyang: Chinese Aacdemy of Engineering Physics) (in Chinese) [曹磊峰 2002 博士学位论文(绵阳: 中国工程物理研究院)]
[14] Spector S J, Jacobsen C J, Tennant D M 1997 J. Vac. Sci. Technol. B 15 2872
[15] Zhu X L, Ma J, Cao L F, Yang J M, Xie C Q, Liu M, Chen B Q, Niu J B, Zhang Q Z, Jiang J, Zhao M, Ye T C 2007 Chinese Journal of Semiconductors 28 2006 (in Chinese) [朱效立, 马杰, 曹磊峰, 杨家敏, 谢常青, 刘明, 陈宝钦, 牛洁斌, 张庆钊, 姜骥, 赵珉, 叶甜春 2007 半导体学报 28 2006]
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[1] Shang W L, Zhu T, Xiong G, Zhao Y, Zhang W H, Yi R Q, Kuang L Y, Cao L F, Gao Y L, Yang J M, Zhao Y D, Cui M Q, Zhen L, Han Y, Zhou K J, Ma C Y 2011 Acta Phys. Sin. 60 034216 (in Chinese) [尚万里, 朱托, 熊刚, 赵阳, 张文海, 易荣清, 况龙钰, 曹磊峰, 高宇林, 杨家敏, 赵屹东, 崔明启, 郑雷, 韩勇, 周克瑾, 马陈燕 2011 60 034216]
[2] Zhang Q Q, Wei L, Yang Z H, Qian F, Fan Q P, Zhang B, Gu Y Q, Cao L F 2014 Chin. Phys. B 23 044215
[3] Huang C L, Zhang J C, Diao K D, Zeng Y, Yi Y, Cao L F, Wang H B 2014 Acta Phys. Sin. 63 018101 (in Chinese) [黄成龙, 张继成, 刁凯迪, 曾勇, 易勇, 曹磊峰, 王红斌 2014 63 018101]
[4] Weaver J L, Holland G, Feldman U, Seely J F, Brown C M Serlin V, Deniz A V, Klapisch M 2001 Rev. Sci. Instrum. 72 108
[5] Eagleton R T, James S F 2004 Rev. Sci. Instrum. 75 3969
[6] Yang J M, Ding Y N, Zhang W H Zhang J Y, Zheng Z J 2003 Rev. Sci. Instrum. 74 4268
[7] Schnopper H W, Van Speybroeck L P, Delvaille J P, Epstein A, Köllne E, Bachrach R Z, Dijkstra J, Lantward L 1977 Appl. Opt. 14 1088
[8] Zhu X L, Ma J, Xie C Q, Ye T C, Liu M, Cao L F, Yang J M, Zhang W H 2008 Acta Optical Sinica 28 1026 (in Chinese) [朱效立, 马杰, 谢常青, 叶甜春, 刘明, 曹磊峰, 杨家敏, 张文海 2008 光学学报 28 1026]
[9] Li H L, Wu J, Zhu X L, Xie C Q, Liu M, Cao L F 2007 Acta Optical Sinica 29 2650 (in Chinese) [李海亮, 吴坚, 朱效立, 谢常青, 刘明, 曹磊峰 2007 光学学报 29 2650]
[10] Desauté P, Merdji H, Greiner V, Missalla T, Chenais-Popovics C, Troussel P 2000 Opt. Com. 173 37
[11] Wilhein T, Rehbein S, Hambach D, Berglund M, Rymell L, Hertz H M 1999 Rev. Sci. Instrum. 70 1694
[12] N N G 2006 Fourier Optics 2 (Beijing: China Machine Press) pp77-93 (in Chinese) [吕乃光 2006 傅里叶光学(第2版) (北京: 机械工业出版社) 第77–93页]
[13] Cao L F 2002 Ph. D. Dissertation (Mianyang: Chinese Aacdemy of Engineering Physics) (in Chinese) [曹磊峰 2002 博士学位论文(绵阳: 中国工程物理研究院)]
[14] Spector S J, Jacobsen C J, Tennant D M 1997 J. Vac. Sci. Technol. B 15 2872
[15] Zhu X L, Ma J, Cao L F, Yang J M, Xie C Q, Liu M, Chen B Q, Niu J B, Zhang Q Z, Jiang J, Zhao M, Ye T C 2007 Chinese Journal of Semiconductors 28 2006 (in Chinese) [朱效立, 马杰, 曹磊峰, 杨家敏, 谢常青, 刘明, 陈宝钦, 牛洁斌, 张庆钊, 姜骥, 赵珉, 叶甜春 2007 半导体学报 28 2006]
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