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Characterization and bonding configuration of SiCOH low-k films

Wang Ting-Ting Ye Chao Ning Zhao-Yuan Cheng Shan-Hua

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Characterization and bonding configuration of SiCOH low-k films

Wang Ting-Ting, Ye Chao, Ning Zhao-Yuan, Cheng Shan-Hua
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  • Abstract views:  12435
  • PDF Downloads:  1045
  • Cited By: 0
Publishing process
  • Received Date:  09 May 2004
  • Accepted Date:  02 June 2004
  • Published Online:  05 January 2005

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