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A NEW METHOD FOR POST TREATMENT OF POROUS SILICON:SULFUR PASSIVATION BY MICROWAVE PLASMA ASSISTANCE

LIU XIAO-BING XIONG ZU-HONG YUAN SHUAI LIAO LIANG-SHENG HE JUN CAO XIAN-AN MIAO XI-YUE DING XUN-MIN HOU XIAO-YUAN

Citation:

A NEW METHOD FOR POST TREATMENT OF POROUS SILICON:SULFUR PASSIVATION BY MICROWAVE PLASMA ASSISTANCE

LIU XIAO-BING, XIONG ZU-HONG, YUAN SHUAI, LIAO LIANG-SHENG, HE JUN, CAO XIAN-AN, MIAO XI-YUE, DING XUN-MIN, HOU XIAO-YUAN
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  • Abstract views:  7442
  • PDF Downloads:  548
  • Cited By: 0
Publishing process
  • Received Date:  14 January 1997
  • Accepted Date:  11 March 1997
  • Published Online:  05 May 1997

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