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光学微腔在高灵敏度传感中有着重要的应用前景, 而在传感中热漂移是制约其走向实用的重要因素. 本文提出了一种镀有三层膜结构的微球腔, 可以在实现高灵敏度折射率传感的同时, 具备内参考热补偿功能. 该结构由内到外分别涂覆折射率为高、低、高的薄膜, 内外两高折射率层可以分别支持各自的回音壁模式, 称之为内层模式和外层模式. 研究了波导耦合的内外模式在折射率传感和温度传感应用的表现. 结果表明, 中间膜层厚度
${t_{B}}$ 为550 nm时, 内外模式的折射率灵敏度分别为0.0168和102.56 nm/RIU, 温度灵敏度分别为–19.57和–28.98 pm/K. 通过监测内外模式谐振波长的差值进行传感, 对中间膜层厚度进行优化,${t_{B}}$ = 400 nm时, 折射率灵敏度为75.219 nm/RIU, 探测极限可以达到2.2 × 10–4 RIU, 热漂移被减小到3.17 pm/K, 极大地减小了热漂移对系统的影响. 本研究可为微球腔折射率传感器的设计和改进提供指导.Optical microcavity has an important and promising application in high sensitivity sensing, but thermal drift hinders its practical use. In this study, we propose a triple-layer-coated microsphere resonator, which has a high sensitivity in refractive index sensing with low thermal drift. The refractive indexes of the three layers from the inside to the outside are high, low, and high, respectively. The two high refractive index layers can support their own whispering-gallery modes, called the inner mode (IM) and the outer mode (OM). We study the performance of IM and OM with waveguide coupling in refractive index sensing and temperature sensing. The results show that when the thickness of the middle layer is 550 nm, the refractive index sensitivity of IM and OM will be 0.0168 nm/RIU, 102.56 nm/RIU, and the temperature sensitivity will be –19.57 pm/K and –28.98 pm/K, respectively. The sensing is carried out by monitoring the difference in resonant wavelength between IM and OM and the sensing characteristics are optimized by adjusting the thickness of the middle layer. Further, when${t_B}$ = 400 nm, the refractive index sensitivity can arrive at 75.219 nm/RIU, the detection limit can reach 2.2 × 10–4 RIU, and the thermal drift is reduced to 3.17 pm/K, thereby eliminating the effect of thermal drift to a great degree. This study provides the guidance for designing and improving the microsphere refractive index sensors.-
Keywords:
- optical microcavity /
- coated layer structure /
- whispering-gallery modes /
- refractive index sensing
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图 1 耦合三层膜结构微球腔模型示意图 (a)三层膜结构微球腔模型; (b)二维仿真模型
Fig. 1. Schematic drawing of a coupled triple-layer-coated microsphere model: (a) Triple-layer-coated microsphere model; (b) 2D simulation model.
图 2 不同中间膜层厚度时内外模式的电场径向分布曲线及电场分布云图
Fig. 2. Electric field distributions of the inner and outer modes and the distributions along the radial direction with a various
${t_B}$ .
图 3 (a)
${t_B} = 550$ nm时球腔的透射谱; (b)外层模式(m = 148); (c)内层模式(m = 140)Fig. 3. (a) The transmission spectrum of the microsphere when
${t_B} = 550$ nm; (b) the outer mode (m = 148); (c) the inner mode (m = 140).
图 4 外层模式(a)与内层模式(c)透射谱随外界环境折射率的变化趋势; 外层模式(b)与内层模式(d)谐振波长偏移量
${\rm{\text{δ}}}{\lambda _{\rm{R}}}$ 与外界环境折射率变化量${\rm{\text{δ} }}n$ 的关系Fig. 4. Transmission spectra for the outer mode (a) and the inner mode (c) with the change of the external environment RI; The relationship between the shift of the resonance wavelength
${\rm{\text{δ} }}{\lambda _{\rm{R}}}$ and the change of the external environment RI$\text{δ} n$ for the outer mode (b) and the inner mode (d).
图 5 外层模式(a)与内层模式(b)谐振波长
${\lambda _{\rm{R}}}$ 与环境温度$T$ 的关系Fig. 5. The relationship between the resonance wavelength
${\lambda _{\rm{R}}}$ and the environment temperature$T$ for the outer mode (a) and the inner mode (b).
图 6 不同中间层厚度
${t_B}$ 时内外模式的折射率灵敏度(a)和温度灵敏度(b)Fig. 6. The refractive index sensitivity (a) and temperature sensitivity (b) for the inner mode and the outer mode with a various
${t_B}$ . -
[1] Vahala K J 2003 Nature 424 839
Google Scholar
[2] Song Q H 2019 Sci. China Phys. Mech. Astron. 62 074231
Google Scholar
[3] Hanumegowda N M, Stica C J, Patel B C, White I, Fan X D 2005 Appl. Phys. Lett. 87 201107
Google Scholar
[4] Yang K, Dai S X, Wu Y H, Nie Q H 2018 Chin. Phys. B 27 117701
Google Scholar
[5] Dong C H, He L, Xiao Y F, Gaddam V, Ozdemir S, Han Z F, Guo G C, Yang L 2009 Appl. Phys. Lett. 94 231119
Google Scholar
[6] Liu S, Sun W Z, Wang Y J, Yu X Y, Xu K, Huang Y Z, Xiao S M, Song Q H 2018 Optica 5 612
Google Scholar
[7] Ioppolo T, Kozhevnikov M, Stepaniuk V, Otugen M V, Sheverev V 2008 Appl. Opt. 47 3009
Google Scholar
[8] Qian K, Tang J, Guo H, Zhang W, Liu J H, Liu J, Xue C Y, Zhang W D 2016 Chin. Phys. B 25 114209
Google Scholar
[9] Rubino E, Ioppolo T 2018 Vibration 1 239
Google Scholar
[10] 陈华俊, 方贤文, 陈昌兆, 李洋 2016 65 194205
Google Scholar
Chen H J, Fang X W, Chen C Z, Li Y 2016 Acta Phys. Sin. 65 194205
Google Scholar
[11] Frustaci S, Vollmer F 2019 Curr. Opin. Chem. Biol. 51 66
[12] Teraoka I, Arnold S 2007 J. Opt. Soc. Am. B 24 653
Google Scholar
[13] Raghunathan V, Ye W N, Hu J, Izuhara T, Michel J, Kimerling L 2010 Opt. Express 18 17631
Google Scholar
[14] Yi H J, Citrin D S, Zhou Z P 2011 IEEE J. Quantum Elect. 47 354
Google Scholar
[15] Zhang X J, Feng X, Zhang D K, Huang Y D 2012 Chin. Phys. B 21 250
[16] Deng Q Z, Li X B, Zhou Z P, Yi H X 2014 Photonics Res. 2 71
Google Scholar
[17] Ma T, Yuan J H, Sun L, Kang Z, Yan B B, Sang X Z, Wang K R, Wu Q, Liu H, Gao J H, Yu C X 2017 IEEE Photonics J. 9 6800913
[18] Wang M Y, Jin X Y, Li F, Cai B L, Wang K Y 2018 Opt. Commun. 427 70
Google Scholar
[19] 唐水晶, 李贝贝, 肖云峰 2019 物理 48 137
Google Scholar
Tang S J, Li B B, Xiao Y F 2019 Physics 48 137
Google Scholar
[20] Dong Y C, Wang K Y, Jin X Y 2015 Opt. Commun. 344 92
Google Scholar
[21] Wang P F, Ding M, Murugan G S, Bo L, Guan C Y, Semenova Y, Wu Q, Farrell G, Brambilla G 2014 Opt. Lett. 39 5208
Google Scholar
[22] Wang P F, Ding M, Lee T, Murugan G S, Bo L, Semenova Y, Wu Q, Hewak D, Brambilla G, Farrell G 2013 Appl. Phys. Lett. 102 131110
Google Scholar
[23] Tuchin V V, Maksimova I L, Zimnyakov D A, Kon I L, Mavlyutov A H, Mishin A A 1997 J. Biomed. Opt. 2 401
Google Scholar
[24] He L, Xiao Y F, Dong C, Zhu J, Gaddam V, Yang L 2008 Appl. Phys. Lett. 93 201102
Google Scholar
[25] Reshef O, Shtyrkova K, Moebius M, Nascimento S, Spector S, Evans C, Ippen E, Mazur E 2015 J. Opt. Soc. Am. B 32 2288
Google Scholar
[26] Daimon M, Masumura A 2007 Appl. Opt. 46 3811
Google Scholar
[27] White M I, Fan X D 2008 Opt. Express 16 1020
Google Scholar
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