花状掺杂W-VO2/ZnO热致变色纳米复合薄膜研究

朱慧群; 李毅; 叶伟杰; 李春波

doi:10.7498/aps.63.238101

摘要

为解决掺杂引起的二氧化钒薄膜的红外调制幅度下降以及二氧化钒复合薄膜相变温度需要进一步降低等问题, 采用纳米结构、掺杂改性和复合结构等多种机理协同作用的方案, 利用共溅射氧化法, 先在石英玻璃上制备高(002)取向的ZnO薄膜, 再在ZnO层上室温共溅射沉积钒钨金属薄膜, 最后经热氧化处理获得双层钨掺杂W-VO2/ZnO纳米复合薄膜. 利用X射线衍射、X射线光电子能谱、扫描电镜和变温光谱分析等对薄膜的结构、组分、形貌和光学特性进行了分析. 结果显示, W-VO2/ZnO 纳米复合薄膜呈花状结构, 取向性提高, 在保持掺杂薄膜相变温度(约39 ℃)和热滞回线宽度(约6 ℃)较低的情况下, 其相变前后的红外透过率差量增加近2倍, 热致变色性能得到协同增强.

关键词:

VO2 /
ZnO /
W掺杂 /
热致变色

Abstract

Based on the nanocomposite structure and doping modification, we have studied the preparation technology of high performance nanocomposite thin film and its characterization methods. The W-doped VO2/ZnO nanocomposite thin films are prepared successfully on SiO2 substrates by the three-step method. The structure and morphology of the W-doped VO2/ZnO/SiO2 films are analyzed by X-ray diffraction, X-ray photoelectron spectroscopy and scanning electron microscope. Results show that the films are mainly composed of VO2 and high valence cation W6+ replacing the V ion in the W-doped VO2/ZnO/SiO2 films. It is found that the flake nanocrystallines resemble a flower in shape, and its size and orientational growth are reduced. The thermochromic properties of W-doped VO2/ZnO films are measured and compared with the single-layer W-doped VO2 films on SiO2 substrates with the same thickness. The variation of infrared transmittance of the W-doped VO2/ZnO/SiO2 nanocomposite film is increased nearly two times, the phase transition temperature reduced approximately to 39 °C, and the width of the thermal hysteresis loop is about 6 °C. The W-doped VO2/ZnO/SiO2 nanocomposite film has a high infrared modulation ability, a lower phase transition temperature, and a narrower thermal hysteresis loop. Thus the potential application of this nanocomposite film is significantly improved.

Keywords:

VO2 /
ZnO /
W-doped /
thermochromism

作者及机构信息

1.
五邑大学应用物理与材料学院, 江门 529020;

2.
上海理工大学光电信息与计算机工程学院, 上海 200093

基金项目: 国家高技术研究发展计划(批准号:2006AA03Z348)、广东省自然科学基金(批准号:10152902001000025)、广东高校省级重点平台和重大科研项目特色创新项目(批准号:2014)、广东省大学生创新创业训练计划(批准号:教发[2012]62)和江门市产业技术研究与开发项目(批准号:江财工[2012]156)资助的课题.

Authors and contacts

1.
School of Applied Physics and Material, Wuyi University, Jiangmen 529020, China;

2.
College of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China

Funds: Project supported by the National High Technology Research and Development Program of China (Grant No. 2006AA03Z348), the Natural Science Foundation of Guangdong Province, China (Grant No. 10152902001000025), the Distinctive Innovations Project of Provincial Key Platform and Major Scientific Research Project of Universities in Guangdong Province, China (Grant No. 2014), the Innovation and Entrepreneurship Training Project for Undergraduate of Guangdong Province, China (Grant No. JF [2012]62), and the Industrial Technology Research and Development Project of Jiangmen City, China (Grant No. JCG [2012]156).

参考文献

[1]	Morin F J 1959 Phys. Rev. Lett. 3 34
[2]	Gao Y F, Luo H J, Zhang Z T 2012 Nano Energy 1 221
[3]	Granqvist C G, Lansaker P C, Mlyuka N R 2009 Sol. Energy Mater. Sol. Cells 93 2032
[4]	Zhu N W, Hu M, Xia X X, Wei X Y, Liang J R 2014 Chin. Phys. B 23 048108
[5]	Wang X J, Liu Y Y, Li D H, Feng B H, He Z W, Qi Z 2013 Chin. Phys. B 22 066803
[6]	Joyeeta N, Haglund Jr R F 2008 J. Phys.: Condens. Matter 20 264016
[7]	Saeli M, Binions R, Piccirillo C 2009 Appl. Surf. Sci. 255 7291
[8]	Kyoung J, Seo M, Park H, Koo S, Kim H, Park Y, Kim B J, Ahn K, Park N, Kim H, Kim D S 2010 Opt. Express 18 16452
[9]	Peng Z F, Wang Y, Du Y Y, Lu D, Sun D Z 2009 J. Alloys Compd. 480 537
[10]	Li J, Liu C Y, Mao L J 2009 J. Solid State Chem. 182 2835
[11]	Wang Y L, Chen X K, Li M C 2007 Surf. Coat. Technol. 201 5344
[12]	Zhou S, Li Y, Zhu H Q, Sun R X, Zhang Y M, Zheng Q X, Li L, Shen Y J, Fang B Y 2012 Surf. Coat. Technol. 206 2922
[13]	Shi J Q, Zhou S X, You B, Wu L M 2007 Sol. Energy Mater. Sol. Cells 91 1856
[14]	Zhu H Q, Li Y, Zhou S, Huang Y Z, Tong G X, Sun R X, Zhang Y M, Zheng Q X, Li L, Shen Y J, Fang B Y 2011 Acta Phys. Sin. 60 098104 (in Chinese) [朱慧群, 李毅, 周晟, 黄毅泽, 佟国香, 孙若曦, 张宇明, 郑秋心, 李榴, 沈雨剪, 方宝英 2011 60 098104]
[15]	Kiri P, Warwick M E A, Ridley I, Binions R 2011 Thin Solid Films 520 1363
[16]	Yan J Z, Zhang Y, Liu Y S, Zhang Y B, Huang W X, Tu M J 2008 Rare Metal Mater. Eng. 37 1648 (in Chinese) [颜家振, 张月, 刘阳思, 张玉波, 黄婉霞, 涂铭旌 2008 稀有金属材料与工程 37 1648]
[17]	Wang L X, Li J P, He X L, Gao X G 2006 Acta Phys. Sin. 55 2846 (in Chinese) [王利霞, 李建平, 何秀丽, 高晓光 2006 55 2846]
[18]	Xu X, Yin A Y, Du X L 2010 Appl. Surf. Sci. 256 2750
[19]	Zhu H Q, Li Y, Guo G X, Fang B Y, Wang X H 2013 Adv. Mater. -Rapid Commun. 7 1015
[20]	Case F C 1987 Appl. Opt. 26 1550
[21]	Yan J Z, Zhang Y, Huang W X, Tu M J 2008 Thin Solid Films 516 8554
[22]	He Q, Xu X D, Wen Y J, Jiang Y D, Ao T H, Fan T J, Huang L, Ma C Q, Sun Z Q 2013 Acta Phys. Sin. 62 056802 (in Chinese) [何琼, 许向东, 温粤江, 蒋亚东, 敖天宏, 樊泰君, 黄龙, 马春前, 孙自强 2013 62 056802]
[23]	Pauli S A, Herger R, Willmott P R, Donev E U, Suh J Y, Haglund Jr R F 2007 J. Appl. Phys. 102 073527
[24]	Lopez R, Feldman L C 2004 Phys. Rev. Lett. 93 177403

施引文献

[1]	Morin F J 1959 Phys. Rev. Lett. 3 34
[2]	Gao Y F, Luo H J, Zhang Z T 2012 Nano Energy 1 221
[3]	Granqvist C G, Lansaker P C, Mlyuka N R 2009 Sol. Energy Mater. Sol. Cells 93 2032
[4]	Zhu N W, Hu M, Xia X X, Wei X Y, Liang J R 2014 Chin. Phys. B 23 048108
[5]	Wang X J, Liu Y Y, Li D H, Feng B H, He Z W, Qi Z 2013 Chin. Phys. B 22 066803
[6]	Joyeeta N, Haglund Jr R F 2008 J. Phys.: Condens. Matter 20 264016
[7]	Saeli M, Binions R, Piccirillo C 2009 Appl. Surf. Sci. 255 7291
[8]	Kyoung J, Seo M, Park H, Koo S, Kim H, Park Y, Kim B J, Ahn K, Park N, Kim H, Kim D S 2010 Opt. Express 18 16452
[9]	Peng Z F, Wang Y, Du Y Y, Lu D, Sun D Z 2009 J. Alloys Compd. 480 537
[10]	Li J, Liu C Y, Mao L J 2009 J. Solid State Chem. 182 2835
[11]	Wang Y L, Chen X K, Li M C 2007 Surf. Coat. Technol. 201 5344
[12]	Zhou S, Li Y, Zhu H Q, Sun R X, Zhang Y M, Zheng Q X, Li L, Shen Y J, Fang B Y 2012 Surf. Coat. Technol. 206 2922
[13]	Shi J Q, Zhou S X, You B, Wu L M 2007 Sol. Energy Mater. Sol. Cells 91 1856
[14]	Zhu H Q, Li Y, Zhou S, Huang Y Z, Tong G X, Sun R X, Zhang Y M, Zheng Q X, Li L, Shen Y J, Fang B Y 2011 Acta Phys. Sin. 60 098104 (in Chinese) [朱慧群, 李毅, 周晟, 黄毅泽, 佟国香, 孙若曦, 张宇明, 郑秋心, 李榴, 沈雨剪, 方宝英 2011 60 098104]
[15]	Kiri P, Warwick M E A, Ridley I, Binions R 2011 Thin Solid Films 520 1363
[16]	Yan J Z, Zhang Y, Liu Y S, Zhang Y B, Huang W X, Tu M J 2008 Rare Metal Mater. Eng. 37 1648 (in Chinese) [颜家振, 张月, 刘阳思, 张玉波, 黄婉霞, 涂铭旌 2008 稀有金属材料与工程 37 1648]
[17]	Wang L X, Li J P, He X L, Gao X G 2006 Acta Phys. Sin. 55 2846 (in Chinese) [王利霞, 李建平, 何秀丽, 高晓光 2006 55 2846]
[18]	Xu X, Yin A Y, Du X L 2010 Appl. Surf. Sci. 256 2750
[19]	Zhu H Q, Li Y, Guo G X, Fang B Y, Wang X H 2013 Adv. Mater. -Rapid Commun. 7 1015
[20]	Case F C 1987 Appl. Opt. 26 1550
[21]	Yan J Z, Zhang Y, Huang W X, Tu M J 2008 Thin Solid Films 516 8554
[22]	He Q, Xu X D, Wen Y J, Jiang Y D, Ao T H, Fan T J, Huang L, Ma C Q, Sun Z Q 2013 Acta Phys. Sin. 62 056802 (in Chinese) [何琼, 许向东, 温粤江, 蒋亚东, 敖天宏, 樊泰君, 黄龙, 马春前, 孙自强 2013 62 056802]
[23]	Pauli S A, Herger R, Willmott P R, Donev E U, Suh J Y, Haglund Jr R F 2007 J. Appl. Phys. 102 073527
[24]	Lopez R, Feldman L C 2004 Phys. Rev. Lett. 93 177403

[1]	高旭东, 杨得草, 魏雯静, 李公平. 电子束对ZnO和TiO₂辐照损伤的模拟计算. , 2021, 70(23): 234101. doi: 10.7498/aps.70.20211223
[2]	黄炳铨, 周铁戈, 吴道雄, 张召富, 李百奎. 空位及氮掺杂二维ZnO单层材料性质:第一性原理计算与分子轨道分析. , 2019, 68(24): 246301. doi: 10.7498/aps.68.20191258
[3]	郭家俊, 董静雨, 康鑫, 陈伟, 赵旭. 过渡金属元素X(X=Mn,Fe,Co,Ni)掺杂对ZnO基阻变存储器性能的影响. , 2018, 67(6): 063101. doi: 10.7498/aps.67.20172459
[4]	侯清玉, 李勇, 赵春旺. Al掺杂和空位对ZnO磁性影响的第一性原理研究. , 2017, 66(6): 067202. doi: 10.7498/aps.66.067202
[5]	唐欣月, 高红, 潘思明, 孙鉴波, 姚秀伟, 张喜田. 单根In掺杂ZnO纳米带场效应管的电学性质. , 2014, 63(19): 197302. doi: 10.7498/aps.63.197302
[6]	刘玮洁, 孙正昊, 黄宇欣, 冷静, 崔海宁. 不同价态稀土元素Yb掺杂ZnO的电子结构和光学性质. , 2013, 62(12): 127101. doi: 10.7498/aps.62.127101
[7]	李泓霖, 张仲, 吕英波, 黄金昭, 张英, 刘如喜. 第一性原理研究稀土掺杂ZnO结构的光电性质. , 2013, 62(4): 047101. doi: 10.7498/aps.62.047101
[8]	佟国香, 李毅, 王锋, 黄毅泽, 方宝英, 王晓华, 朱慧群, 梁倩, 严梦, 覃源, 丁杰, 陈少娟, 陈建坤, 郑鸿柱, 袁文瑞. 磁控溅射制备W掺杂VO2/FTO复合薄膜及其性能分析. , 2013, 62(20): 208102. doi: 10.7498/aps.62.208102
[9]	鲍善永, 董武军, 徐兴, 栾田宝, 李杰, 张庆瑜. 氧分压对Mg掺杂ZnO薄膜结晶质量和光学特性的影响. , 2011, 60(3): 036804. doi: 10.7498/aps.60.036804
[10]	张富春, 张威虎, 董军堂, 张志勇. Cr掺杂ZnO纳米线的电子结构和磁性. , 2011, 60(12): 127503. doi: 10.7498/aps.60.127503
[11]	朱慧群, 李毅, 周晟, 黄毅泽, 佟国香, 孙若曦, 张宇明, 郑秋心, 李榴, 沈雨剪, 方宝英. 纳米VO2/ZnO复合薄膜的热致变色特性研究. , 2011, 60(9): 098104. doi: 10.7498/aps.60.098104
[12]	袁娣, 黄多辉, 罗华峰, 王藩侯. Li, N双受主共掺杂实现p型ZnO的第一性原理研究. , 2010, 59(9): 6457-6465. doi: 10.7498/aps.59.6457
[13]	严国清, 谢凯旋, 莫仲荣, 路忠林, 邹文琴, 王申, 岳凤娟, 吴镝, 张凤鸣, 都有为. 共沉淀法制备Co掺杂ZnO的室温铁磁性的研究. , 2009, 58(2): 1237-1241. doi: 10.7498/aps.58.1237
[14]	毕艳军, 郭志友, 孙慧卿, 林竹, 董玉成. Co和Mn共掺杂ZnO电子结构和光学性质的第一性原理研究. , 2008, 57(12): 7800-7805. doi: 10.7498/aps.57.7800
[15]	羊新胜, 赵勇. 铁磁性锰氧化物掺杂的ZnO压敏电阻性能研究. , 2008, 57(5): 3188-3192. doi: 10.7498/aps.57.3188
[16]	于宙, 李祥, 龙雪, 程兴旺, 王晶云, 刘颖, 曹茂盛, 王富耻. Mn掺杂ZnO稀磁半导体材料的制备和磁性研究. , 2008, 57(7): 4539-4544. doi: 10.7498/aps.57.4539
[17]	段满益, 徐明, 周海平, 陈青云, 胡志刚, 董成军. 碳掺杂ZnO的电子结构和光学性质. , 2008, 57(10): 6520-6525. doi: 10.7498/aps.57.6520
[18]	段满益, 徐明, 周海平, 沈益斌, 陈青云, 丁迎春, 祝文军. 过渡金属与氮共掺杂ZnO电子结构和光学性质的第一性原理研究. , 2007, 56(9): 5359-5365. doi: 10.7498/aps.56.5359
[19]	刘学超, 施尔畏, 宋力昕, 张华伟, 陈之战. 固相反应法制备Co掺杂ZnO的磁性和光学性能研究. , 2006, 55(5): 2557-2561. doi: 10.7498/aps.55.2557
[20]	杨春, 余毅, 李言荣, 刘永华. 温度对ZnO/Al2O3(0001)界面的吸附、扩散及生长初期模式的影响. , 2005, 54(12): 5907-5913. doi: 10.7498/aps.54.5907

计量

文章访问数: 7035
PDF下载量: 1018
被引次数: 0

姓名
邮箱
手机号码
标题
留言内容
验证码

搜索

留言板