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超表面透镜是一种通过调制表面微单元结构参数来实现对光波相位、振幅和偏振的精确调控的微型平面透镜. 相较于普通透镜, 具有尺寸小、重量轻、集成度高等优点, 是光子芯片的核心器件. 为突破衍射极限, 进一步提升超表面透镜的聚焦性能和成像分辨率, 需结合现有的光场调控技术, 对入射光场进行多维信息调控. 参考光瞳滤波器的超分辨成像原理, 设计了一种融合型超表面透镜, 可同时实现透镜聚焦和光瞳滤波器的功能, 从而获得超越衍射极限的聚焦光斑. 通过参数优化, 最终实现了半高全宽为323.4 nm(~0.51λ)的焦斑, 较未加光瞳滤波器的超表面透镜(半高全宽为376 nm)性能提升了近15%. 本文设计的融合型超表面透镜展示了全面光场调控对其光学性能的提升, 在未来有望代替传统透镜, 并在纳米显微成像、纳米光刻、虚拟现实以及3D显示等领域发挥重要作用.
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关键词:
- . 关键词:超表面透镜 /
- 光瞳滤波 /
- 超分辨成像
Metasurface lenses are miniature flat lenses that can precisely control the phase, amplitude, and polarization of incident light by modulating the parameters of each unit on the substrate. Compared with conventional optical lenses, they have the advantages of small size, light weight, and high integration, and are the core components of photonic chips. Currently, the hot topics for metasurface lens are broadband and achromatic devices, and there is still less attention paid to the resolution improvement. To break through the diffraction limit and further improve the focusing performance and imaging resolution of metasurface lenses, we use unit cells to perform multi-dimensional modulation of the incident light field. Specifically, in this paper, we combine phase modulation of metasurface lens with a pupil filtering, which has been widely applied to traditional microscopy imaging and adaptive optics and has demonstrated powerful resolution enhancement effects. The integrating of these two technologies will continue to improve the imaging performance of metasurface lenses and thus expanding their application fields. In this work, we firstly design a single-cell super-surface lens composed of a silicon nanofin array and a silica substrate as a benchmark for comparing the performance of integrated super-surface lens. The lens achieves an ideal focal spot for incident light at 633 nm, resulting in a full width at half maximum (FWHM) of 376.0 nm. Then, a three-zone phase modulating pupil filter is proposed and designed with the same aperture of metasurface lens, which has a phase jump of 0-π-0 from the inside to the outside of the aperture. From the simulation results, the main lobe size of the focal spot is compressed obviously. In the optimization, its structural parameters are scanned for the best performance, and an optimal set of structural parameters is selected and used in the integrated metasurface lens. Finally, the integrated metasurface lens is designed by combining the metasurface lens with a three-zone phase modulating pupil filter, and the FWHM of its focal spot is compressed to 323.4 nm (≈ 0.51λ), which is not only 15% smaller than original metasurface lens’s FWHM of 376.0 nm, but also much smaller than the diffraction limit of 0.61λ/NA (when NA = 0.9, it is approximately 429.0 nm). This result preliminarily demonstrates the super-resolution performance of the integrated super-surface lens. With the comprehensive regulation of multi-dimensional information, such as amplitude, polarization, and vortex, the integrated super-surface optical lens will achieve more excellent super-resolution focusing and imaging performance, and will also be widely used in the fields of super-resolution imaging, virtual reality, and three-dimensional optical display, due to its characteristics of high resolution, high integration, and high miniaturization. -
Keywords:
- meta-lens /
- pupil filter /
- super-resolution imaging
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图 1 超表面透镜的微单元结构参数(a)和微单元的周期性排布(b)
Fig. 1. Metasurface lens’ microcell structure parameters (a) and the periodic arrangement of microcells (b).
图 3 (a) x-y平面内焦斑的光强分布; (b) y-z平面成像内焦斑的光强分布; (c) x-y平面内的相位分布; (d) y-z平面内的相位分布
Fig. 3. (a) Light intensity distributions in x-y plane for the focal spot; (b) light intensity distributions in y-z plane for the focal spot; (c) phase distributions in x-y plane for the focal spot; (d) phase distributions in y-z plane for the focal spot.
图 4 三区相位型光瞳滤波器的结构示意图(a)和使用光路(b)
Fig. 4. Structural diagram (a) and optical path (b) of the three-zone phase pupil filter.
图 5 归一化光强分布对比 (a) r1 = 0.33, r2 = 0.67, r3 = 1; (b) r1 = 0.2, r2 = 0.8, r3 = 1; (c) r1 = 0.1, r2 = 0.9, r3 = 1
Fig. 5. Comparison of normalized light intensity distribution: (a) r1 = 0.33, r2 = 0.67, r3 = 1; (b) r1 = 0.2, r2 = 0.8, r3 = 1; (c) r1 = 0.1, r2 = 0.9, r3 = 1.
图 7 (a)单胞元超表面透镜y-z平面相位分布; (b)融合型超表面透镜y-z平面相位分布
Fig. 7. (a) Single cell metasurface lens y-z plane phase distribution; (b) integrated type metasurface lens y-z plane phase distribution.
图 8 融合型超表面透镜焦斑处的光强分布 (a) 透镜焦平面上; (b) y-z平面
Fig. 8. Light intensity distribution at the focal spot of integrated metasurface lens: (a) Focal plane image; (b) y-z plane.
图 9 两种超表面透镜焦斑中心光强分布曲线对比
Fig. 9. Comparison of normalized light intensity distributions of two metasurface lenses around the focal spot centrals.
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