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软X射线平焦场光栅光谱仪是等离子体诊断的重要仪器, 其核心光学元件全息平焦场光栅通常采用非球面波记录光路制作, 因此光栅条纹存在弯曲的现象. 光栅条纹的弯曲会影响光谱成像质量, 从而影响系统的光谱分辨率. 记录光路的优化, 只保证光栅子午面的线密度分布, 因此优化的记录光路并不是惟一的, 所以在保证子午面的线密度分布的同时能制作具有不同弯曲程度条纹的光栅. 针对应用于0.86 nm的全息平焦场光栅, 利用光线追迹方法分析了不同弯曲程度条纹光栅的光谱成像, 发现采用柱面反射镜制作的接近于直条纹的光栅具有较好的光谱成像质量. 相对于弯曲条纹的光栅, 接近于直条纹的光栅理论光谱分辨率有明显的提高, 入射波长为3 nm时, 光谱分辨率从626提升到953, 入射波长为5 nm时, 光谱分辨率从635提高到1222.The soft X-ray spectrograph is an important instrument for plasma diagnostics. As the core optical element of spectrograph, holographic flat-field grating is fabricated by aspheric wave-front recording optics, so grooves on the surface are curve. The curve grooves of the grating would affect the spectral image properties, thus influencing spectral resolutions. In the design of recording optics, only the groove density distribution on the surface in meridian line should be guaranteed, so optimized recording optics is not unique. Thus gratings with different curvatures of grooves but with expected groove density distribution could be obtained. For holographic flat-field gratings used in a 0.8-6 nm region, we analyze the influences of different curve grooves on the spectral image by ray tracing, and find that the almost straight grooves which are obtained by means of cylinder mirror can obtain the better spectral images. The theoretical results show that the spectral resolutions of grating with almost straight grooves are obviously improved compared with curve grooves, the theoretical spectral resolutions increase from 626 to 953 at 3 nm and from 635 to 1222 at 5 nm, respectively.
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Keywords:
- soft X-ray /
- flat-field grating /
- curve groove /
- spectral resolution
[1] Wu J, Yang J M, Ding Y K, Ding Y N, Wang Y M, Zhang W H, Zheng Z J, Yang X D 2002 High Power Laser Particle Beams 14 489 (in Chinese) [吴军, 杨家敏, 丁永坤, 丁耀南, 王跃梅, 张文海, 郑志坚, 杨向东 2002 强激光与粒子束 14 489]
[2] Yang J M, Ding Y N, Chen B, Zheng Z J, Yang G H, Zhang B H, Wang Y M, Zhang W H 2003 Acta Phys. Sin. 52 411 (in Chinese) [杨家敏, 丁耀南, 陈波, 郑志坚, 杨国洪, 张保汉, 王耀梅, 张文海 2003 52 411]
[3] Xie X H, Liu Y Q, Fan P Z, Li R X 2004 Chin. Phys. 13 1826
[4] Yang J M, Ding Y N, Zheng Z J, Wang Y M, Zhang W H, Zhang J Y, Liu J Y, Shan B, Gao S C, Ren Y L, Liu X Q 2003 Acta Phys. Sin. 52 1427 (in Chinese) [杨家敏, 丁耀南, 郑志坚, 王耀梅, 张文海, 张继彦, 刘进元, 山冰, 高盛琛, 任有来, 刘秀琴 2003 52 1427]
[5] Kita T, Harada T, Nakano N, Kuroda H 1983 Appl. Opt. 22 512
[6] Koike M, Yamazaki T, Harada Y 1999 J. Electron. Spectrosc. Relat. Phenom. 101 913
[7] Imazono T, Ishino M, Koike M, Sasai H, Sano K 2007 Appl. Opt. 46 7054
[8] Imazono T, Koike M, Koeda M, Nagano T, Sasai H, Oue Y, Yonezawa Z, Kuramoto S, Terauchi M, Takahashi H, Handa N, Murano T 2012 21st In ternational Conference on X-Ray Optics and Microanalysis Campinas, Brazil, September 5-9, 2011 p24
[9] Lou J, Xu X D, Liu Y, Hong Y L, Fu S J, He S P 2006 Opt. Precision Eng. 14 12 (in Chinese) [楼俊, 徐向东, 刘颖, 洪义麟, 付绍军, 何世平 2006 光学精密工程 14 12]
[10] Namioka T, Koike M 1995 Appl. Opt. 34 2180
[11] Harada T, Takahashi K, Sakuma H, Osyczka A 1999 Appl. Opt. 38 2743
[12] Noda H, Namioka T, Seya M 1974 J. Opt. Soc. Am. 64 1037
[13] Dong Q L, Liu Y Q, Teng H, Li Y J, Zhang J 2014 Chin. Phys. B 23 065206
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[1] Wu J, Yang J M, Ding Y K, Ding Y N, Wang Y M, Zhang W H, Zheng Z J, Yang X D 2002 High Power Laser Particle Beams 14 489 (in Chinese) [吴军, 杨家敏, 丁永坤, 丁耀南, 王跃梅, 张文海, 郑志坚, 杨向东 2002 强激光与粒子束 14 489]
[2] Yang J M, Ding Y N, Chen B, Zheng Z J, Yang G H, Zhang B H, Wang Y M, Zhang W H 2003 Acta Phys. Sin. 52 411 (in Chinese) [杨家敏, 丁耀南, 陈波, 郑志坚, 杨国洪, 张保汉, 王耀梅, 张文海 2003 52 411]
[3] Xie X H, Liu Y Q, Fan P Z, Li R X 2004 Chin. Phys. 13 1826
[4] Yang J M, Ding Y N, Zheng Z J, Wang Y M, Zhang W H, Zhang J Y, Liu J Y, Shan B, Gao S C, Ren Y L, Liu X Q 2003 Acta Phys. Sin. 52 1427 (in Chinese) [杨家敏, 丁耀南, 郑志坚, 王耀梅, 张文海, 张继彦, 刘进元, 山冰, 高盛琛, 任有来, 刘秀琴 2003 52 1427]
[5] Kita T, Harada T, Nakano N, Kuroda H 1983 Appl. Opt. 22 512
[6] Koike M, Yamazaki T, Harada Y 1999 J. Electron. Spectrosc. Relat. Phenom. 101 913
[7] Imazono T, Ishino M, Koike M, Sasai H, Sano K 2007 Appl. Opt. 46 7054
[8] Imazono T, Koike M, Koeda M, Nagano T, Sasai H, Oue Y, Yonezawa Z, Kuramoto S, Terauchi M, Takahashi H, Handa N, Murano T 2012 21st In ternational Conference on X-Ray Optics and Microanalysis Campinas, Brazil, September 5-9, 2011 p24
[9] Lou J, Xu X D, Liu Y, Hong Y L, Fu S J, He S P 2006 Opt. Precision Eng. 14 12 (in Chinese) [楼俊, 徐向东, 刘颖, 洪义麟, 付绍军, 何世平 2006 光学精密工程 14 12]
[10] Namioka T, Koike M 1995 Appl. Opt. 34 2180
[11] Harada T, Takahashi K, Sakuma H, Osyczka A 1999 Appl. Opt. 38 2743
[12] Noda H, Namioka T, Seya M 1974 J. Opt. Soc. Am. 64 1037
[13] Dong Q L, Liu Y Q, Teng H, Li Y J, Zhang J 2014 Chin. Phys. B 23 065206
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